KXD94-2802-PR

PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Product Description The KXD94-2802 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-10g (98 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.50V - 5.25V DC supply. The three outputs (X, Y, Z) are provided on analog output pins. The KXD94 also features an integrated 4-channel multiplexer (X, Y, Z, and Aux In). The Enable pin must be high for normal operation and low for power shutdown. There are 4 factory programmable modes of operation for the KXD94: R Mode 00 – The three outputs (X, Y, Z) are read through the digital SPI interface, which is also used to command Selftest and Standby Mode. The digital I/O pads are powered from a separate power pin, and will interface to 1.8V logic. N ot Mode 01 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXD94 also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must be high for normal operation and low for power shutdown. Mode 10 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXD94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal operation and low for power shutdown. Mode 11 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXD94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be low for normal operation and high for power shutdown. The KXD94-2802 is factory programmed to be in MODE 10. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 1 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications N ot R Functional Diagram 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 2 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Product Specifications Table 1. Mechanical (specifications are for operation at 5V and T = 25C unless stated otherwise) Parameters Units Min Operating Temperature Range Zero-g Offset Zero-g Offset Variation from RT over Temp. Sensitivity Sensitivity Variation from RT over Temp. ºC V mg/ºC mV/g %/ºC -40 2.45 Typical Max 85 ! 2.5 2.55 1 ! 193 200 207 0.01 0.2 (xy) Offset Ratiometric Error (Vdd = 5V ± 5%) mg 0.1 (z) 1.6 (xy) Sensitivity Ratiometric Error (Vdd = 5V ± 5%) % 0.2 (z) Non-Linearity % of FS 0.1 Cross Axis Sensitivity % 2 6.5 (xy) Self Test Output change on Activation g 3.6 (z) 1 Bandwidth (-3dB) Hz 640 800 960 Noise Density (on filter pins) 100 g / √Hz ! Denotes Special Characteristics: These characteristics have been identified as important to the customer. N ot R Notes: 1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external capacitors. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 3 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Table 2. Electrical (specifications are for operation at 5V and T = 25C unless stated otherwise) Parameters Supply Voltage (Vdd) 1,2 Operating 3 Operating Current Consumption Standby !  Units Min Typical Max V 2.5 900 5 1200 - 5.25 1500 5 A A 4 Input Low Voltage V 0.2 * Vdd 5 Input High Voltage V 0.8 * Vdd Analog Output Resistance (Rout) 24 32 40 k ! Denotes Special Characteristics: These characteristics have been identified as important to the customer. Notes: 1. 2. N ot R 3. 4. 5. Supply voltage must be ramped to 80% of Vdd in 60mSec or less. The ASIC does not monitor Vdd voltage levels and ramping Vdd may result in failure. Note- The voltage can not cycle during the startup period. The operating voltage range of the KXD94 is 2.5V to 5.25V but the performance for that range is not validated by this specification. Tolerance for current at Vdd=5v. Voltage level for logic ‘0’. I.e. disable selftest function Voltage level for logic ‘1’. I.e. enable selftest function 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 4 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Table 3. Environmental Units Min Target Max Supply Voltage (Vdd) Absolute Limits Maximum Operating Temperature Range Storage Temperature Range 6 Mech. Shock (powered and unpowered) Parameters V ºC ºC g -0.3 -40 -55 - - 7.0 125 150 5000 for 0.5ms ESD V - - 3000 6. HBM Mechanical shock abuse can cause offset shifts Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can cause permanent damage to the device. This product conforms to Directive 2002/95/EC of the European Parliament and of the Council of the European Union (RoHS). Specifically, this product does not contain lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBB), or polybrominated diphenyl ethers (PBDE) above the maximum concentration values (MCV) by weight in any of its homogenous materials. Homogenous materials are "of uniform composition throughout." ot R HF This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this product contain a maximum total halogen content of 1500 ppm with less than 900-ppm bromine and less than 900-ppm chlorine. N Soldering Soldering recommendations available upon request or from www.kionix.com. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 5 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Application Schematic Table 4. KXD94 Pad Descriptions Name Description NC Not Connected Internally (can be connected to Vdd or Gnd) Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a low pass filter. Connect to Vdd or Ground if not used. Ground Auxiliary input for multiplexer. Connect to Vdd or Ground if not used. Input Impedance is 1KΩ Multiplexed analog output. Do not connect if multiplexer is not used. MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used. SPI Serial Data Output MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used. SPI Communication Clock The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C 1). Enable: High - Normal operation; Low - Device is in standby, power down mode SPI Chip Select Self test. The output of a properly functioning part will increase when Vdd is applied to the self-test pin. (see Table 2) SPI Serial Data Input Not Connected Internally (can be connected to Vdd or Gnd) Ground Analog output of y-channel. Optionally, a capacitor (C3) placed between this pin and ground will form a low pass filter. Connect to Vdd or Ground if not used. Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low pass filter. Connect to Vdd or Ground if not used. Ground 2 X output 3 4 5 6 61 7 71 8 9 91 10 101 11 12 GND Aux In Vmux S0 SDO S1 SCLK Vdd Enable nCS ST SDI NC GND 13 Y Output 14 Z Output ot 1 R Pad N Center pad Note 1: Pins 6,7,9,and 10 are used for SPI communication when nCS (Chip Select) is low. Important Technical Note: Power Up / Power Down Proper functioning of power-on reset (POR) is dependent on the specific Voff and Toff profile of individual applications. It is recommended to minimize Voff and maximize Toff. The application should be evaluated with the range of Voff and Toff expected within the application as POR performance can vary depending on these parameters. In order to guarantee proper reset regardless of Voff and Toff, a software reset can be issued via the SPI protocol. Please refer to Technical Note KXR94 and KXD94 Accelerometer Reset Sequence document to ensure proper POR function in your application. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 6 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 N ot R e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 7 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Application Design Equations The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. The response is single pole. Given a desired bandwidth, fBW, the filter capacitors are determined by: 4.97 x106 C2  C3  C4  f BW The response time (RT) is determined by the equation: RT  5  Rint  Cext Rint is the 32KΩ internal resistor. Cext is the external resistor C2, C3, and C4. Output is a function of t (time) for constant Resistance and Capacitance. Outtn is the output during normal operation. The function for output during selftest actuation is described by: R Output  Outtn * (1  et / RC ) Power Up / Power Down N ot Proper functioning of power-on reset (POR) is dependent on the specific Voff and Toff profile of individual applications. It is recommended to minimize Voff and maximize Toff. The application should be evaluated with the range of Voff and Toff expected within the application as POR performance can vary depending on these parameters. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 8 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Multiplexed Output of the KXD94 Multiplexer Data Select The KXD94 features an integrated 4-channel multiplexer. This feature reduces system MCU requirements to only 1 ADC and 2 digital I/O’s. The KXD94 uses two select inputs (S0, S1) to control the data flow from Vmux, which is a high impedance output. When a microprocessor toggles the select inputs, the desired output is attained based on the Output Select Table 5. Note that logic 0 is GND and logic 1 is Vdd. Table 5. Output Select Table S1 0 1 0 1 Vmux X Output Z Output Y Output Aux. In R S0 0 0 1 1 N ot Data Sampling Rate When operating in its multiplexed mode, the KXD94 has the ability to achieve very high data sampling rates. Internally, the sensor elements (X, Y) are sequentially sampled in a “round robin” fashion at a rate of 32KHz per axis. Note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. Combine this high sensor elementsampling rate with the short 5µS settling time of the integrated multiplexer, and the user can achieve a performance very close to that of the X and Y analog outputs. This is more than sufficient to eliminate any aliasing in the final application since the KXD94 will be operating with a typical bandwidth of ~50Hz and a maximum of 1000Hz. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 9 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications KXD94 Digital Interface The Kionix KXD94 digital accelerometer has the ability to communicate on a SPI digital serial interface bus. This flexibility allows for easy system integration by eliminating analog-to-digital converter requirements and by providing direct communication with system micro-controllers. The serial interface terms and descriptions as indicated in Table 6 below will be observed throughout this document. Table 6. Serial Interface Terminologies Term Transmitter Receiver Master Slave Description The device that transmits data to the bus. The device that receives data from the bus. The device that initiates a transfer generates clock signals and terminates a transfer. The device addressed by the Master. N ot R The chip will ignore all SPI activity when nCS is held high, and the analog function will run. The analog function is powered down whenever nCS is low, but the SPI bus will function, allowing communication to enable and reset the KXD94. 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 10 of 16 PART NUMBER: ± 10g Tri-axis Accelerometer Specifications e N co ew m m D es en ig de ns d fo r KXD94-2802 Rev. 2 May-2014 Accelerometer SPI Reset Sequence: 1. Power up KXD94 2. Toggle nCS (Pin 9) a. nCS low to select b. nCS high for at least 200nS (SCLK = 5MHz) c. nCS low to select 3. Send Reset Command per Figure 2 (SDI is latched on rising edges of CLK) Note that is takes 16mSec for the Reset command to execute. Figure 2. Reset command timing Diagram Reset Register CLK/S1 SDI/ST SDO/S0 nCS/Enable 0 1 0 1 0 0 RAM Reset Command 1 1 0 1 0 1 0 1 1 0 HI-Z HI-Z 4. Set nCS to high (Logic ‘1’) for Normal Analog Operation. ot R Figure 3. Application Schematic for SPI Reset N X C2 Aux In IO Vdd SDO SCLK 1 14 2 13 3 12 4 KXD94 KXR94 11 5 10 6 9 7 8 Z C3 Y C4 SDI nCS Vdd C1 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 11 of 16 PART NUMBER: KXD94-2802 Rev. 2 May-2014 e N co ew m m D es en ig de ns d fo r ± 10g Tri-axis Accelerometer Specifications Self Test Function The selftest is activated when ‘logic 1’ is applied to the ST pin (See Figure 1). An electrostatic force is applied to the sense element that causes the mass to move and the output increases. The selftest function exercises the X and Y sense elements and ASIC blocks. The output change of the selftest function is modified by the internal 1kHz LPF and the external LPF that is defined by the ASIC internal resistance and the external capacitor. Figure 4 is an example of the selftest output with a 50Hz external LPF. The selftest is actuated at 10 Hz and 25% duty cycle. Figure 4: Selftest Function for KXD94 Selftest activation N ot R Selftest output 36 Thornwood Dr. – Ithaca, NY 14850 tel: 607-257-1080 – fax:607-257-1146 www.kionix.com - info@kionix.com © 2014 Kionix – All Rights Reserved 652-4464-1405121152 Page 12 of 16 PART NUMBER: ± 10g Tri-axis Accelerometer Specifications e N co ew m m D es en ig de ns d fo r KXD94-2802 Rev. 2 May-2014 Test Specifications The performance parameters and characteristics are validated by Design methodology; Design Validation tests; and Product-Production Validation tests. A test control plan has been developed to verify product conformance to specification prior to shipment. Table 7 is a summary of these tests. Table 7. Test Specifications Specification 2.5 +/- 0.05 V 200 +/- 7 mV/g 900