S-CAAAA-5MG05

S-CAAAA-5MG05 Quartz Thickness – Monitor Crystal FEATURE – – – – – – Quartz thickness sensor for low-stress metal depositions Gold-Electrode Frequency: 5 MHz Low contact resistance High chemic stabilization Low-stress metal depositions: Au, Ag, Cu THICKNESS SENSOR SPECIFICATION Sensor Material pure z Quartz Cut AT Mode Fundamental Contour plano-convex Diameter 12.37 ± 0.03 mm Electrode Cr / Au Resonant Frequency 4.995~5.005 MHz @ 25℃ Resistance at Resonance 15 ohms Max Operation Temperature +25℃~+75℃ Storage Temperature -20℃~+85℃ Storage Humidity RH30%~50% Packing 10 crystals / disc Rev(1)12/2012 Specifications subject to change without notice www.taitien.com sales@taitien.com.tw