KXR94 Series
Accelerometers and Inclinometers
FEATURES
MARKETS
APPLICATIONS
Small Package - 5x5x1.2mm DFN
Multiplexed Analog or Digital SPI Interface
Internal 1KHz Low Pass Filter
Automotive
\\
Stability Control
Telematics/GPS
Theft and Accident Alarms
Low Noise
Lead-free Solderability
Excellent Temperature Performance
High Shock Survivability
Personal Navigation Devices
Inertial Navigation and Dead Reckoning
Low Power Consumption
Cell Phones and Handheld PDAs
User Definable Bandwidth
Factory Programmable Offset and Sensitivity
Self-test Function
Gesture Recognition
Cameras and Video Equipment
Image Stabilization
Industrial
Platform Stabilization
Drill Orientation
PROPRIETARY TECHNOLOGY
These high-performance silicon micromachined linear accelerometers and
inclinometers consist of a sensor element and an ASIC packaged in a
5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from
single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)
processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The KXR94 series is designed to provide a high signal-to-noise ratio with
integrated temperature compensation that provides excellent performance
over temperature. These sensors can accept supply voltages between 2.5V
and 5.25V. Sensitivity is factory programmable allowing customization for
applications requiring from ±1.0g to ±4.0g ranges.
Sensor bandwidth is
user-definable.
The sensor element functions on the principle of differential capacitance.
Acceleration causes displacement of a silicon structure resulting in a
change in capacitance.
An ASIC, using a standard CMOS manufacturing
process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. The sense element design utilizes common mode cancellation to decrease errors from process
variation and environmental stress.
Available in analog and multiplexed
analog outputs and serial peripheral interface (SPI).
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
© Kionix 2012 All Rights Reserved
January 26, 2012 Rev. 2.3
Page 1 of 2
KXR94 Series
Accelerometers and Inclinometers
PERFORMANCE SPECIFICATIONS
The performance parameters below are programmed and tested at 3.3 volts. However, the device can be factory
programmed to accept supply voltages from 2.5 V to 5.25 V. Performance parameters will change with supply
voltage variations.
PERFORMANCE SPECIFICATIONS
PARAMETERS
Range
UNITS
KXR94-2050
g
1
Sensitivity
KXR94-2353
±2.0
CONDITION
Factory programmable
mV/g
660 typical (673 max)
Not applicable
counts/g
Not applicable
819 target (835 max)
12-bit operation
0g Offset vs. Temp.
mg/°C
±0.2 typical
Sensitivity vs. Temp
%/°C
±0.01 (xy) ±0.02 (z) typical
g / Hz
45 typical
Hz
800
-3dB
% of FS
0.1 typical
% of full scale output
%
±1.25 (xy) ±0.2 (z) typical
3.3V ± 5%
Noise Density
Bandwidth
2
Non-Linearity
Ratiometric Error
Cross-axis Sensitivity
%
A/D Conversion Time
µS
Not applicable
40 typical
MHz
Not Applicable
5 typical
SPI Communication Rate
3
Power Supply
2.0 typical
V
3.3
mA
Current Consumption
Standard
1.03 typical
0.95 typical
µA
Operating
5 max
Standby
ENVIRONMENTAL SPECIFICATIONS
PARAMETERS
UNITS
KXR94-2050
KXR94-2353
CONDITION
-40 to 85 (Consumer/Industrial)
Operating Temperature
°C
Storage Temperature
°C
-55 to 150
Mechanical Shock
g
5000
ESD
V
3000
Powered
-40 to 125 (Automotive)
Un-powered
Powered or un-powered,
0.5 msec halversine
Human body model
NOTES
1
Custom ranges from 1.0g to 4.0g available.
2
Internal low pass filter. Lower frequencies are user definable with external capacitors.
3
SPI communication rate can be optimized for faster communication.
ORDERING GUIDE
Axis(es) of
Sensitivity
Range
(g)
Sensitivity
Offset
Operating
Voltage (V)
Ouput
Temperature
(°C)
Package
KXR94-1050
XYZ
2
560 (mV/g)
1.4 V
2.8
Mux Analog
-40 to +85
5x5x1.2 DFN
KXR94-2050
XYZ
2
660 (mV/g)
1.65V
3.3
Mux Analog
-40 to +85
5x5x1.2 DFN
KXR94-2283
XYZ
2
1000 (mV/g)
2.5V
5.0
Mux Analog
-40 to +85
5x5x1.2 DFN
KXR94-2353
XYZ
2
819 (counts/g)
2048 counts
3.3
Digital SPI
-40 to +85
5x5x1.2 DFN
KXR94-7050
XYZ
2
660 (mV/g)
1.65V
3.3
Mux Analog
-40 to 125
5x5x1.2 DFN
Product
© Kionix 2012 All Rights Reserved
January 26, 2012 Rev. 2.3
Page 2 of 2
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