AWM3201CR

AWM3000 Series Mass flow sensor for gases FEATURES · Ranges 0...30 to 0...±1000 sccm1 or 0...0.5 to 0...2 "H2O (0...1.25 to 0...5 mbar) · 1...5 V, 1...3.75 V, 4...20 mA output · Actual mass flow sensing · Low differential pressure sensing SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS Maximum ratings Supply voltage2 8 to 15 V typ. 10 ±0.01 V ELECTRICAL CONNECTION P1 P2 Power consumption AWM3303V AWM3...CR all others Temperature limits Operating Storage Mechanical shock typ. 100 mW typ. 50 mW typ. 50 mW, max. 60 mW 123 -25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes) Pin 1: Vout Pin 2: +V s Pin 3: GND Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage June 2006 / 582 1/6 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases FLOW SENSOR CHARACTERISTICS3 VS = 10 ±0.01 V, TA = 25°C Part no. AWM3100V AWM3150V AWM3200V AWM3300V AWM3303V AWM3200CR AWM3201CR Flow range (full scale) 2 0 0 sccm 3 0 sccm Pressure range Max. flow change4 5.0 l/sec 5.0 l/sec Output voltage @ trim point 5 V @ 2 0 0 sccm 3.4 V @ 25 sccm 5 V @ 2 "H2O 5 V @ 1 0 0 0 sccm 5 ±0.15 V 20 ±1 mA @ 2 "H2O 20 ±1 mA @ 0.5 "H2O 2 "H2O 1 0 0 0 sccm ±1000 sccm 2 "H2O 0.5 "H2O 5.0 l/sec 5.0 l/sec 5.0 l/sec 5.0 l/sec 5.0 l/sec PERFORMANCE CHARACTERISTICS VOLTAGE OUTPUT VERSIONS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset AWM3100V AWM3150V AWM3200V AWM3300V AWM3303V Repeatability and hysteresis (combined) Temperature effects5 Offset -25 to 85 °C6 AWM3100V, AWM3200V all others AWM3150V AWM3303V all others Span -25 to 25 °C AWM3100V AWM3150V AWM3200V AWM33... 25 to 85 °C AWM3100V AWM3150V AWM3200V AWM33... Response time 7 Min. 0.95 0.90 0.92 0.90 2.95 Typ. 1.0 1.0 1.0 1.0 3.0 Max. 1.05 1.10 1.08 1.10 3.05 ±0.5 ±1.0 Unit V % reading ±100 ±50 ±25 -4.0 ±5.0 24.05 -5.0 4.0 ±5.0 -24.05 5.0 1.0 3.0 25 ms p si % reading mV Common mode pressure 2/6 June 2006 / 582 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases PERFORMANCE CHARACTERISTICS CURRENT OUTPUT VERSIONS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset Repeatability and hysteresis (combined) Non-linearity Temperature effects5 Offset Span -25 to 85 °C6 -25 to 25 °C 25 to 85 °C AWM3200CR AWM3201CR AWM3200CR AWM3201CR Response time7 External output load 8 Min. AWM3200CR AWM3201CR 3.7 3.6 Typ. 4.0 4.0 5 Max. 4.3 4.4 ±0.5 ±2.0 24 5 Unit mA % reading mA 325 -315 -325 60 100 to 300 % reading ms Ohm GAS CORRECTION FACTORS9 Gas type Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Correction factor (approx.) 0.510 0.710,11 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature. 6 Shift is relative to 25 °C. 7 Initial warm-up time for signal conditioned circuitry is 1 minute max. 8 Output load connected from Vout to GND (current sinking). 9 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 10 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 11 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. June 2006 / 582 3/6 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases OUTPUT FLOW VS INTERCHANGEABILITY VS = 10 ±0.01 V, TA = 25°C 13 12 13 OUTPUT CURVES 4/6 June 2006 / 582 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases OUTPUT FLOW VS INTERCHANGEABILITY VS = 10 ±0.01 V, TA = 25°C 13 13 12 13 OUTPUT CURVES June 2006 / 582 5/6 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases OUTLINE DRAWING 2.8 (0.11) 2.9 (0.114) 6.3 (0.25) 7.60 (0.30) 1.40 (0.055) 1.8 (0.07) 5.1 (0.20) 54.4 (2.14) 8.4 (0.33) P1 P2 31.5 (1.24) 23.6 (0.93) 2.8 (0.11) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output. 1.0 (0.04) 123 0.6 (0.025) 1.52 (0.06) 2.5 (0.10) 5.1 (0.20) 7.3 (0.287) 23.9 (0.94) 30.5 (1.20) 12.7 (0.50) 15.5 (0.61) 4.1 (0.16) mass: approx. 10.8 g dimensions in mm (inches) ORDERING INFORMATION Flow range 0...30 sccm 0...200 sccm 0...1000 sccm 0...±1000 sccm Dry gas AWM3150V AWM3100V AWM3300V AWM3303V Pressure range Voltage output 0...0.5 "H2O (0...1.25 mbar) 0...2 "H2O (0...5 mbar) --AWM3200V Dry gas Current output AWM3201CR AWM3200CR Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 6/6 June 2006 / 582 www.sensortechnics.com