PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Product Description
The KXR94-2050 is a Tri-axis, silicon micromachined
accelerometer with a full-scale output range of +/-2g (19.6
m/s/s). The sense element is fabricated using Kionix’s
proprietary plasma micromachining process technology.
Acceleration sensing is based on the principle of a differential
capacitance arising from acceleration-induced motion of the
sense element, which further utilizes common mode
cancellation to decrease errors from process variation,
temperature, and environmental stress. The sense element is
hermetically sealed at the wafer level by bonding a second
silicon lid wafer to the device using a glass frit. A separate
ASIC device packaged with the sense element provides signal
conditioning and self-test. The accelerometer is delivered in a
5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 –
5.25V DC supply.
There are 4 factory programmable modes of operation for the KXR94:
R
Mode 00 – The three outputs (X, Y, Z) are read through the digital SPI interface, which is also
used to command Selftest and Standby Mode. The digital I/O pads are powered
from a separate power pin, and will interface to 1.8V logic.
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Mode 01 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must
be high for normal operation and low for power shutdown.
Mode 10 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be high for normal operation and low for power shutdown.
Mode 11 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be low for normal operation and high for power shutdown.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 1 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
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** NOTE: This specification has special information attached to it. **The KXR94-2050 is
factory programmed to be in MODE 10.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 2 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Functional Diagram
X
Sensor
Charge
Amplifier
Self
10
Test
Output X
2
C2
Temp
Sensor
Y
Sensor
Z
Sensor
Vdd 8
32K
Charge
Amplifier
32K
1kHz
LPF
Output Y
13
C3
Charge
Amplifier
32K
Output Z
14
C4
Oscillator
GND 12
Mux
4 Aux In
Logic
GND 3
11
NC
6
7
5
S0 S1 Vmux
N
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R
9
Enable
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 3 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Product Specifications
Table 1. Mechanical
(specifications are for operation at 3.3V and T = 25C unless stated otherwise)
Parameters
Units
Min
ºC
V
mg/ºC
mV/g
-40
1.6
Typical
Max
85
!
1.65
1.7
0.2
!
647
660
673
0.01 (xy)
Sensitivity Variation from RT over Temp.
%/ºC
0.02 (z)
Offset Ratiometric Error (Vdd = 3.3V ± 5%)
mg
4
1.25 (xy)
Sensitivity Ratiometric Error (Vdd = 3.3V ± 5%)
%
0.2 (z)
Non-Linearity
% of FS
0.1
Cross Axis Sensitivity
%
2
1.9 (xy)
Self Test Output change on Activation
g
0.5 (z)
1
Bandwidth (-3dB)
Hz
640
800
960
g / √Hz
Noise Density (on filter pins)
45
! Denotes Special Characteristics: These characteristics have been identified as important to the
customer.
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Operating Temperature Range
Zero-g Offset
Zero-g Offset Variation from RT over Temp.
Sensitivity
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Notes:
1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external capacitors.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 4 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Table 2. Electrical
(specifications are for operation at 3.3V and T = 25C unless stated otherwise)
Parameters
Units
Min
Typical
Max
Supply Voltage (Vdd)
Operating
V
2.5
3.3
5.25
!
Operating
800
1030
1260
A
Current Consumption
Standby
5
A
Analog Output Resistance(Rout)
24
32
40
k
Input Low Voltage
V
0.2 * VIO
Input High Voltage
V
0.8 * VIO
Multiplexer Response Time
4.5
s
1
Power Up Time
ms
1
! Denotes Special Characteristics: These characteristics have been identified as important to the
customer.
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Notes:
1. Power up time can also be determined by 5 times the RC time constant of the optional user
defined low pass filter.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 5 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Table 3. Environmental
Units
Min
Target
Max
Supply Voltage (Vdd)
Absolute Limits
Maximum Operating Temperature Range
Storage Temperature Range
Mech. Shock (powered and unpowered)
Parameters
V
ºC
ºC
g
-0.3
-40
-55
-
-
7.0
125
150
5000 for 0.5ms
ESD
V
-
-
3000
HBM
Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling
can cause permanent damage to the device.
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This product conforms to Directive 2002/95/EC of the European Parliament and of the
Council of the European Union (RoHS). Specifically, this product does not contain lead,
mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBB), or
polybrominated diphenyl ethers (PBDE) above the maximum concentration values (MCV) by
weight in any of its homogenous materials. Homogenous materials are "of uniform
composition throughout."
This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this
product contain a maximum total halogen content of 1500 ppm with less than 900-ppm
bromine and less than 900-ppm chlorine.
ot
HF
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Soldering
Soldering recommendations available upon request or from www.kionix.com.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 6 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Application Schematic
Table 4. KXR94 Pad Descriptions
Name
1
2
3
4
5
6
7
8
9
10
11
12
13
14
NC
X output
GND
Aux In
Vmux
S0
S1
Vdd
Enable
ST
NC
GND
Y Output
Z Output
Center pad
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Description
Not Connected Internally (can be connected to Vdd or Gnd)
Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a low pass filter.
Ground
Auxiliary input for multiplexer. Connect to Vdd or Ground if not used.
Multiplexed analog output. Do not connect if multiplexer is not used.
MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used.
MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used.
The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C 1).
Enable: High - Normal operation; Low - Device is in standby, power down mode
Self Test: Low – Normal operation; High – Device is in self-test mode
Not Connected Internally (can be connected to Vdd or Gnd)
Ground
Analog output of y-channel. Optionally, a capacitor (C3) placed between this pin and ground will form a low pass filter.
Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low pass filter.
Ground
R
Pad
Important Technical Note: Power Up / Power Down
Proper functioning of power-on reset (POR) is dependent on the specific Voff and Toff profile of individual
applications. It is recommended to minimize Voff and maximize Toff. The application should be evaluated
with the range of Voff and Toff expected within the application as POR performance can vary depending on
these parameters. In order to guarantee proper reset regardless of Voff and Toff, a software reset can be
issued via the SPI protocol. Please refer to Technical Note KXR94 and KXD94 Accelerometer Reset
Sequence document to ensure proper POR function in your application.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 7 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Application Design Equations
1. The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the
bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. The
response is single pole. Given a desired bandwidth, fBW, the filter capacitors are determined by:
4.97 x10 6
f BW
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C2 C3 C4
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 8 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
2. When using not using the multiplexer, the KXR94 is a pin-compatible replacement for Kionix’s
KXM52 series of accelerometers. The following application schematic should be used:
Pin 4 (Aux in) = Ground
Pin 5 (Vmux) = Do Not Connect
Pin 6 (S0)
= Ground
Pin 7 (S1)
= Ground
X
C2
1
14
2
13
3
12
4
11
KXR94
5
10
6
9
7
8
Z
Y
C3
C4
ST
Enable
Vdd
R
C1
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3. When not connecting the self test pin to a digital I/O port of a microcontroller, Kionix
recommends connecting the self test pin to ground.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 9 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
USING THE MULTIPLEXED OUTPUT OF THE KXR94
Multiplexer Data Select
The KXR94 features an integrated 4-channel multiplexer. This feature reduces system MCU
requirements to only 1 ADC and 2 digital I/O’s. The KXR94 uses two select inputs (S0, S1) to
control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired
output is attained based on the select table. Note that logic 0 is GND and logic 1 is Vdd.
S1
0
0
1
1
S0
0
1
0
1
Vmux
X Output
Z Output
Y Output
Aux. In
Output Select Table
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Data Sampling Rate
When operating in its multiplexed mode, the KXR94 has the ability to achieve very high data
sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a
“round robin” fashion at a rate of 32kHz per axis. Note that this is a differential capacitance
sampling of each sensor element, which stores an analog voltage on the filter cap for each axis.
Combine this high sensor element sampling rate with the short 5µs settling time of the
integrated multiplexer, and the user can achieve a performance very close to that of the 3
separate analog outputs. This is more than sufficient to eliminate any aliasing in the final
application since the KXR94 will be operating with a typical bandwidth of ~50Hz and a
maximum of 1000Hz.
36 Thornwood Dr. – Ithaca, NY 14850
tel: 607-257-1080 – fax:607-257-1146
www.kionix.com - info@kionix.com
© 2014 Kionix – All Rights Reserved
636-4464-1405091143
Page 10 of 14
PART NUMBER:
KXR94-2050
Rev. 3
May-2014
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± 2g Tri-axis Accelerometer
Specifications
Test Specifications
! Special Characteristics:
These characteristics have been identified as being critical to the customer. Every part is tested to
verify its conformance to specification prior to shipment.
Table 5. Test Specifications
Specification
1.65 +/- 0.0502 V
660 +/- 13 mV/g
800