B58601D8010A018

Pressure sensors C28 series Series/Type: Ordering code: Gauge pressure sensor die for back side pressure applications Date: Version: 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Pressure sensors Identification/Classification 2 (header 2 + bottom left header bar): C28 series Ordering code: (top right header bar) Series/Type: (top right header bar) Gauge pressure sensor die for back side pressure applications Preliminary data (optional): (if necessary) AS SEN PD  EPCOS AG 2015. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited. EPCOS AG is a TDK Group Company. Pressure sensors C28 series Gauge pressure sensor die for back side pressure applications Applications
Medical devices
Automotive
Automation Features Piezoresistive MEMS technology Small dimensions: 2.05 × 2.05 mm Square diaphragm Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon.
Whetstone bridge with mV output, ratiometric to supply voltage
Rated pressure ranges 1.6 up to 40 bar



Options
Temperature sensing diode Delivery mode
Tray Dimensional drawings 2050 560 390 150 A B 800 560 Note1 X5 640 700 400 allowable edge disruptions 80 µm max. allowable edge disruptions 50 µm max. 810 235 X8 A B Note1 2050 95 660 X4 X9 660 B X4 X5 X1 X2 electrical diagram: X3 X10 280 560 840 X5 280 560 850 Si 100 all dimensions in µm Note1: geometry of diaphragm depend on specification checked bond area (typ. 100µm x 100µm) AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. glass BOROFLOATTM R1 R2 X4 R3 R4 X3 X2 p X9 X8 X1 X1 : X2 : X3 : X4 : X5 : X8 : X9 : X10: Vout– VDD– VDD– Vout+ VDD+ Diode (N) Diode (P) Substrate 2009-08-03 Page 2 of 8 Pressure sensors C28 series Gauge pressure sensor die for back side pressure applications Technical data Absolute maximum ratings Parameter Symbol Conditions VDD Without damage Min. Typ. Max. Unit 10 V Supply voltage Maximum supply voltage 1) Temperature ranges Operating temperature range Storage temperature range 2) –40 135 °C For t