FBOM030DB

FBO Series Mass flow sensors for gases FEATURES · Ranges 0...±30 to 0...±1000 or -600...1000 sccm1 · Bidirectional sensing · Actual mass flow sensing · Sensortechnics PRO services MEDIA COMPATIBILITY To be used with dry gases only The FBO series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS Maximum ratings Supply voltage2 8 to 15 V typ. 10 ±0.01 V max. 50 mW typ. 30 mW ELECTRICAL CONNECTION Power consumption P1 P2 Temperature limits Operating Storage Mechanical shock -25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes) 123456 Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage E / 11721 / A 1/6 www.sensortechnics.com FBO Series Mass flow sensors for gases FLOW SENSOR CHARACTERISTICS3 (VS = 10 ±0.01 V, TA = 25°C) Part no. FBOM200DB FBOM030DB FBOL001DB FBOL001DBX Flow range (full scale) ±200 sccm ±30 sccm ±1000 sccm -600...1000 sccm Max. flow change4 5.0 l/sec 5.0 l/sec 5.0 l/sec 5.0 l/sec Output voltage @ trim point 30 mV @ 100 sccm 11.8 mV @ 25 sccm 50 mV @ 650 sccm 50 mV @ 650 sccm PERFORMANCE CHARACTERISTICS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset Repeatability and hysteresis (combined) Offset Temperature effects Span FBOL001DB all others -25 to 85 °C5 -25 to 25 °C FBOM200DB FBOM030DB FBOL001DB FBOL001DBX 25 to 85 °C FBOM200DB FBOM030DB FBOL001DB FBOL001DBX Sensor resistance (Pin 2 - Pin 1, Pin 6 - Pin 1) Sensor current (Pin 2 - Pin 1, Pin 6 - Pin 1) Response time Common mode pressure Min. -1.0 Typ. 0 Max. 1.0 ±1.0 ±0.35 Unit mV % reading mV ±0.20 2.5 5.0 5.0 5.0 -2.5 -5.0 -5.0 -5.0 5 0.6 1.0 3.0 25 % reading kOhm mA ms p si Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 °C. E / 11721 / A 2/6 www.sensortechnics.com FBO Series Mass flow sensors for gases FLOW SPECIFICATIONS (VS = 10 ±0.01 V, TA = 25°C) FBOM200DB Press. Flow (mbar) (sccm)6 0.49 0.35 0.21 0.09 0.00 0.00 -0.21 -0.35 -0.49 200 150 100 50 0 50 -100 -150 -200 FBOM030DB FBOL001DB FBOL001DBX Nom. Tol. (mV) (± mV) 55.50 52.90 50.00 42.50 29.20 0.00 -28.90 -41.20 -48.20 7.0 6.0 5.0 6.0 5.0 1.5 15.0 26.0 30.0 Nom. Tol. Press. Flow Nom. Tol. Press. Flow (mV) (± mV) (µbar) (sccm)6 (mV) (± mV) (mbar) (sccm)6 44.50 38.75 30.00 16.50 0.00 16.50 -30.00 -38.80 -44.50 4.25 3.00 1.50 2.50 1.00 4.50 5.00 7.65 9.75 53 36 17 9.8 7.4 6.2 5 2.5 0 -9.8 -53 30 20 10 5 4 3 2 1 0 -5 -30 14.0 9.5 5.0 2.5 2.0 1.5 1.0 0.5 0.0 -2.5 -14.0 2.5 1.5 1.5 1.0 1.0 1.0 1.0 0.8 0.6 2.0 5.0 3.4 2.4 1.8 0.83 0.31 0 -0.31 -0.83 -1.6 -2.4 -3.4 1000 800 650 400 200 0 -200 -400 -600 -800 -1000 Nom. Tol. Press. Flow (mV) (± mV) (mbar) (sccm)6 55.50 52.90 50.00 42.50 29.20 0.00 -28.90 -41.20 -48.20 -52.20 -55.00 3.70 3.50 2.50 3.00 3.20 1.00 15.00 26.00 29.50 32.50 36.00 3.4 2.4 1.8 0.83 0.31 0 -0.31 -0.83 -1.6 1000 800 650 400 200 0 -200 -400 -600 Note: 6 Devices are calibrated in mass flow. Tolerance values apply to calibration type only. OUTPUT VS. FLOW CURVES FBOM200DB FBOM030DB FBOL001DB FBOL001DBX E / 11721 / A 3/6 www.sensortechnics.com FBO Series Mass flow sensors for gases HEATER CONTROL CIRCUIT SENSING BRIDGE SUPPLY CIRCUIT Note: These circuits are required for operation per specifications. Circuits are not on board the sensor. DIFFERENTIAL INSTRUMENTATION AMPLIFIER CIRCUIT (optional)  2 R + R1  R4   (V2 − V1 ) + VOffset VO =  2 R  R   1  3   R6  where VOffset = VS  R +R   5 6 E / 11721 / A 4/6 www.sensortechnics.com FBO Series Mass flow sensors for gases OUTLINE DRAWING 7.60 (0.30) 2.8 (0.11) 2.9 (0.114) 1.40 (0.055) 6.3 (0.25) 1.8 (0.07) 5.1 (0.20) 54.4 (2.14) 8.3 (0.325) 8.4 (0.33) P1 P2 31.5 (1.24) 23.6 (0.93) 2.8 (0.11) 1.0 (0.04) 5.1 (0.20) 7.4 (0.29) 12.7 (0.50) 15.5 (0.61) 123456 0.6 (0.025) 1.52 (0.06) 2.5 (0.10) 4.1 (0.16) 23.9 (0.94) 30.5 (1.20) third angle projection mass: approx. 10.8 g dimensions in mm (inches) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output (pin 6 > pin 2). Negative flow direction is defined conversely and results in negative output (pin 6 < pin 2). E / 11721 / A 5/6 www.sensortechnics.com FBO Series Mass flow sensors for gases GAS CORRECTION FACTORS7 Gas type Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Correction factor (approx.) 0.58 0.78,9 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Notes: 7 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 8 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 9 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey Flow range ±30 sccm ±200 sccm ±1000 sccm -600...1000 sccm Dry gas FBOM030DB FBOM200DB FBOL001DB FBOL001DBX Hydrogen gas9 --FBOM200HB FBOL001HB --- Sensortechnics PRO services: · Extended guarantee period of 2 years · Improved performance characteristics · Custom product modifications and adaptations even for small quantities · Advanced logistics models for supply inventory and short delivery times · Technical support through application engineers on the phone or at your site · Fastest possible technical response for design and QA engineers ... plus other services on request Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11721 / A 6/6 www.sensortechnics.com