Data sheet
BMI160
Small, low power inertial measurement unit
Bosch Sensortec
BMI160 – Data sheet
Document revision
0.8
Document release date
February 10 , 2015
Document number
BST-BMI160-DS000-07
Technical reference code(s)
0 273 141 187
Notes
Data and descriptions in this document are subject to change without
notice.
th
Product photos and pictures are for illustration purposes only and may
differ from the real product appearance.
BMI160
Data sheet
Page 2
BMI160
Small, low Power Inertial Measurement Unit
The BMI160 is a highly integrated, low power inertial measurement unit (IMU) that provides
precise acceleration and angular rate (gyroscopic) measurement.
The BMI160 integrates:
16 bit digital, triaxial accelerometer
16 bit digital, triaxial gyroscope
Key features
High performance accelerometer and gyroscope (hardware synchronized)
Very low power consumption: typ. 925 µA (accelerometer and gyroscope in full operation)
Android Lollipop compatible: significant motion and step detector / step counter (5 µA each)
Very small 2.5 x 3.0 mm2 footprint, height 0.83 mm
Built-in power management unit (PMU) for advanced power management
Power saving with fast start-up mode of gyroscope
Wide power supply range: 1.71V … 3.6V
Allocatable FIFO buffer of 1024 bytes (capable of handling external sensor data)
Hardware sensor time-stamps for accurate sensor data fusion
Integrated interrupts for enhanced autonomous motion detection
Flexible digital primary interface to connect to host over I2C or SPI
Extended I2C mode with clock frequencies up to 1 MHz
Additional secondary high speed interface for OIS application
Capable of handling external sensor data
(e.g. geomagnetic or barometric pressure sensors by Bosch Sensortec)
Typical applications
Augmented Reality
Indoor navigation
3D scanning / indoor mapping
Advanced gesture recognition
Immersive gaming
9-axis motion detection
Air mouse applications and pointers
Pedometer / step counting
Advanced system power management for mobile applications
Optical image stabilization of camera modules
Free-fall detection and warranty logging
Target Devices
Smart phones, tablet and transformer PCs
Game controllers, remote controls and pointing devices
Head tracking devices
Wearable devices, e.g. smart watches or augmented reality glasses
Sport and fitness devices
Cameras, camera modules
Toys, e.g. toy helicopters
BST-BMI160-DS000-07 | Revision 0.8 | February 2015
Bosch Sensortec
© Bosch Sensortec GmbH reserves all rights even in the event of industrial property rights. We reserve all rights of disposal such as copying and passing on to
third parties. BOSCH and the symbol are registered trademarks of Robert Bosch GmbH, Germany.
Note: Specifications within this document are preliminary and subject to change without notice.
BMI160
Data sheet
Page 3
General Description
The BMI160 is an inertial measurement unit (IMU) consisting of a state-of-the-art 3-axis, low-g
accelerometer and a low power 3-axis gyroscope. It has been designed for low power, high
precision 6-axis and 9-axis applications in mobile phones, tablets, wearable devices, remote
controls, game controllers, head-mounted devices and toys. The BMI160 is available in a
compact 14-pin 2.5 × 3.0 × 0.83 mm3 LGA package. When accelerometer and gyroscope are in
full operation mode, power consumption is typically 925 µA, enabling always-on applications in
battery driven devices. The BMI160 offers a wide VDD voltage range from 1.71V to 3.6V and a
VDDIO range from 1.2V to 3.6V, allowing the BMI160 to be powered at 1.8V for both VDD and
VDDIO.
Due to its built-in hardware synchronization of the inertial sensor data and its ability to
synchronize data of external devices such as geomagnetic sensors, BMI160 is ideally suited for
augmented reality, gaming and navigation applications, which require highly accurate sensor
data fusion. The BMI160 provides high precision sensor data together with the accurate timing
of the corresponding data. The timestamps have a resolution of only 39 µs.
Further Bosch Sensortec sensors, e.g. geomagnetic (BMM150) can be connected as slave via a
secondary I2C interface. In this configuration, the BMI160 controls the data acquisition of the
external sensor and the synchronized data of all sensors is stored the register data and can be
additionally stored in the built-in FIFO.
The integrated 1024 byte FIFO buffer supports low power applications and prevents data loss in
non-real-time systems. The intelligent FIFO architecture allows dynamic reallocation of FIFO
space for accelerometer, gyroscope and external sensors, respectively. For typical 6-DoF
applications, this is sufficient for approx. 0.75 s of data capture. In a typical 9-DoF application –
including the geomagnetic sensor – this is sufficient for approx. 0.5 s.
Like its predecessors, the BMI160 features an on-chip interrupt engine enabling low-power
motion-based gesture recognition and context awareness. Examples of interrupts that can be
issued in a power efficient manner are: any- or no-motion detection, tap or double tap sensing,
orientation detection, free-fall or shock events. The BMI160 is Android 5.0 (Lollipop) compatible,
and in the implementation of the Significant Motion and Step Detector interrupts, each
consumes less than 20µA.
The smart built-in power management unit (PMU) can be configured, for example, to further
lower the power consumption by automatically sending the gyroscope temporarily into fast startup mode and waking it up again by internally using the any-motion interrupt of the
accelerometer. By allowing longer sleep times of the host, the PMU contributes to significant
further power saving on system level.
Besides the flexible primary interface (I2C or SPI) that is used to connect to the host, BMI160
provides an additional secondary interface. This secondary interface can be used in SPI mode
for OIS (optical image stabilization) applications in conjunction with camera modules, or in
advanced gaming use cases. When connected to a geomagnetic sensor, BMI160 will trigger
autonomous read-out of the sensor data from magnetometer without the need for intervention
by the host processor.
BST-BMI160-DS000-07 | Revision 0.8 | February 2015
Bosch Sensortec
© Bosch Sensortec GmbH reserves all rights even in the event of industrial property rights. We reserve all rights of disposal such as copying and passing on to
third parties. BOSCH and the symbol are registered trademarks of Robert Bosch GmbH, Germany.
Note: Specifications within this document are preliminary and subject to change without notice.
BMI160
Data sheet
Page 4
Index of Contents
1. SPECIFICATION ........................................................................................................................ 7
1.1 ELECTRICAL SPECIFICATION ................................................................................................ 7
1.2 ELECTRICAL AND PHYSICAL CHARACTERISTICS, MEASUREMENT PERFORMANCE ...................... 8
1.3 ABSOLUTE MAXIMUM RATINGS ........................................................................................... 11
2. FUNCTIONAL DESCRIPTION ................................................................................................. 12
2.1 BLOCK DIAGRAM ............................................................................................................... 12
2.2 POWER MODES ................................................................................................................. 13
2.2.1 SUSPEND MODE (ACCELEROMETER AND GYROSCOPE) ................................................................... 13
2.2.2 FAST START-UP MODE (GYROSCOPE ONLY ) ................................................................................... 13
2.2.3 TRANSITIONS BETWEEN POWER MODES ......................................................................................... 14
2.2.4 LOW POWER MODE (ACCELEROMETER ONLY) ................................................................................. 15
2.2.5 PMU (POWER MANAGEMENT UNIT) .............................................................................................. 16
2.3 SENSOR TIMING AND DATA SYNCHRONIZATION ................................................................... 16
2.3.1 SENSOR TIME .............................................................................................................................. 16
2.3.2 DATA SYNCHRONIZATION .............................................................................................................. 17
2.4 DATA PROCESSING ........................................................................................................... 18
2.4.1 DATA PROCESSING ACCELEROMETER ........................................................................................... 18
2.4.2 DATA PROCESSING GYROSCOPE .................................................................................................. 19
2.5 FIFO................................................................................................................................ 20
2.5.1 FIFO FRAMES ............................................................................................................................. 21
2.5.2 FIFO CONDITIONS AND DETAILS .................................................................................................... 24
2.6 INTERRUPT CONTROLLER .................................................................................................. 25
2.6.1 ANY-MOTION DETECTION (ACCEL) ................................................................................................. 26
2.6.2 SIGNIFICANT MOTION (ACCEL) ...................................................................................................... 27
2.6.3 STEP DETECTOR (ACCEL) ............................................................................................................ 28
2.6.4 TAP SENSING (ACCEL) ................................................................................................................. 28
2.6.5 ORIENTATION RECOGNITION (ACCEL) ............................................................................................ 29
2.6.6 FLAT DETECTION (ACCEL) ............................................................................................................ 35
2.6.7 LOW-G / FREE-FALL DETECTION (ACCEL)....................................................................................... 36
2.6.8 HIGH-G DETECTION (ACCEL) ......................................................................................................... 37
2.6.9 SLOW-MOTION ALERT / NO-MOTION INTERRUPT (ACCEL) .............................................................. 37
2.6.10 DATA READY DETECTION (ACCEL, GYRO AND EXTERNAL SENSORS) ............................................. 40
2.6.11 PMU TRIGGER (GYRO) .............................................................................................................. 40
2.6.12 FIFO INTERRUPTS (ACCEL, GYRO, AND EXTERNAL SENSORS) ...................................................... 40
2.7 STEP COUNTER ................................................................................................................ 41
2.8 DEVICE SELF TEST ............................................................................................................ 41
2.8.1 SELF-TEST ACCELEROMETER ........................................................................................................ 41
2.8.2 SELF-TEST GYROSCOPE ............................................................................................................... 42
2.9 OFFSET COMPENSATION ................................................................................................... 42
2.9.1 FAST OFFSET COMPENSATION....................................................................................................... 42
2.9.2 MANUAL OFFSET COMPENSATION .................................................................................................. 43
2.9.3 INLINE CALIBRATION ..................................................................................................................... 43
BST-BMI160-DS000-07 | Revision 0.8 | February 2015
Bosch Sensortec
© Bosch Sensortec GmbH reserves all rights even in the event of industrial property rights. We reserve all rights of disposal such as copying and passing on to
third parties. BOSCH and the symbol are registered trademarks of Robert Bosch GmbH, Germany.
Note: Specifications within this document are preliminary and subject to change without notice.
BMI160
Data sheet
Page 5
2.10 NON-VOLATILE MEMORY ................................................................................................. 43
2.11 REGISTER MAP ............................................................................................................... 45
2.11.1 REGISTER (0X00) CHIPID ......................................................................................................... 47
2.11.2 REGISTER (0X02) ERR_REG .................................................................................................... 47
2.11.3 REGISTER (0X03) PMU_STATUS ............................................................................................. 48
2.11.4 REGISTER (0X04-0X17) DATA ................................................................................................... 49
2.11.5 REGISTER (0X18-0X1A) SENSORTIME .................................................................................... 50
2.11.6 REGISTER (0X1B) STATUS ....................................................................................................... 51
2.11.7 REGISTER (0X1C-0X1F) INT_STATUS ..................................................................................... 51
2.11.8 REGISTER (0X20-0X21) TEMPERATURE ................................................................................. 53
2.11.9 REGISTER (0X22-0X23) FIFO_LENGTH ................................................................................... 54
2.11.10 REGISTER (0X24) FIFO_DATA ................................................................................................ 55
2.11.11 REGISTER (0X40) ACC_CONF ................................................................................................ 55
2.11.12 REGISTER (0X41) ACC_RANGE ............................................................................................. 56
2.11.13 REGISTER (0X42) GYR_CONF................................................................................................ 57
2.11.14 REGISTER (0X43) GYR_RANGE ............................................................................................. 58
2.11.15 REGISTER (0X44) MAG_CONF ............................................................................................... 58
2.11.16 REGISTER (0X45) FIFO_DOWNS ........................................................................................... 59
2.11.17 REGISTER (0X46-0X47) FIFO_CONFIG .................................................................................. 60
2.11.18 REGISTER (0X4B-0X4F) MAG_IF ............................................................................................ 61
2.11.19 REGISTER (0X50-0X52) INT_EN.............................................................................................. 62
2.11.20 REGISTER (0X53) INT_OUT_CTRL ......................................................................................... 63
2.11.21 REGISTER (0X54) INT_LATCH ................................................................................................ 63
2.11.22 REGISTER (0X55-0X57) INT_MAP ........................................................................................... 64
2.11.23 REGISTER (0X58-0X59) INT_DATA ......................................................................................... 66
2.11.24 REGISTER (0X5A-0X5E) INT_LOWHIGH ................................................................................ 67
2.11.25 REGISTER (0X5F-0X62) INT_MOTION .................................................................................... 69
2.11.26 REGISTER (0X63-0X64) INT_TAP............................................................................................ 71
2.11.27 REGISTER (0X65-0X66) INT_ORIENT ..................................................................................... 72
2.11.28 REGISTER (0X67-0X68) INT_FLAT .......................................................................................... 73
2.11.29 REGISTER (0X69) FOC_CONF ................................................................................................ 74
2.11.30 REGISTER (0X6A) CONF ......................................................................................................... 75
2.11.31 REGISTER (0X6B) IF_CONF .................................................................................................... 75
2.11.32 REGISTER (0X6C) PMU_TRIGGER ........................................................................................ 76
2.11.33 REGISTER (0X6D) SELF_TEST ............................................................................................... 77
2.11.34 REGISTER (0X70) NV_CONF .................................................................................................. 78
2.11.35 REGISTER (0X71-0X77) OFFSET ............................................................................................ 78
2.11.36 REGISTER (0X78-0X79) STEP_CNT........................................................................................ 79
2.11.37 REGISTER (0X7A-0X7B) STEP_CONF .................................................................................... 80
2.11.38 REGISTER (0X7E) CMD ........................................................................................................... 81
3. DIGITAL INTERFACES ............................................................................................................ 84
3.1 INTERFACES ..................................................................................................................... 84
3.2 PRIMARY INTERFACE ......................................................................................................... 84
3.2.1 PRIMARY INTERFACE I2C/SPI PROTOCOL SELECTION ................................................................... 85
3.2.2 PRIMARY SPI INTERFACE ............................................................................................................. 86
3.2.3 PRIMARY I2C INTERFACE ............................................................................................................. 89
3.2.4 SPI AND I²C ACCESS RESTRICTIONS ............................................................................................ 93
3.3 SECONDARY INTERFACE.................................................................................................... 94
3.3.1 MAGNETOMETER CONNECTED TO SECONDARY INTERFACE ............................................................. 94
3.3.2 CAMERA MODULE CONNECTED TO SECONDARY INTERFACE FOR OIS............................................... 96
BST-BMI160-DS000-07 | Revision 0.8 | February 2015
Bosch Sensortec
© Bosch Sensortec GmbH reserves all rights even in the event of industrial property rights. We reserve all rights of disposal such as copying and passing on to
third parties. BOSCH and the symbol are registered trademarks of Robert Bosch GmbH, Germany.
Note: Specifications within this document are preliminary and subject to change without notice.
BMI160
Data sheet
Page 6
4. PIN-OUT AND CONNECTION DIAGRAMS ............................................................................ 97
4.1 PIN-OUT ........................................................................................................................... 97
4.2 CONNECTION DIAGRAMS TO USE PRIMARY INTERFACE ONLY ................................................ 98
2
4.2.1 I C AS PRIMARY INTERFACE .......................................................................................................... 98
4.2.2 SPI 3-WIRE AS PRIMARY INTERFACE.............................................................................................. 98
4.2.3 SPI 4-WIRE AS PRIMARY INTERFACE.............................................................................................. 99
4.3 CONNECTION DIAGRAMS TO USE ADDITIONAL SECONDARY INTERFACE .................................. 99
2
4.3.1 PRIMARY SPI 4-WIRE AND SECONDARY MAGNETOMETER INTERFACE (I C) ...................................... 99
2
4.3.2 PRIMARY SPI 3-WIRE AND SECONDARY MAGNETOMETER INTERFACE (I C) .................................... 100
2
2
4.3.3 PRIMARY I C AND SECONDARY MAGNETOMETER INTERFACE (I C) ................................................ 100
2
4.3.4 PRIMARY I C AND SECONDARY 4-WIRE SPI AS OIS INTERFACE .................................................... 101
2
4.3.5 PRIMARY I C AND SECONDARY 3-WIRE SPI AS OIS INTERFACE .................................................... 101
5. PACKAGE .............................................................................................................................. 102
5.1 OUTLINE DIMENSIONS ..................................................................................................... 102
5.2 SENSING AXES ORIENTATION ........................................................................................... 103
5.3 LANDING PATTERN RECOMMENDATION ............................................................................. 104
5.4 MARKING........................................................................................................................ 105
5.4.1 MASS PRODUCTION MARKING...................................................................................................... 105
5.4.2 ENGINEERING SAMPLES .............................................................................................................. 105
5.5 SOLDERING GUIDELINES .................................................................................................. 106
5.6 HANDLING INSTRUCTIONS ................................................................................................ 107
5.7 TAPE AND REEL SPECIFICATION ....................................................................................... 107
5.7.1 ORIENTATION WITHIN THE REEL................................................................................................... 108
5.8 ENVIRONMENTAL SAFETY ................................................................................................ 108
5.8.1 HALOGEN CONTENT ................................................................................................................... 108
5.8.2 MULTIPLE SOURCING .................................................................................................................. 108
6. LEGAL DISCLAIMER............................................................................................................. 109
6.1 ENGINEERING SAMPLES .................................................................................................. 109
6.2 PRODUCT USE ................................................................................................................ 109
6.3 APPLICATION EXAMPLES AND HINTS ................................................................................. 109
7. DOCUMENT HISTORY AND MODIFICATIONS ................................................................... 110
BST-BMI160-DS000-07 | Revision 0.8 | February 2015
Bosch Sensortec
© Bosch Sensortec GmbH reserves all rights even in the event of industrial property rights. We reserve all rights of disposal such as copying and passing on to
third parties. BOSCH and the symbol are registered trademarks of Robert Bosch GmbH, Germany.
Note: Specifications within this document are preliminary and subject to change without notice.
BMI160
Data sheet
Page 7
1. Specification
If not stated otherwise, the given values are over lifetime and full performance temperature and
voltage ranges, minimum/maximum values are ±3. The specifications are split into
accelerometer and gyroscope sections of the BMI160.
1.1 Electrical specification
VDD and VDDIO can be ramped in arbitrary order without causing the device to consume
significant currents. The values of the voltage at VDD and the VDDIO pins can be chosen
arbitrarily within their respective limits. The device only operates within specifications if the both
voltages at VDD and VDDIO pins are within the specified range. The voltage levels at the digital
input pins must not fall below GNDIO-0.3V or go above VDDIO+0.3V to prevent excessive
current flowing into the respective input pin. BMI160 contains a brownout detector, which
ensures integrity of data in the non-volatile memory under all operating conditions.
Table 1: Electrical parameter specification
Parameter
Supply Voltage
Internal Domains
Supply Voltage
I/O Domain
Voltage Input
Low Level
Voltage Input
High Level
Voltage Output
Low Level
Voltage Output
High Level
Operating
Temperature
NVM write-cycles
Current
consumption
OPERATING CONDITIONS BMI160
Condition
Min
Symbol
Typ
Max
Unit
VDD
1.71
3.0
3.6
V
VDDIO
1.2
2.4
3.6
V
0.3VDDIO
-
VIL,a
SPI
VIH,a
SPI
VOL,a
VOH,a
IDD
-
VDDIO=1.62V, IOL=3mA, SPI
0.2VDDIO
-
VDDIO=1.2V, IOL=3mA, SPI
0.23VDDIO
-
VDDIO=1.62V, IOH=3mA, SPI
0.8VDDIO
-
VDDIO=1.2V, IOH=3mA, SPI
0.62VDDIO
-
TA
nNVM
0.7VDDIO
-40
Non-volatile memory
Gyro in fast start-up, accel
in suspend mode, TA=25°C
Gyro and accel full
operation mode, TA=25°C
Gyro full operation mode,
accel in suspend, TA=25°C
Accel full operation mode,
gyro in suspend, TA=25°C
Gyro and accel
in suspend mode, TA=25°C
Significant motion detector,
gyro in suspend, accel in
low power mode @50Hz,
TA=25°C
Step detector, gyro in
suspend, accel in low
power mode @50Hz,
TA=25°C
BST-BMI160-DS000-07 | Revision 0.8 | February 2015
+85
14
°C
Cycles
500
600
925
990
850
900
180
300
3
10
µA
20
20
Bosch Sensortec
© Bosch Sensortec GmbH reserves all rights even in the event of industrial property rights. We reserve all rights of disposal such as copying and passing on to
third parties. BOSCH and the symbol are registered trademarks of Robert Bosch GmbH, Germany.
Note: Specifications within this document are preliminary and subject to change without notice.
BMI160
Data sheet
Page 8
1.2 Electrical and physical characteristics, measurement performance
Table 2: Electrical characteristics accelerometer
OPERATING CONDITIONS ACCELEROMETER
Parameter
Symbol
Condition
Min
gFS2g
Acceleration Range
Selectable
via serial digital
interface
gFS4g
gFS8g
gFS16g
Start-up time
Suspend/low power
mode to normal
mode, ODR=1.6kHz
tA,su
Typ
Max
Units
±2
g
±4
g
±8
g
±16
g
3.2
3.8
ms
Typ
Max
Units
OUTPUT SIGNAL ACCELEROMETER
Parameter
Symbol
Condition
Min
Resolution
Sensitivity
16
S2g
gFS2g, TA=25°C
15729
16384
17039
LSB/g
S4g
gFS4g, TA=25°C
7864
8192
8520
LSB/g
S8g
gFS8g, TA=25°C
3932
4096
4260
LSB/g
S16g
gFS16g, TA=25°C
1966
2048
2130
LSB/g
Sensitivity
Temperature Drift
TCSA
Sensitivity change
over supply voltage
SA,VDD
gFS8g,
Nominal VDD supplies
best fit straight line
T =25°C,
A
VDD,min ≤ VDD ≤ VDD,max
best fit straight line
gFS8g, TA=25°C, nominal
VDD supplies, component
level
gFS8g, TA=25°C, nominal
VDD supplies, soldered,
board level
gFS8g, TA=25°C, nominal
VDD supplies, after MSL11
prec. / soldered
gFS8g, TA=25°C, nominal
VDD supplies, soldered,
2
over life time
gFS8g,
Nominal VDD supplies
best fit straight line
OffA, init
OffA,board
Zero-g Offset
OffA,MSL
OffA,life
1
2
bit
±0.03
%/K
0.01
%/V
±25
mg
±40
mg
±70
mg
±150
mg
±1.0
mg/K
%FS
Zero-g Offset
Temperature Drift
TCOA
Nonlinearity
NLA
Best fit straight line, gFS8g
±0.5
Output Noise
nA,nd
gFS8g, TA=25°C, nominal
VDD, Normal mode
180
300
µg/Hz
Values taken from qualification, according to JEDEC J-STD-020D.1
Values taken from qualification, according to JEDEC J-STD-020D.1
BST-BMI160-DS000-07 | Revision 0.8 | February 2015
Bosch Sensortec
© Bosch Sensortec GmbH reserves all rights even in the event of industrial property rights. We reserve all rights of disposal such as copying and passing on to
third parties. BOSCH and the symbol are registered trademarks of Robert Bosch GmbH, Germany.
Note: Specifications within this document are preliminary and subject to change without notice.
BMI160
Data sheet
Page 9
nA,rms
Filter setting 80 Hz, ODR
200 Hz
1.8
mg-rms
Cross Axis
Sensitivity
SA
Relative contribution
between any two of the
three axes
1
%
Alignment Error
EA
Relative to package
outline
±0.5
°
Output Data rate
(set of x,y,z rate)
Output Data rate
accuracy
(set of x,y,z rate)
ODRA
AODRA
12.5
Normal mode, over whole
operating temperature
range
1600
±1
Hz
%
Table 3: Electrical characteristics gyroscope
OPERATING CONDITIONS GYROSCOPE
Parameter
Symbol
Condition
Min
RFS125
Max
Unit
125
°/s
250
°/s
500
°/s
RFS1000
1,000
°/s
RFS2000
2,000
°/s
RFS250
Range
Typ
RFS500
Selectable
via serial digital interface
tG,su
Suspend to normal mode
ODRG=1600Hz
55
ms
tG,FS
Fast start-up to normal
mode
10
ms
Start-up time
OUTPUT SIGNAL GYROSCOPE
Sensitivity
RFS2000
Ta=25°C
15.9
16.4
16.9
LSB/°/s
RFS1000
Ta=25°C
31.8
32.8
33.8
LSB/°/s
RFS500
Ta=25°C
63.6
65.6
67.6
LSB/°/s
RFS250
Ta=25°C
127.2
131.2
135.2
LSB/°/s
RFS125
Ta=25°C
254.5
262.4
270.3
LSB/°/s
Sensitivity change
over temperature
TCSG
Sensitivity change
over supply voltage
SG,VDD
Nonlinearity
A
VDD,min ≤ VDD ≤ VDD,max
best fit straight line
Best fit straight line
RFS1000, RFS2000
NLG
g- Sensitivity
Zero-rate offset
RFS2000,
Nominal VDD supplies
best fit straight line
T =25°C,
Off x
y and z
±0.02
%/K
0.01
%/V
0.1
%FS
Sensitivity to acceleration
stimuli in all three axis
(frequency