INMP411
Omnidirectional Microphone with Bottom Port and Analog Output
GENERAL DESCRIPTION
APPLICATIONS
The INMP411* is a high performance, high SPL, low noise, low
power, analog output bottom ported, omnidirectional MEMS
microphone. The INMP411 consists of a MEMS microphone
element and an impedance converter amplifier. The INMP411
sensitivity specification makes it an excellent choice for nearfield applications. The INMP411 is pin compatible with the
INMP401 microphone, providing an easy upgrade path.
The INMP411 has a linear response up to 131 dB SPL. It offers
high SNR and extended wideband frequency response
resulting in natural sound with high intelligibility. Low current
consumption enables long battery life for portable
applications.
The INMP411 is available in a 4.72 × 3.76 × 1.0 mm surfacemount package. It is reflow solder compatible with no
sensitivity degradation.
*Protected by U.S. Patents 7,449,356; 7,825,484; 7,885,423; and 7,961,897.
Other patents are pending.
FUNCTIONAL BLOCK DIAGRAM
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Fire and Safety Radios
Safety Masks
Tablet Computers
Teleconferencing Systems
Studio Microphones
Security and Surveillance
FEATURES
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4.72 × 3.76 × 1.0 mm Surface-Mount Package
High 131 dB SPL Acoustic Overload Point
Sensitivity of −46 dBV
±2 dB Sensitivity Tolerance
Omnidirectional Response
High SNR of 62 dBA
Extended Frequency Response from 28 Hz to 20 kHz
Low Current Consumption: 20
0.2
Hz
kHz
%
1
−80
dBV
131
dB SPL
1.5
VDD = 1.8 V
VDD = 3.3 V
MAX
180
210
3.63
V
220
250
µA
µA
OUTPUT CHARACTERISTICS
Output Impedance (ZOUT)
200
Ω
Output DC Offset
0.8
V
Maximum Output Voltage
131 dB SPL input
0.355
V RMS
Noise Floor
20 Hz to 20 kHz, A-weighted, rms
−108
dBV
Note 1: See Figure 3 and Figure 4.
Document Number: DS-INMP411-00
Revision: 1.1
Page 3 of 14
NOTES
1
INMP411
ABSOLUTE MAXIMUM RATINGS
Stress above those listed as Absolute Maximum Ratings may cause permanent damage to the device. These are stress ratings only
and functional operation of the device at these conditions is not implied. Exposure to the absolute maximum ratings conditions for
extended periods may affect device reliability.
TABLE 2. ABSOLUTE MAXIMUM RATINGS
PARAMETER
Supply Voltage (VDD)
Sound Pressure Level (SPL)
Mechanical Shock
Vibration
Storage Temperature Range
RATING
−0.3 V to +3.63 V
160 dB
10,000 g
Per MIL-STD-883 Method 2007, Test Condition B
Operating Temperature Range
−40°C to +85°C
−40°C to +150°C
ESD CAUTION
ESD (electrostatic discharge) sensitive device.
Charged devices and circuit boards can
discharge without detection. Although this
product features patented or proprietary
protection circuitry, damage may occur on
devices subjected to high energy ESD.
Therefore proper ESD precautions should be
taken to avoid performance degradation or
loss of functionality.
Document Number: DS-INMP411-00
Revision: 1.1
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INMP411
SOLDERING PROFILE
CRITICAL ZONE
TL TO TP
tP
TP
TEMPERATURE
RAMP-UP
TL
tL
TSMAX
TSMIN
tS
RAMP-DOWN
PREHEAT
t25°C TO PEAK
TIME
Figure 1. Recommended Soldering Profile Limits
TABLE 3. RECOMMENDED SOLDERING PROFILE
PROFILE FEATURE
Average Ramp Rate (TL to TP)
Minimum Temperature
(TSMIN)
Minimum Temperature
Preheat
(TSMIN)
Time (TSMIN to TSMAX), tS
Ramp-Up Rate (TSMAX to TL)
Time Maintained Above Liquidous (tL)
Liquidous Temperature (TL)
Peak Temperature (TP)
Time Within +5°C of Actual Peak
Temperature (tP)
Ramp-Down Rate
Time +25°C (t25°C) to Peak Temperature
Sn63/Pb37
1.25°C/sec max
Pb-Free
1.25°C/sec max
100°C
100°C
150°C
200°C
60 sec to 75 sec
1.25°C/sec
45 sec to 75 sec
183°C
60 sec to 75 sec
1.25°C/sec
~50 sec
217°C
215°C +3°C/−3°C
245°C +0°C/−5°C
20 sec to 30 sec
20 sec to 30 sec
3°C/sec max
3°C/sec max
5 min max
5 min max
*The reflow profile in Table 3 is recommended for board manufacturing with InvenSense MEMS microphones. All
microphones are also compatible with the J-STD-020 profile.
Document Number: DS-INMP411-00
Revision: 1.1
Page 5 of 14
INMP411
PIN CONFIGURATIONS AND FUNCTION DESCRIPTIONS
OUTPUT
GND
2
1
GND
3
GND
6
VDD
4
5
GND
BOTTOM VIEW
Not to Scale
Figure 2. Pin Configuration
TABLE 4. PIN FUNCTION DESCRIPTIONS
PIN
NAME
FUNCTION
1
OUTPUT
2
GND
Analog Output Signal
Ground
3
GND
Ground
4
GND
Ground
5
VDD
Power Supply
6
GND
Ground
Document Number: DS-INMP411-00
Revision: 1.1
Page 6 of 14
INMP411
TYPICAL PERFORMANCE CHARACTERISTICS
20
NORMALIZED FREQUENCY RESPONSE (dBV)
15
NORMALIZED AMPLITUDE (dB)
15
10
5
0
–5
–10
10
100
1k
10k
10
5
0
–5
–10
–15
10
20k
FREQUENCY (Hz)
100
1k
10k
FREQUENCY (Hz)
Figure 3. Frequency Response Mask
Figure 4. Typical Frequency Response (Measured)
0
–10
OUTPUT AMPLITUDE (dBV)
THD + N (%)
10
1
–20
–30
–40
–50
0.1
90
100
110
120
130
–60
90
140
100
AMPLITUDE (dB SPL)
110
120
130
Figure 5. THD+N vs. Input Level
Figure 6. Linearity
0
1.2
128dB SPL
130dB SPL
132dB SPL
134dB SPL
136dB SPL
138dB SPL
140dB SPL
–10
1.0
–20
0.8
OUTPUT (V)
–30
PSR (dB)
140
INPUT AMPLITUDE (dB SPL)
–40
–50
0.6
0.4
–60
0.2
–70
–80
100
0
1k
10k
Figure 7. Typical Power Supply Rejection Ratio vs. Frequency
Document Number: DS-INMP411-00
Revision: 1.1
0
0.2
0.4
0.6
0.8
TIME (ms)
FREQUENCY (Hz)
Page 7 of 14
Figure 8. Clipping Characteristics
1.0
INMP411
APPLICATIONS INFORMATION
CONNECTING TO AUDIO CODECS
The INMP411 output can be connected to a dedicated codec microphone input (see Figure 6) or to a high input impedance gain
stage (see Figure 7.) A 0.1 µF ceramic capacitor placed close to the inMP411 supply pin is used for testing and is recommended to
adequately decouple the microphone from noise on the power supply. A DC-blocking capacitor is required at the output of the
microphone. This capacitor creates a high-pass filter with a corner frequency at
fC = 1/(2π × C × R)
where R is the input impedance of the codec.
A minimum value of 4.7 µF is recommended in Figure 6 because the input impedance of codecs can be as low as 2 kΩ at its highest
PGA gain setting, which results in a high-pass filter corner frequency at 17 Hz. Figure 7 shows the INMP411 connected to an op amp
configured as a non-inverting preamplifier.
MICBIAS
0.1 µF
VDD
2.2 µF
MINIMUM
INMP411
ADC
OR
CODEC
INPUT
OUTPUT
GND
Figure 9. INMP411 Connected to a Codec
GAIN = (R1 + R2)/R1
R1
R2
1.8-3.3 V
VREF
0.1µF
VDD
INMP411
AMP
1µF
MINIMUM
VOUT
OUTPUT
GND
10kΩ
VREF
Figure 10. INMP411 Connected to an Op Amp
DYNAMIC RANGE CONSIDERATIONS
To fully utilize the 99 dB dynamic range of the INMP411 in a design, the preamp, ADC, or codec circuit following it must be chosen
carefully. A typical codec may have a 98 dB dynamic range with VDD = 3.3 V. To match the dynamic ranges between the microphone
and the ADC input of the codec, some gain must be added to the INMP411 output. For example, at the 131 dB SPL maximum acoustic
input, the INMP411 outputs a −13 dBV RMS signal. The full-scale input voltage of a codec may be 0 dBV; therefore, 13 dB of gain must be
added to the signal to match the dynamic range of the microphone with the dynamic range of the codec.
Document Number: DS-INMP411-00
Revision: 1.1
Page 8 of 14
INMP411
SUPPORTING DOCUMENTS
For additional information, see the following documents.
EVALUATION BOARD USER GUIDE
UG-445 Analog Output MEMS Microphone Flex Evaluation Board
APPLICATION NOTE (PRODUCT SPECIFIC)
AN-0284 High Performance, Low-Noise Studio Microphone with MEMS Microphones, Analog Beamforming, and Power Management
AN-0207 High-Performance Analog MEMS Microphone Simple Interface-to-SigmaDSP Audio Codec
AN-0262 Low-Noise Analog MEMS Microphone and Preamp with Compression and Noise Gating
APPLICATION NOTES (GENERAL)
AN-1003 Recommendations for Mounting and Connecting the Invensense Bottom-Ported MEMS Microphones
AN-1068 Reflow Soldering of the MEMS Microphone
AN-1112 Microphone Specifications Explained
AN-1124 Recommendations for Sealing Invensense, Bottom-Port MEMS Microphones from Dust and Liquid Ingress
AN-1140 Microphone Array Beamforming
AN-1165 Op Amps for MEMS Microphone Preamp Circuits
AN-1181 Using a MEMS Microphone in a 2-Wire Microphone Circuit
Document Number: DS-INMP411-00
Revision: 1.1
Page 9 of 14
INMP411
PCB DESIGN AND LAND PATTERN LAYOUT
The recommended PCB land pattern for the INMP411 should be laid out to a 1:1 ratio to the solder pads on the microphone
package, as shown in Figure 8. Take care to avoid applying solder paste to the sound hole in the PCB. A suggested solder paste
stencil pattern layout is shown in Figure 9. The diameter of the sound hole in the PCB should be larger than the diameter of the
sound port of the microphone. A minimum diameter of 0.5 mm is recommended.
2.62
ø0.90 (3×)
ø1.10
ø1.68
2.54
2.40
1.20
ø0.70 (2×)
1.27
0.79
Figure 11. PCB Land Pattern Layout
Dimensions shown in millimeters
1.8mm/1.3mm DIA. 0.2032 CUT WIDTH (4×)
0.649mm DIA. (2×)
0.85mm DIA. (3×)
2.4mm
2.54mm
1.2mm
1.27mm
2.62mm
3.41mm
Figure 12. Suggested Solder Paste Stencil Pattern Layout
Dimensions shown in millimeters
Document Number: DS-INMP411-00
Revision: 1.1
Page 10 of 14
INMP411
HANDLING INSTRUCTIONS
PICK AND PLACE EQUIPMENT
The MEMS microphone can be handled using standard pick-and-place and chip shooting equipment. Take care to avoid damage to the
MEMS microphone structure as follows:
• Use a standard pickup tool to handle the microphone. Because the microphone hole is on the bottom of the package, the
pickup tool can make contact with any part of the lid surface.
• Do not pick up the microphone with a vacuum tool that makes contact with the bottom side of the microphone.
Do not pull air out of or blow air into the microphone port.
• Do not use excessive force to place the microphone on the PCB.
REFLOW SOLDER
For best results, the soldering profile must be in accordance with the recommendations of the manufacturer of the solder paste used to
attach the MEMS microphone to the PCB. It is recommended that the solder reflow profile not exceed the limit conditions specified
in Figure 1 and Table 3.
BOARD WASH
When washing the PCB, ensure that water does not make contact with the microphone port. Do not use blow-off procedures or
ultrasonic cleaning.
Document Number: DS-INMP411-00
Revision: 1.1
Page 11 of 14
INMP411
OUTLINE DIMENSIONS
4.82
4.72
4.62
4.10 REF
3.30 REF
REFERENCE
CORNER
PIN 1
0.90 DIA.
(PINS 1, 5, 6)
3.86
3.76
3.66
1.10
1.00
0.90
1
2
1.68 DIA.
3
2.40 BSC
3.14
REF
1.10 DIA.
6
1.20 BSC
4
5
0.68 REF
TOP VIEW
0.79 BSC
2.62 BSC
BOTTOM VIEW
2.54
BSC
1.27 BSC
0.25 DIA.
(THRU HOLE)
0.61 REF
0.70 DIA.
(PINS 2, 4)
SIDE VIEW
12-12-2011-C
0.73 REF
0.24 REF
Figure 13. 3-Terminal Chip Array Small Outline No-Lead Cavity [LGA_CAV]
4.72 × 3.76 × 1.00 mm Body
Dimensions shown in millimeters
PART NUMBER
PIN 1 INDICATION
411
YY XXXX
DATE CODE
LOT TRACEABILITY CODE
Figure 14. Package Marking Specification (Top View)
Document Number: DS-INMP411-00
Revision: 1.1
Page 12 of 14
INMP411
ORDERING GUIDE
PART
1
INMP411ACEZ-R0 *
1
INMP411ACEZ-R7 †
TEMP RANGE
−40°C to +85°C
PACKAGE
6-Terminal LGA_CAV
QUANTITY
4,500
−40°C to +85°C
6-Terminal LGA_CAV
1,000
EV_INMP411-FX
—
Flex Evaluation Board
—
* – 13” Tape and Reel
† – 7” Tape and Reel to be discontinued. Contact sales@invensense.com for availability.
1
Z = RoHS-Compliant Part
REVISION HISTORY
REVISION DATE
REVISION
DESCRIPTION
02/06/2014
1.0
Initial Release
05/21/2014
1.1
Updated Compliance Disclaimer
Document Number: DS-INMP411-00
Revision: 1.1
Page 13 of 14
INMP411
COMPLIANCE DECLARATION DISCLAIMER
InvenSense believes the environmental and other compliance information given in this document to be correct but cannot
guarantee accuracy or completeness. Conformity documents substantiating the specifications and component characteristics are on
file. InvenSense subcontracts manufacturing and the information contained herein is based on data received from vendors and
suppliers, which has not been validated by InvenSense.
This information furnished by InvenSense, Inc. is believed to be accurate and reliable. However, no responsibility is assumed by
InvenSense for its use, or for any infringements of patents or other rights of third parties that may result from its use. Specifications
are subject to change without notice. InvenSense reserves the right to make changes to this product, including its circuits and
software, in order to improve its design and/or performance, without prior notice. InvenSense makes no warranties, neither
expressed nor implied, regarding the information and specifications contained in this document. InvenSense assumes no
responsibility for any claims or damages arising from information contained in this document, or from the use of products and
services detailed therein. This includes, but is not limited to, claims or damages based on the infringement of patents, copyrights,
mask work and/or other intellectual property rights.
Certain intellectual property owned by InvenSense and described in this document is patent protected. No license is granted by
implication or otherwise under any patent or patent rights of InvenSense. This publication supersedes and replaces all information
previously supplied. Trademarks that are registered trademarks are the property of their respective companies. InvenSense sensors
should not be used or sold in the development, storage, production or utilization of any conventional or mass-destructive weapons
or for any other weapons or life threatening applications, as well as in any other life critical applications such as medical equipment,
transportation, aerospace and nuclear instruments, undersea equipment, power plant equipment, disaster prevention and crime
prevention equipment.
©2014 InvenSense, Inc. All rights reserved. InvenSense, MotionTracking, MotionProcessing, MotionProcessor, MotionFusion,
MotionApps, DMP, AAR, and the InvenSense logo are trademarks of InvenSense, Inc. Other company and product names may be
trademarks of the respective companies with which they are associated.
©2014 InvenSense, Inc. All rights reserved.
Document Number: DS-INMP411-00
Revision: 1.1
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