S-CAAAA-5MK02
Quartz Thickness – Monitor Crystal
FEATURE
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Quartz thickness sensor for anti-reflective coatings and
semiconductor vacuum evaporation processing
EverLife Gold-Electrode
Superior longer lifetime
Frequency: 5 MHz
Low contact resistance
High chemic stabilization
Compatible with Ulvac™ type quartz crystal
THICKNESS SENSOR SPECIFICATION
Sensor Material
pure z Quartz
Cut
AT
Mode
Fundamental
Contour
plano-convex
Diameter
12.37 ± 0.03 mm
Electrode
Cr / Au
Resonant Frequency
4.995~5.005 MHz @ 25℃
Resistance at Resonance
15 ohms Max
Operation Temperature
+25℃~+75℃
Storage Temperature
-20℃~+85℃
Storage Humidity
RH30%~50%
Packing
10 crystals / disc
Rev(1)12/2012
Specifications subject to change without notice
www.taitien.com
sales@taitien.com.tw
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