S-ABBAB-6MJ01-T

S-ABBAB-6MJ01 Quartz Thickness – Monitor Crystal FEATURE – – – – – – Quartz thickness sensor for high-stress material depositions Alloy-Electrode Frequency: 6 MHz Dielectrics on semiconductor High-stress metal depositions: SiO、SiO2、MgF2、TiO2 Compatible with Inficon™ type quartz crystal THICKNESS SENSOR SPECIFICATION Sensor Material pure z Quartz Cut AT Mode Fundamental Contour plano-convex Diameter 13.98 ± 0.03 mm Electrode Alloy Resonant Frequency 5.980~5.992 MHz @ 25℃ Resistance at Resonance 15 ohms Max Operation Temperature +25℃~+75℃ Storage Temperature -20℃~+85℃ Storage Humidity RH30%~50% Packing 10 crystals / disc Rev(1)01/2013 Specifications subject to change without notice www.taitien.com sales@taitien.com.tw