SDP6x6 (SDP606/616)
Differential Pressure Sensor with Power Saving Mode
Automatic power saving mode when idle
Accuracy better than 0.2% FS near zero
Digital output (I2C)
Excellent repeatability, even below 10 Pa
Calibrated and temperature compensated
Excellent long-term stability
Product Summary
The SDP6x6 sensor is a special version in Sensirion’s
SDP600 series of digital differential pressure sensors
designed for high-volume applications. Just like all other
SDP600 series sensors, the SDP6x6 measures the
pressure of air and non-aggressive gases with superb
accuracy and no offset drift. Additionally the SDP6x6
switches off power consuming functions in the sensor after
a measurement and so saves more than 99.9% power
during idle mode.
The outstanding performance of these sensors is based
on Sensirion’s patented CMOSens® sensor technology,
which combines the sensor element, signal processing
and digital calibration on a tiny microchip. The differential
pressure is measured by a thermal sensor element using
flow-through technology. Compared with membranebased sensors, the SDP6x6 features an extended
dynamic range, better long-term stability, and improved
repeatability, especially near zero.
The SDP6x6 operates from a 3V supply voltage and
features a digital 2-wire interface, which makes it easy to
connect directly to a microprocessor. The signal is
internally linearized and temperature compensated.
The well-proven CMOS technology is perfectly suited for
high-quality mass production and is the ideal choice for
demanding and cost-sensitive OEM applications.
Power Saving Mode
Sensor chip
The SDP6x6 automatically switches off the heater, ADC
and other chip functions after a measurement in order to
save power. During the power saving mode only the I2C
interface will remain active and will trigger the rest of the
sensor on the next measurement command.
The SDP6x6 is intended for applications where differential
pressure measurements are only required once in a while
and measurement speed is not required.
The SDP6x6 features the fourth-generation silicon sensor
chip. In addition to a thermal mass flow sensor element,
the chip contains an amplifier, A/D converter, EEPROM
memory, digital signal processing circuitry, and interface.
The highly sensitive chip requires only a minuscule
amount of gas flow through the sensor.
Applications
OEM options
Medical
HVAC
Process automation
A variety of custom options can be implemented for highvolume OEM applications. Ask us for more information.
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1. Sensor Performance
1.1
Physical specifications1
Parameter
SDP606
SDP616
Short Description
Differential Pressure Sensor with Power Saving Mode
Calibrated range
– 500 Pa
to + 500 Pa
(± 2.0 in. H2O)
Temperature-compensation
yes
Resolution
16bit
Zero point accuracy2,3
0.2 Pa
Span accuracy2,3
3% of reading
Zero point repeatability2,3
0.1 Pa
Span repeatability2,3
0.5% of reading
Offset shift due to temperature
variation
(less than resolution)
None
Span shift due to temperature
variation
< 0.5% of reading per 10°C
Offset stability
< 0.1 Pa/year
Response time
90 ms typical
Time between measurements
> 900 ms
(shorter measurement intervals will
affect accuracy of measurement results)
1
All sensor specifications are valid at 25°C with Vdd = 3 V and absolute pressure = 966 mbar and at most one measurement per second.
Includes repeatability and hysteresis.
3 Total accuracy/repeatability is a sum of zero-point and span accuracy/repeatability.
2
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1.2
Ambient conditions
Parameter
Calibrated for4
Media compatibility
Calibrated temperature range
Operating temperature
Storage temperature4
Position sensitivity
1.3
SDP606 / SDP616
Air, N2
Air, N2, O2
-20 °C to +80 °C
-20 °C to +80 °C
-40 °C to +80 °C
Less than repeatability error
Materials
Parameter
Wetted materials
REACH, RoHS,
SDP606 / SDP616
PBT (polybutylene terephthalate), glass (silicon nitride, silicon oxide), silicon, gold,
FR4, silicone as static sealing, epoxy, copper alloy, lead-free solder
REACH and RoHS compliant
2. Electrical Specifications
Parameter
Operating voltage
Current drain while measuring
SDP606 / SDP616
2.7 – 3.3 V
(A supply voltage of 3 V is recommended)
< 5 mA typical in operation
Interface
Bus clock frequency
< 1 A
Digital 2-wire interface (I2C)
100 kHz typical, 400 kHz max.
Default I2C address
64 (binary: 1000 000)
Current drain in sleep mode
Scale factor
Scale factor to Pascal
Scale factor to alternative
units5
60 Pa-1
6’000 mbar-1
413’686 psi-1
14’945 (inch H2O)-1
Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures.
Instead of the standard scale factor (to get the physical value in Pa), the sensor output may be divided by alternative scale factors to receive the physical
value in another unit.
4
5
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3. Interface Specifications
The serial interface of the SDP6x6 is compatible with I2C
interfaces. For detailed specifications of the I2C protocol,
see The I2C Bus Specification (source: NXP).
3.1
Transmission STOP Condition (P): The STOP condition
is a unique situation on the bus created by the master,
indicating to the slaves the end of a transmission
sequence (the bus is considered free after a STOP).
I2C Transmission Stop Condition
SDA
Interface connection – external
components
Bi-directional bus lines are implemented by the devices
(master and slave) using open-drain output stages and a
pull-up resistor connected to the positive supply voltage.
The recommended pull-up resistor value depends on the
system setup (capacitance of the circuit or cable and bus
clock frequency). In most cases, 10 kΩ is a reasonable
choice.
The capacitive loads on SDA and SCL line have to be the
same. It is important to avoid asymmetric capacitive loads.
I2C Transmission Start Condition
VDD
master
Rp
Rp
SCL
P
STOP condition
A LOW to HIGH transition on the SDA line while SCL is HIGH.
Acknowledge (ACK) / Not Acknowledge (NACK): Each
byte (8 bits) transmitted over the I2C bus is followed by an
acknowledge condition from the receiver. This means that
after the master pulls SCL low to complete the
transmission of the 8th bit, SDA will be pulled low by the
receiver during the 9th bit time. If after transmission of the
8th bit the receiver does not pull the SDA line low, this is
considered to be a NACK condition.
If an ACK is missing during a slave to master transmission,
the slave aborts the transmission and goes into idle mode.
slave (SDP600)
SDA
I2C Acknowledge / Not Acknowledge
SCL
Both bus lines, SDA and SCL, are bi-directional and therefore
require an external pull-up resistor.
not acknowledge
SDA
acknowledge
3.2
I2C Address
SCL
The I2C address consists of a 7-digit binary value. By
default, the I2C address is set to 64 (binary: 1000 000).
The address is always followed by a write bit (0) or read
bit (1). The default hexadecimal I2C header for read
access to the sensor is therefore h81.
3.3
Transfer sequences
Transmission START Condition (S): The START condition is a unique situation on the bus created by the master,
indicating to the slaves the beginning of a transmission
sequence (the bus is considered busy after a START).
I2C Transmission Start Condition
R/_W
ACK
D7
Each byte is followed by an acknowledge or a not
acknowledge, generated by the receiver
Handshake procedure (Hold Master): In a master-slave
system, the master dictates when the slaves will receive or
transmit data. However, in some situations a slave device
may need time to store received data or prepare data to
be transmitted. Therefore, a handshake procedure is
required to allow the slave to indicate termination of
internal processing.
I2C Hold Master
SCL
R/_W
ACK
D7
Hold master:
SCK line pulled LOW
S
START condition
A HIGH to LOW transition on the SDA line while SCL is HIGH
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ACK
SDA
SDA
SCL
D0
D0
ACK
data ready: SCK line released
After the SCL pulse for the acknowledge signal, the sensor
(slave) can pull down the SCL line to force the master into a
wait state. By releasing the SCL line, the sensor indicates that
its internal processing is completed and transmission can
resume. (The bold lines indicate that the sensor controls the
SDA/SCL lines.)
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A command is represented by an 8-bit command code.
The data direction may not change after the command
byte, since the R/_W bit of the preceding I2C header has
already determined the direction to be master-to-slave. In
order to execute commands in Read mode using I2C, the
following principle is used. On successful (acknowledged)
receipt of a command byte, the sensor stores the
command nibble internally. The Read mode of this
command is then invoked by initiating an I2C data transfer
sequence with R/_W = 1.
If a correctly addressed sensor recognizes a valid
command and access to this command is granted, it
responds by pulling down the SDA line during the
subsequent SCL pulse for the acknowledge signal (ACK).
Otherwise it leaves the SDA line unasserted (NACK).
The two most important commands are described in this
data sheet, and the data transfer sequences are specified.
Contact Sensirion for advanced sensor options.
Measurement triggering
Each individual measurement is triggered by a separate
read operation.
Note that two transfer sequences are needed to perform a
measurement. First write command byte hF1 (trigger
measurement) to the sensor, and then execute a read
operation to trigger the measurement and retrieve the flow
or differential pressure information.
On receipt of a header with R/_W=1, the sensor generates
the Hold Master condition on the bus until the first
measurement is completed, which takes around 70ms.
After the Hold Master condition is released, the master
can read the result as two consecutive bytes. A CRC byte
follows if the master continues clocking the SCL line after
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3
4
5
6
7
8
9
10 11 12 13 14 15 16 17 18
1 1 1 1 0 0 0 1
W
I2CAdr
1
2
3
4
5
6
7
8
S 1 0 0 0 0 0 0 1
Command
9
ACK
2
Hold Master
R
I2CAdr
LSByte MeasData
Check Byte
ACK
MSByte MeasData
ACK
10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36
P
Hatched areas indicate that the sensor controls the SDA line.
Note that the first measurement result after reset is not
valid.
4.2
4. Command Set and Data Transfer
Sequences
4.1
1
S 1 0 0 0 0 0 0 0
Soft reset
This command forces a sensor reset without switching the
power off and on again. On receipt of this command, the
sensor reinitializes the control/status register contents
from the EEPROM and starts operating according to these
settings.
I2C Soft Reset
8-bit command code: hFE
Command: Soft reset
1
2
3
4
5
6
7
8
S 1 0 0 0 0 0 0 0
I2CAdr
4.3
W
9
10 11 12 13 14 15 16 17 18
1 1 1 1 1 1 1 0
ACK
The value of the R/_W bit in the header determines the
data direction for the rest of the data transfer sequence. If
R/_W = 0 (WRITE) the direction remains master-to-slave,
while if R/_W = 1 (READ) the direction changes to slaveto-master after the header byte.
8-bit command code: hF1
Command: Trigger differential pressure measurement
ACK
A data transfer sequence is initiated by the master
generating the Start condition (S) and sending a header
byte. The I2C header consists of the 7-bit I2C device
address and the data direction bit (R/_W).
I2C Measurement
ACK
Data is transferred in byte packets in the I2C protocol,
which means in 8-bit frames. Each byte is followed by an
acknowledge bit. Data is transferred with the most
significant bit (MSB) first.
the second result byte. The sensor checks whether the
master sends an acknowledge after each byte and aborts
the transmission if it does not.
ACK
Data transfer format
ACK
3.4
system reboot
Command
CRC-8 Redundant Data Transmission
Cyclic redundancy checking (CRC) is a popular technique
used for error detection in data transmission. The
transmitter appends an n-bit checksum to the actual data
sequence. The checksum holds redundant information
about the data sequence and allows the receiver to detect
transmission errors. The computed checksum can be
regarded as the remainder of a polynomial division, where
the dividend is the binary polynomial defined by the data
sequence and the divisor is a “generator polynomial”.
The sensor implements the CRC-8 standard based on the
generator polynomial
x8 + x5 + x4 +1.
Note that CRC protection is only used for date transmitted
from the slave to the master.
For details regarding cyclic redundancy checking, please
refer to the relevant literature.
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5. Conversion to Physical Values
5.1
6. OEM Options
Signal scaling and physical unit
The calibrated signal read from the sensor is a signed
INTEGER number (two's complement number). The
INTEGER value can be converted to the physical value by
dividing it by the scale factor (pressure = sensor output
scale factor). The scale factor is specified in Section
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5.2
A variety of custom options can potentially be
implemented for high-volume OEM applications. Contact
Sensirion for more information.
Temperature compensation
The SDP6x6 features digital temperature compensation.
The temperature is measured on the CMOSens® chip by
an on-chip temperature sensor. This data is fed to a
compensation circuit that is also integrated on the
CMOSens® sensor chip. No external temperature
compensation is necessary.
5.3
Altitude correction
The SDP6x6 achieves its unsurpassed performance by
using a dynamic measurement principle. The applied
differential pressure forces a small flow of gas through the
sensor, which is measured by the flow sensor element. As
a result, any variation in gas density affects the sensor
reading. While temperature effects are compensated
internally, variations in atmospheric pressure (elevation
above sea level) can be compensated by a correction
factor according to the following formula:
DPeff = DPsensor (Pcal / Pamb)
DPeff: Effective differential pressure
DPsensor: Differential pressure indicated by the sensor
Pcal:
Absolute pressure at calibration (966 mbar)
Pamb: Actual ambient absolute pressure.
Altitude correction factors:
Altitude
Ambient pressure (Pamb) Correction factor
[meters]
[mbar]
(Pcal / Pamb)
0
250
425
500
750
1500
2250
3000
1013
984
966
958
925
842
766
697
0.95
0.98
1.00
1.01
1.04
1.15
1.26
1.38
Example: At 750 m above sea level and a sensor reading
of 40 Pa, the effective differential pressure is 41.8 Pa.
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7.4
7. Mechanical Specifications
7.1
SDP616 – Tube connection
Mechanical concept
The SDP6x6 is designed for through-hole technology and
can be wave-soldered or hand-soldered to a PCB.
7.2
The SDP606 can be directly connected to a
manifold using two O-rings.
The SDP616 has ports for connecting standardsize plastic tubes.
Mechanical characteristics
Parameter
PCB attachment
Allowable
overpressure
Rated burst pressure
Gas flow through
sensor
Weight
Protection rating
7.3
Clip-in and hand or wave soldering.
Additional mechanical attachment
depending on force requirements
1 bar (100 kPa, 400 inches H2O)
> 5 bar
Figure 3: SDP616 version with ports for tube connection. All
dimensions are in mm.
< 150 ml/min