AWM43300VH

AWM43000 Series Mass flow sensor for gases FEATURES · Ranges 0...1000 sccm1 and 0...6 slpm2 · Actual mass flow sensing · 1...5 V output · Manifold mount/o-ring sealed SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS Maximum ratings Supply voltage3 8 to 15 V typ. 10 ±0.01 V ELECTRICAL CONNECTION P1 P2 Power consumption AWM43300V AWM43600V Output load NPN (Sinking) PNP (Sourcing) Temperature limits Operating Storage Mechanical shock 60 mW 75 mW 10 mA 20 mA 123 -25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes) Pin 1: Vout Pin 2: +V s Pin 3: GND Note: 1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm 2 slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH. 3 Output voltage is ratiometric to supply voltage November 2004 / 625 1/4 www.sensortechnics.com AWM43000 Series Mass flow sensor for gases FLOW SENSOR CHARACTERISTICS4 VS = 10 ±0.01 V, TA = 25°C Part no. AWM43300V AWM43600V Flow range (full scale) 1000 sccm1 6 SLPM2 Max. flow ch an g e5 5.0 l/sec 5.0 l/sec Output voltage @ trim point 5 ±0.15 V @ 1000 sccm1 5 ±0.15 V @ 6 SLPM2 PERFORMANCE CHARACTERISTICS VS = 10 ±0.01 V, TA = 25°C Characteristics Zero offset Repeatability and hysteresis (combined) Ratiometricity error3 Temperature effects6 Offset Span -25 to 85 °C -25 to 25 °C AWM43300V AWM43600V 25 to 85 °C AWM43300V AWM43600V Response time Common mode pressure AWM43300V AWM43600V AWM43300V AWM43600V Min. 0.95 Typ. 1.0 Max. 1.05 ±0.5 ±1.0 ±0.3 Unit V % reading ±0.025 -5.0 -6.0 V % reading 6.0 6.0 1.0 3.0 150 p si 25 ms Notes: 1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm 2 SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH. 3 Output voltage is ratiometric to supply voltage 4 A 5 micron filter is recommended for all devices. 5 Maximum allowable rate of flow change to prevent damage. 6 Shift is relative to 25 °C. 2/4 November 2004 / 625 www.sensortechnics.com AWM43000 Series Mass flow sensor for gases OUTPUT FLOW VS INTERCHANGEABILITY VS = 10 ±0.01 V, TA = 25°C OUTPUT CURVES GAS CORRECTION FACTORS7 Gas type Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Correction factor (approx.) 0.58 0.78,9 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Notes: 7 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 8 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 9 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. November 2004 / 625 3/4 www.sensortechnics.com AWM43000 Series Mass flow sensor for gases OUTLINE DRAWING 30.5 (1.20) 27.7 (1.09) 14.0 (0.55) 32.2 (1.19) 7.62 (0.30) 321 0.64 (0.025) 34.0 (1.34) 3.0 (0.12) 10.9 8.4 (0.43) (0.33) Ø 3.0 (Ø 0.12) Ø 3.51 (Ø 0.138) 2.54 (0.10) 7.9 (0.31) 12.7 (0.50) mass: approx. 11 g 2.5 (0.10) 17.3 (0.68) 4.8 (0.19) Ø 6.2 (Ø 0.24) P1 123 P2 Ø 2.0 (Ø 0.08) Pin 1: Vout Pin 2: +V s Pin 3: GND dimensions in mm (inches) ORDERING INFORMATION Flow range 1 0 0 0 sccm 6 S LP M Dry gas AWM43300V AWM43600V Hydrogen gas9 AWM43300VH --- Note: 9 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 4/4 November 2004 / 625 www.sensortechnics.com