SFM3300-250-D

Datasheet SFM3300-D Datasheet SFM3300-AW Digital Flow Meter for medical applications      Flow range: ± 250 slm, bidirectional Small dead space < 10ml Single use (-D) version Re-use (-AW) version Very fast update time (0.5ms) Product Summary The SFM3300 series is Sensirion’s digital flow meter series designed for medical applications. It measures the flow rate of air, oxygen and other non-aggressive gases with superb accuracy. The special design of the flow channel results in a very small dead space. The SFM3300-D is the disposable single-use Version. The re-use version SFM3300-AW withstands washing and autoclaving procedures. It is in development stage with specifications identical to SFM3300-D. Both versions are extremely well suited for proximal flow measurements in medical ventilation and other respiratory applications. The SFM3300 series has been designed with the use by medical professionals in mind. It features medical cones for pneumatic connection to standard breathing circuits and a mechanical interface for easy and reliable electrical reconnection. The sensor element, signal processing and digital calibration are on a single microchip assuring very fast signal processing time, best-in-class accuracy and superior robustness to rough handling and adverse conditions. The well-proven and patented CMOSens® sensor technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and costsensitive OEM applications. Sensor chip The SFM3300 series flow meter features a fifth-generation silicon sensor chip. In addition to a thermal mass flow sensor element, the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and interface. Due to seamless integration of signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved. Applications  Proximal Flow measurement  Expiratory flow measurement  For Ventilation & Anesthesia  Respiratory measurements  Metabolic Measurements OEM options A variety of custom options can be implemented for highvolume OEM applications (custom flow rates, calibration for other gases etc.). Contact us for more information. www.sensirion.com Version 1.2 – January 2019 1/7 1.1 Physical specifications 1 Parameter Flow range Accuracy4 Noise Level4,7 Accuracy shift for deviation from Reference temperature 25°C Resolution (14bit) Pressure drop 1.2 Condition span 100 slm offset span 25slm offset span offset span offset @ 60 slm @ 100 slm @ 200 slm Value -250 … +250 Typical Max 3 35 5 5 7 10 5 0.1 0.2 8 2.0 2.5 38 5 0.1 8 0.2 0.4 8 0.5 0.015 8 0.02 0.07 0.034 180 / 0.73 8 230 / 0.93 8 380 / 1.53 550 / 2.21 8 1400 / 5.62 1900 / 7.63 Unit slm2 % m.v.6 % m.v.6 slm2 % m.v6 % m.v6 slm2 % m.v./10˚C % m.v./10°C % m.v. 6 slm2 Pa / inH2O Pa / inH2O Pa / inH2O Ambient conditions Parameter Condition Value Unit Calibrated Temperature Range Dry gas +10 … +50 °C Operating Temperature Range 10-95% rel. hum. (non cond.) +5 … +50 °C -20…+5 °C -40 … +70 °C 3 years absolute 0.54 – 1.1 bar gauge 0.3 bar Extended Operating Range Storage Temperature Shelf Life for SFM3300-D Operating Pressure Range Burst Overpressure 1.3 Recommended to use on-sensor heater 10-95% rel. hum. (non cond.) 15°C - 35°C; 30 - 70 % rel. hum. storage in original packaging Media compatibility Parameter Calibration 9 Media Compatibility Wetted Materials –AW version Wetted Materials –D version Value Air Air (non-condensing), N2, O2, other non- aggressive gases Si, Si3N4, SiOx, Gold, Epoxy, PPSU, silicone, stainless steel Si, Si3N4, SiOx, Gold, Epoxy, MABS, silicone 1 Reference conditions are temperature = 25°C, absolute pressure = 966 mbar, horizontal flow and Vdd = 5V slm: mass flow measured in liters per minute at standard conditions (T = 20 °C, p = 1013.25 mbar) 3 for "Max" no sensor measured outside of this limits will be shipped and a CpK of 1.33 is targeted 4 For accuracy, noise level or resolution the total value is the sum of offset and span values 5 This value corresponds to a CpK of 0.67 (95% of sensors within the “Typical” limit) 6 %m.v. = % measured value = % of reading 7 Noise level defined as standard deviation of individual sensor readings, measured at full sampling rate 8 Average value 9 Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures. 2 www.sensirion.com Version 1.2 – January 2019 2/7 RoHS, REACH RoHS and REACH compliant 2. Electrical Specifications 2.1 Electrical characteristics Electrical properties Interface Default Sensor Address Update Time Soft Reset Time Start-up Time 10 Supply Voltage Communication Level Power Consumption11 Electrical Connector External Heater Power Rating External Heater Resistance Output signal resolution12 Scale Factor Flow Condition Value I2C 64 (h40) 0.5 80 100 5V±5% 14 bit Max. Min. 2.5 GND High Low Max. Typ. Pad layout ms ms ms V Max. VDD 1.1 V < 50 See section 2.2 and 3.2 0.5 51 14 mW 120 1/slm Air, N2 Offset Flow 2.2 Unit W Ω bit 32768 2.3 Conversion to Physical Values In order to obtain the measured flow in [slm], the measured value needs to be converted using the following formula: 𝑓𝑙𝑜𝑤 [slm] = 𝑚𝑒𝑎𝑠𝑢𝑟𝑒𝑑 𝑣𝑎𝑙𝑢𝑒 − 𝑜𝑓𝑓𝑠𝑒𝑡 𝑓𝑙𝑜𝑤 𝑠𝑐𝑎𝑙𝑒 𝑓𝑎𝑐𝑡𝑜𝑟 𝑓𝑙𝑜𝑤 Please note that the first measurement performed directly after chip initialization is not valid. After 4.75V is reached When the heater resistor on the PCB is not in operation 12 16 bit with two least significant bits always zero 10 11 www.sensirion.com Version 1.2 – January 2019 3/7 3. Mechanical Specifications All dimensions are in millimeters (mm). 3.2 3.1 Mechanical fitting Fittings of the SFM3300 series sensors correspond to the international standard ISO5356-1:2004. Details about this type of connection can be found in the description of the standard. Dimension Length Diameter Flow channel Proximal medical cone Proximal medical socket Distal medical socket Distal medical cone Dead space Weight www.sensirion.com Mechanical / Electrical Interface SFM3300 series sensors have been designed for use in an proximal/expiratory environment. Therefore the sensor connector has been designed for an easy and reliable connection and disconnection. The connector itself is not provided as a standard product by Sensirion but Sensirion can help with an application note including design recommendations. Condition Inner Outer Inner Outer Version 1.2 – January 2019 Value 69.3 11.25 15 22 22 15