SFM3020

Preliminary Datasheet SFM3020 series Analog Mass Flow Meter Product Summary SFM3020 is Sensirion’s solution on providing high volumes of flow meters for medical ventilators in order to support the global pandemic situation due to the Corona virus outbreak. It relies on a modular approach of assembling approved parts with good availability to Sensirion and a high-volume through-put manufacturing. The housing geometry is based on the SFM3000 flow meter, hence it remains mechanically compatible to the SFM3000. A flow range from -10slm to +160slm and one directional flow supports high flow applications while still allowing to detect back flows. To minimize pressure-drop the SFM3020 is equipped with one mesh at the inlet. Disclaimer: The product is not fully qualified but the risk is deemed low as the processes and materials are already used in other products currently in production. Benefits of Sensirion’s CMOSens® Technology  Scalability  High reliability and long-term stability  Best signal-to-noise ratio   Industry-proven technology with a track record of more than 15 years Designed for mass production  High process capability Contents 1. Ordering Information .............................................. 2 2. Specifications ........................................................ 2 3. Pin Assignment ...................................................... 4 4. Package Outline .................................................... 6 5. Revision History ..................................................... 6 6. Important Notices................................................... 7 www.sensirion.com D1 Version 0.4 - April 2020 1/7 1. Ordering Information Use the part names and order number shown in the following table when ordering the SFM3020. For the latest product information and local distributors, visit www.sensirion.com. Part name Description Order number SFM3020-160-C -10 to 160slm range, with cap 3.000.401 2. Specifications 2.1. Flow Specification1 Parameter Condition Measurement range 2 Accuracy4,5 Repeatability5 Noise Level5 span(0..160slm) span(-10…0slm) zero point span zero point span zero point Span shift due to temperature variation SFM3020 Air/O2: -10 to 160 Max. Typ. ±3% ±2% ±5% ±3% 0.15 (max.) 0.05 (typ.) 1% 0.05 +1% 0.5% 0.06 Units slm3 m.v.6 m.v. slm m.v. slm m.v. slm < 0.5% of reading per 10°C Flow step response time (τ63) < 5ms Calibrated for Air Compensation formula O2 Air, N2, O2, non-condensing Media compatibility Pressure Drop @60slm @200slm One mesh version