2601B-PULSE System SourceMeter
10 µs Pulser/SMU Instrument
®
Datasheet
through highly automated pulsed I-V production test. For
automated system applications, the 2601B-PULSE’s Test
Script Processor (TSP®) runs complete test programs
from inside the instrument for industry-best throughput. In
larger, multi-channel applications, the Keithley TSP-Link®
technology works together with TSP technology to enable
high-speed, pulser/SMU-per-pin parallel testing. Because
the 2601B-PULSE offers full isolation that does not require
a mainframe, it can be easily reconfigured and re-deployed
as your test applications evolve.
The new 2601B-PULSE System SourceMeter 10 µs
Pulser/SMU Instrument with PulseMeter™ technology is
an industry-leading high current/high speed pulser with
measure plus the full functionality of a traditional SMU.
This new pulser offers leading 10 A current pulse output
at 10 V with a pulse width minimum of 10 µs, perfect for
testing vertical cavity surface emitting lasers (VCSEL)
used in LIDAR and facial recognition, LEDs for lighting
and displays, semiconductor device characterization,
surge protection testing, and so much more. The pulser’s
built-in dual 1 Megasample/second (MS/s), 18-bit
digitizers make it possible to acquire both pulse current
and voltage waveforms simultaneously without the need
to use a separate instrument. The 2601B-PULSE is a
powerful solution that significantly boosts productivity
in applications ranging from benchtop characterization
Key Features
• Industry leading 10 A @ 10 V, 10 microsecond
pulse output
• No tuning required; works with inductive loads up
to 3 μH
• Dual 1 Megasample/second digitizers for high speed
I/V pulse measurements (pulser function only)
• DC capability up to ±40 V @ ±1.0 A, 40 Watt
• TSP technology embeds complete test programs inside
the instrument for best-in-class system-level throughput
• TSP-Link expansion technology for multi-channel
parallel test without a mainframe
• USB 2.0, LXI Core, GPIB, RS-232, and digital
I/O interfaces
• Supported in the Keithley KickStart non-programming
software tool
SMU (I or V Source)
Full DC Operation
Pulse Operation:
Pulse Width >150 µs, typical
Dual Integrating ADCs:
One each for V and I
PULSER (I Source only)
DC Bias
Pulse Operation:
10 µs ≤ Pulse Width ≤ 500 µs
Dual 1 MS/s High-speed ADCs:
One each for V and I
External Interlock/Connector box included with 2601B-PULSE
Datasheet
Pulsed Testing for Device
Characterization
Testing real device operation and minimizing the heating
effects with on-wafer testing just got easier with the
2601B-PULSE SMU. Thermal management is critical
during the testing of many devices, especially those at the
semiconductor wafer level, such as VCSELs, laser diodes,
and LEDs. Pulsed I-V testing minimizes the heating effects
of the current in the device, especially if tested at the wafer
level when devices have no temperature control circuitry.
Testing with DC would either change their characteristics,
or at worst, destroy them. Later on, in production, when
they have been assembled into modules with temperature
controls, the devices can be DC tested and the results
compared to those from the pulsed test. Some devices
will pass a DC test and fail a pulsed test due to device
characteristic changes resulting from temperature shift.
The 10 V / 10 A / 10 µs output of the 2601B-PULSE
ensures that you get a proper output pulse into your
device and an accurate measurement when it is required.
Pulse output performance of the 2610B-PULSE SMU.
2
TEK.COM
No Tuning Required
When outputting current pulses, cabling and inductance
can be a problem. Inductance can have a limiting effect
and could even be damaging. Quite often, the inductance
can be different from device to device, even when testing
laser diodes on a wafer. The effect of inductance on
a current source is that inductance resists changes in
current. This can cause the current source to increase
the output voltage. The result is overshoot and ringing
as the pulse settles. This may not be acceptable in your
test. Some solutions require tuning to compensate for
these behaviors, which can be time consuming. The
2601B-PULSE’s control loop system eliminates the need
to tune for load changes up to 3 μH so that your pulse has
no overshoot and ringing when outputting pulses from 10
μs up to 500 μs at a current up to 10 amps. This ensures
a fast rise time, so your devices are sourced with a current
pulse to properly characterize the device or circuit. The
images on the next page show the performance of the
2601B-PULSE with PulseMeter technology compared to
a competitive modular SMU outputting a 5 A, 50 μs pulse
on a device with an impedance of 3 µH.
2601B-PULSE System SourceMeter 10 µs Pulser/SMU Instrument
Unmatched Throughput for Automated Test with TSP Technology
For test applications that demand the highest levels of automation and throughput, the 2601B-PULSE’s TSP technology
delivers industry-best performance. TSP technology goes far beyond traditional test command sequencers — it fully
embeds, then executes, complete test programs from within the SMU instrument itself. This virtually eliminates the timeconsuming bus communications to and from the PC controller, and thus dramatically improves overall test times.
• Conditional branching
• Advanced calculations
and flow control
• Variables
• Pass/Fail test
• Prober/Handler control
• Datalogging/
Formatting
Test Script
DUT
Typical pulse output from a competitive SMU with overshoot and 6.47 μs
rise time.
TSP technology executes complete test programs from the non-volatile
memory of the 2601B-PULSE.
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