DLP9500UVFLNCM

Product Folder Order Now Technical Documents Tools & Software Support & Community DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 DLP9500UV DLP® 0.95 UV 1080p 2x LVDS Type A DMD 1 Features • 1 • • • • • 0.95-Inch Diagonal Micromirror Array – 1920 × 1080 Array of Aluminum, MicrometerSized Mirrors (1080p Resolution) – 10.8-µm Micromirror Pitch – ±12° Micromirror Tilt Angle (Relative to Flat State) – Designed for Corner Illumination Designed for Use with UV Light (363 to 420 nm): – Window Transmission 98% (Single Pass, Through Two Window Surfaces) (Nominal) – Micromirror Reflectivity 88% (Nominal) – Array Diffraction Efficiency 85% (Nominal) – Array Fill Factor 92% (Nominal) Four 16-Bit, Low-Voltage Differential Signaling (LVDS), Double Data Rate (DDR) Input Data Buses Up to 400-MHz Input Data Clock Rate 42.2-mm × 42.2-mm × 7-mm Package Footprint Hermetic Package 2 Applications • • Industrial: – Direct Imaging Lithography – Laser Marking and Repair Systems – Computer to Plate Printers – Rapid Prototype Machines – 3D Printers Medical: – Opthalmology – Photo Therapy – Hyper-Spectral Imaging The DLP95000UV chipset is a new digital micromirror device (DMD) addition to the DLP® Discovery™ 4100 platform, which enables high resolution and high performance spatial light modulation beyond the visible spectrum into the UVA spectrum (363 nm to 420 nm). The DLP9500UV DMD is designed with a special window that is optimized for UV transmission. The DLP9500UV is the 0.95 1080p DMD, with a hermetic package, that is sold with a dedicated DLPC410 controller required for high speed pattern rates of >23000 Hz (1-bit binary) and >1700 Hz (8-bit gray), one unit DLPR410 (DLP Discovery 4100 Configuration PROM), and two units DLPA200 (DMD micromirror drivers). Refer to DLPC410, DLPA200, DLPR410, and DLP9500UV Functional Block Diagram. Reliable function and operation of the DLP9500UV requires that it be used in conjunction with the other components of the chipset. A dedicated chipset provides developers easier access to the DMD as well as high speed, independent micromirror control. DLP9500UV is a digitally controlled microelectromechanical system (MEMS) spatial light modulator (SLM). When coupled to an appropriate optical system, the DLP9500UV can be used to modulate the amplitude, direction, and/or phase of incoming light. Device Information PART NUMBER DLP9500UV PACKAGE LCCC (355) (1) BODY SIZE (NOM) 42.16 mm × 42.16 mm x 7.00 mm (1) For all available packages, see the orderable addendum at the end of the data sheet. Figure 1. Simplified Schematic LED Driver 3 Description DLP9500UV is a digitally controlled microelectromechanical system (MEMS) spatial light modulator (SLM). When coupled to an appropriate optical system, the DLP9500UV can be used to modulate the amplitude, direction, and/or phase of incoming light. DLP9500UV 1 An IMPORTANT NOTICE at the end of this data sheet addresses availability, warranty, changes, use in safety-critical applications, intellectual property matters and other important disclaimers. PRODUCTION DATA. DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Table of Contents 1 2 3 4 5 6 7 Features .................................................................. 1 Applications ........................................................... 1 Description ............................................................. 1 Revision History..................................................... 2 Description (continued)......................................... 4 Pin Configuration and Functions ......................... 4 Specifications....................................................... 13 7.1 7.2 7.3 7.4 7.5 7.6 7.7 7.8 7.9 7.10 7.11 7.12 7.13 8 Absolute Maximum Ratings .................................... 13 Storage Conditions.................................................. 13 ESD Ratings............................................................ 13 Recommended Operating Conditions..................... 14 Thermal Information ................................................ 15 Electrical Characteristics......................................... 15 LVDS Timing Requirements ................................... 16 LVDS Waveform Requirements.............................. 17 Serial Control Bus Timing Requirements................ 18 Systems Mounting Interface Loads....................... 19 Micromirror Array Physical Characteristics ........... 20 Micromirror Array Optical Characteristics ............. 21 Chipset Component Usage Specification ............. 22 Detailed Description ............................................ 23 8.1 Overview ................................................................. 23 8.2 Functional Block Diagram ....................................... 23 8.3 Feature Description................................................. 25 8.4 8.5 8.6 8.7 9 Device Functional Modes........................................ Window Characteristics and Optics ....................... Micromirror Array Temperature Calculation............ Micromirror Landed-On and Landed-Off Duty Cycle ........................................................................ 32 34 35 37 Application and Implementation ........................ 39 9.1 Application Information............................................ 39 9.2 Typical Application ................................................. 41 10 Power Supply Recommendations ..................... 43 10.1 Power-Up Sequence (Handled by the DLPC410) 43 10.2 DMD Power-Up and Power-Down Procedures..... 43 11 Layout................................................................... 44 11.1 Layout Guidelines ................................................. 44 11.2 Layout Example .................................................... 46 12 Device and Documentation Support ................. 47 12.1 12.2 12.3 12.4 12.5 12.6 12.7 Device Support .................................................... Documentation Support ........................................ Related Links ........................................................ Community Resources.......................................... Trademarks ........................................................... Electrostatic Discharge Caution ............................ Glossary ................................................................ 47 48 48 48 48 48 48 13 Mechanical, Packaging, and Orderable Information ........................................................... 48 4 Revision History Changes from Revision B (June 2015) to Revision C Page • Changed the name of Micromirror clocking pulse reset in Pin Functions ............................................................................ 11 • Changed TGRADIENT from 5°C to 10°C to accommodate increase in power density from 400 to 420 nm in Absolute Maximum Ratings ................................................................................................................................................................. 13 • Added RH name for relative humidity in Absolute Maximum Ratings.................................................................................. 13 • Clarified TGRADIENT footnote in Absolute Maximum Ratings .................................................................................................. 13 • Changed Tstg to TDMD in Storage Conditions to conform to current nomenclature ............................................................... 13 • Added Maximum illumination power values for 363 to 400 nm, 400 to 420 nm, and 363 to 420 nm total power values in Recommended Operating Conditions .................................................................................................................. 14 • Changed 363 to 420 nm to 363 to 400 nm max for 2.5 W/cm2 power density and 6 W max optical power in Recommended Operating Conditions .................................................................................................................................. 14 • Added 400 to 420 nm max power density of 11 W/cm2 and max optical power of 26.6 W ................................................ 14 • Added 363 to 420 nm total integrated max power density of 11 W/cm2 and total integrated max optical power of 26.6 W ................................................................................................................................................................................. 14 • Changed typical micromirror crossover time to the time required to transition from mirror position to the other in Micromirror Array Optical Characteristics ............................................................................................................................ 21 • Added typical micromirror switching time - 13 µs in Micromirror Array Optical Characteristics .......................................... 21 • Changed "Micromirror switching time" to "Array switching time" for clarity in Micromirror Array Optical Characteristics .... 21 • Added clarification to Micromirror switching time at 400 MHz with global reset in Micromirror Array Optical Characteristics ...................................................................................................................................................................... 21 • Corrected number of banks of DMD mirrors to 15 in Device Description ............................................................................ 42 • Removed link to DLP Discovery 4100 chipset datasheet in Related Documentation.......................................................... 48 • Added Related Links table.................................................................................................................................................... 48 2 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 Changes from Revision A (June 2015) to Revision B Page • Released full data sheet and updated device status to production data................................................................................ 1 • Added 7.00 mm measurement to BODY SIZE in Device Information. .................................................................................. 1 • Added environmental parameters to Absolute Maximum Ratings ...................................................................................... 13 • Moved VESD to ESD Ratings ................................................................................................................................................ 13 • Updated the MAX value of the illumination power density for >420 nm in Recommended Operating Conditions ............. 14 • Added new notes to Recommended Operating Conditions . .............................................................................................. 14 • Added new note to Thermal Information ............................................................................................................................. 15 • Replaced Figure 4. ............................................................................................................................................................... 18 • Changed units in Systems Mounting Interface Loads from lbs to N. .................................................................................. 19 • Added Chipset Component Usage Specification ................................................................................................................ 22 • Corrected 6.33 W to 6.83 W in TArray sample calculation .................................................................................................... 36 • Updated Figure 21 ............................................................................................................................................................... 43 • Removed Thermal Considerations ...................................................................................................................................... 46 Changes from Original (November 2014) to Revision A Page • Updated device status to product preview for release .......................................................................................................... 1 • Updated front page graphic ................................................................................................................................................... 1 • Added Community Resources ............................................................................................................................................. 48 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 3 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 5 Description (continued) Electrically, the DLP9500UV consists of a two-dimensional array of 1-bit CMOS memory cells, organized in a grid of 1920 memory cell columns by 1080 memory cell rows. The CMOS memory array is addressed on a row-byrow basis, over four 16-bit LVDS DDR buses. Addressing is handled by a serial control bus. The specific CMOS memory access protocol is handled by the DLPC410 digital controller. 6 Pin Configuration and Functions FLN Package 355-Pin LCCC Bottom View 31 29 27 25 23 21 19 17 15 13 11 9 7 5 3 1 30 28 26 24 22 20 18 16 14 12 10 8 6 4 2 B D F H K M P T A C E G J L N R U V Y AB AD AF AH AK W AA AC AE AG AJ AL 4 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 Pin Functions PIN (1) NO. TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) CLOCK D_AN(0) F2 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 512.01 D_AN(1) H8 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 158.79 D_AN(2) E5 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 471.24 D_AN(3) G9 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 159.33 D_AN(4) D2 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 585.41 D_AN(5) G3 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 551.17 D_AN(6) E11 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 229.41 D_AN(7) F8 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 300.54 D_AN(8) C9 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 346.35 D_AN(9) H2 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 782.27 D_AN(10) B10 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 451.52 D_AN(11) G15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 74.39 D_AN(12) D14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 194.26 D_AN(13) F14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A D_AN(14) C17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 244.9 D_AN(15) H16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 73.39 D_AP(0) F4 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 509.63 D_AP(1) H10 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 152.59 D_AP(2) E3 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 464.09 D_AP(3) G11 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 152.39 D_AP(4) D4 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 591.39 D_AP(5) G5 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 532.16 D_AP(6) E9 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 230.78 D_AP(7) F10 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 300.61 D_AP(8) C11 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 338.16 D_AP(9) H4 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 773.17 D_AP(10) B8 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 449.57 NAME DESCRIPTION TRACE (MILS) DATA BUS A (1) (2) (3) Input data bus A (2x LVDS) 148.29 The following power supplies are required to operate the DMD: VCC, VCC1, VCC2. VSS must also be connected. DDR = Double Data Rate. SDR = Single Data Rate. Refer to the LVDS Timing Requirements for specifications and relationships. Refer to Electrical Characteristics for differential termination specification. Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 5 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Pin Functions (continued) PIN (1) NAME NO. TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) CLOCK D_AP(11) H14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 71.7 D_AP(12) D16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 198.69 D_AP(13) F16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A D_AP(14) C15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 240.14 D_AP(15) G17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A 74.05 D_BN(0) AH2 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 525.25 D_BN(1) AD8 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 190.59 D_BN(2) AJ5 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 525.25 D_BN(3) AE3 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 494.91 D_BN(4) AG9 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 222.67 D_BN(5) AE11 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 205.45 D_BN(6) AH10 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 309.05 D_BN(7) AF10 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 285.62 D_BN(8) AK8 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 483.58 D_BN(9) AG5 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 711.58 D_BN(10) AL11 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 462.21 D_BN(11) AE15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 74.39 D_BN(12) AH14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B D_BN(13) AF14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 156 D_BN(14) AJ17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 247.9 D_BN(15) AD16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 111.52 D_BP(0) AH4 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 525.02 D_BP(1) AD10 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 190.61 D_BP(2) AJ3 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 524.22 D_BP(3) AE5 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 476.07 D_BP(4) AG11 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 222.8 D_BP(5) AE9 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 219.48 D_BP(6) AH8 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 306.55 D_BP(7) AF8 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 298.04 D_BP(8) AK10 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 480.31 DESCRIPTION Input data bus A (2x LVDS) TRACE (MILS) 143.72 DATA BUS B 6 Submit Documentation Feedback Input data bus B (2x LVDS) 194.26 Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 Pin Functions (continued) PIN (1) NAME NO. TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) D_BP(9) AG3 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 727.18 D_BP(10) AL9 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 461.02 D_BP(11) AD14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 71.35 D_BP(12) AH16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B D_BP(13) AF16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 150.38 D_BP(14) AJ15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 243.14 D_BP(15) AE17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B 113.36 D_CN(0) B14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 459.04 D_CN(1) E15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 342.79 D_CN(2) A17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 456.22 D_CN(3) G21 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 68.24 D_CN(4) B20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 362.61 D_CN(5) F20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 163.07 D_CN(6) D22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 204.16 D_CN(7) G23 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 105.59 D_CN(8) B26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 450.51 D_CN(9) F28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 302.04 D_CN(10) C29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C D_CN(11) G27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C D_CN(12) D26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 276.76 D_CN(13) H28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 186.78 D_CN(14) E29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 311.3 D_CN(15) J29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 262.62 D_CP(0) B16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 463.64 D_CP(1) E17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 347.65 D_CP(2) A15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 456.45 D_CP(3) H20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 67.72 D_CP(4) B22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 362.76 D_CP(5) F22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 161.69 CLOCK DESCRIPTION Input data bus B (2x LVDS) TRACE (MILS) 197.69 DATA BUS C Input data bus C (2x LVDS) 429.8 317.1 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 7 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Pin Functions (continued) PIN (1) NAME NO. TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) D_CP(6) D20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 195.09 D_CP(7) H22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 104.86 D_CP(8) B28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 451.41 D_CP(9) F26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 294.22 D_CP(10) C27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C D_CP(11) G29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C D_CP(12) D28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 276.04 D_CP(13) H26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 186.25 D_CP(14) E27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 312.07 D_CP(15) J27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C 262.94 D_DN(0) AK14 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 492.53 D_DN(1) AG15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 342.78 D_DN(2) AL17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 491.83 D_DN(3) AE21 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 74.24 D_DN(4) AK20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 356.23 D_DN(5) AF20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D D_DN(6) AH22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D D_DN(7) AE23 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 105.59 D_DN(8) AK26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 450.51 D_DN(9) AF28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 302.04 D_DN(10) AJ29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 429.8 D_DN(11) AE27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 298.87 CLOCK DESCRIPTION Input data bus C (2x LVDS) TRACE (MILS) 429.68 314.98 DATA BUS D 8 Submit Documentation Feedback Input data bus D (2x LVDS) 163.07 204.16 Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 Pin Functions (continued) PIN (1) NO. TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) D_DN(12) AH26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 276.76 D_DN(13) AD28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 186.78 D_DN(14) AG29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 311.3 D_DN(15) AC29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 262.62 D_DP(0) AK16 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 495.13 D_DP(1) AG17 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 342.47 D_DP(2) AL15 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 492.06 D_DP(3) AD20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 67.72 D_DP(4) AK22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 356.37 D_DP(5) AF22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D D_DP(6) AH20 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D D_DP(7) AD22 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 102.86 D_DP(8) AK28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 451.41 D_DP(9) AF26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 296.7 D_DP(10) AJ27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 429.68 D_DP(11) AE29 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 302.74 D_DP(12) AH28 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 276.04 D_DP(13) AD26 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 186.25 D_DP(14) AG27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 312.07 D_DP(15) AC27 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D 262.94 NAME CLOCK DESCRIPTION Input data bus D (2x LVDS) TRACE (MILS) 161.98 195.09 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 9 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Pin Functions (continued) PIN (1) NO. TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) CLOCK DCLK_AN D10 Input LVCMOS — Differentially terminated – 100 Ω — DCLK_AP D8 Input LVCMOS — Differentially terminated – 100 Ω — DCLK_BN AJ11 Input LVCMOS — Differentially terminated – 100 Ω — DCLK_BP AJ9 Input LVCMOS — Differentially terminated – 100 Ω — DCLK_CN C23 Input LVCMOS — Differentially terminated – 100 Ω — DCLK_CP C21 Input LVCMOS — Differentially terminated – 100 Ω — DCLK_DN AJ23 Input LVCMOS — Differentially terminated – 100 Ω — DCLK_DP AJ21 Input LVCMOS — Differentially terminated – 100 Ω — SCTRL_AN J3 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A SCTRL_AP J5 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_A SCTRL_BN AF4 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B SCTRL_BP AF2 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_B SCTRL_CN E23 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C SCTRL_CP E21 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_C SCTRL_DN AG23 Input LVCMOS DDR Differentially terminated – 100 Ω DCLK_D SCTRL_DP AG21 Input LVCMOS DDR Differentially terminated – 100 Ω NAME DESCRIPTION TRACE (MILS) DATA CLOCKS Input data bus A Clock (2x LVDS) Input data bus B Clock (2x LVDS) Input data bus C Clock (2x LVDS) Input data bus D Clock (2x LVDS) 325.8 319.9 318.92 318.74 252.01 241.18 252.01 241.18 DATA CONTROL INPUTS Serial control for data bus A (2x LVDS) 608.14 Serial control for data bus B (2x LVDS) 698.12 Serial control for data bus C (2x LVDS) 232.46 235.53 DCLK_D Serial control for data bus D (2x LVDS) 607.45 703.8 235.21 235.66 SERIAL COMMUNICATION AND CONFIGURATION SCPCLK AE1 Input LVCMOS — SCPDO AC3 Output LVCMOS — SCPDI AD2 Input LVCMOS — SCPEN AD4 Input LVCMOS PWRDN B4 Input MODE_A J1 MODE_B G1 10 pull-down — Serial port clock 324.26 SCP_CLK Serial port output 281.38 pull-down SCP_CLK Serial port input 261.55 — pull-down SCP_CLK Serial port enable 184.86 LVCMOS — pull-down — Device reset 458.78 Input LVCMOS — pull-down — LVCMOS — pull-down — Data bandwidth mode select 471.57 Input — Submit Documentation Feedback 521.99 Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 Pin Functions (continued) PIN NAME (1) NO. TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) CLOCK DESCRIPTION TRACE (MILS) MICROMIRROR CLOCKING PULSE (BIAS RESET) MBRST(0) L5 Input Analog — — — 898.97 MBRST(1) M28 Input Analog — — — 621.98 MBRST(2) P4 Input Analog — — — 846.88 MBRST(3) P30 Input Analog — — — 784.18 MBRST(4) L3 Input Analog — — — 763.34 MBRST(5) P28 Input Analog — — — 749.61 MBRST(6) P2 Input Analog — — — 878.25 MBRST(7) T28 Input Analog — — — 783.83 MBRST(8) M4 Input Analog — — — 969.36 MBRST(9) L29 Input Analog — — — 621.24 MBRST(10) T4 Input Analog — — — 918.43 MBRST(11) N29 Input Analog — — — MBRST(12) N3 Input Analog — — — MBRST(13) L27 Input Analog — — — MBRST(14) R3 Input Analog — — — MBRST(15) V28 Input Analog — — — MBRST(16) V4 Input Analog — — — MBRST(17) R29 Input Analog — — — MBRST(18) Y4 Input Analog — — — 715 MBRST(19) AA27 Input Analog — — — 604.35 MBRST(20) W3 Input Analog — — — 832.39 MBRST(21) W27 Input Analog — — — 675.21 MBRST(22) AA3 Input Analog — — — 861.18 MBRST(23) W29 Input Analog — — — 662.66 MBRST(24) U5 Input Analog — — — 850.06 MBRST(25) U29 Input Analog — — — 726.56 MBRST(26) Y2 Input Analog — — — 861.48 MBRST(27) AA29 Input Analog — — — 683.83 MBRST(28) U3 Input Analog — — — 878.5 MBRST(29) Y30 Input Analog — — — 789.2 Power Analog — — — Power for LVCMOS logic — Power Analog — — — Power supply for LVDS Interface — 685.14 Micromirror clocking pulse reset MBRST signals clock micromirrors into state of LVCMOS memory cell associated with each mirror. 812.31 591.89 878.5 660.15 848.64 796.31 POWER A3, A5, A7, A9, A11, A13, A21, A23, A25, A27, A29, B2, VCC C1, C31, E31, G31, J31, K2, L31, N31, R31, U31, W31, AA31, AC1, AC31, AE31, AG1, AG31, AJ31, AK2, AK30, AL3, AL5, AL7, AL19, AL21, AL23, AL25, AL27 VCCI H6, H12, H18, H24, M6, M26, P6, P26, T6, T26, V6, V26, Y6, Y26, AD6, AD12, AD18, AD24 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 11 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Pin Functions (continued) PIN (1) NAME NO. L1, N1, R1, U1, W1, AA1 VCC2 TYPE (I/O/P) SIGNAL DATA RATE (2) INTERNAL TERM (3) CLOCK Power Analog — — — Power for high voltage CMOS logic — Power Analog — — — Common return for all power inputs — DESCRIPTION TRACE (MILS) A1, B12, B18, B24, B30, C7, C13, C19, C25, D6, D12, D18, D24, D30, E1, E7, E13, E19, E25, F6, F12, F18, F24, F30, G7, G13, G19, G25, K4, K6, K26, K28, K30, M2, M30, N5, N27, R5, T2, T30, U27, V2, V30, W5, Y28, AB2, AB4, VSS AB6, AB26, AB28, AB30, AD30, AE7, AE13, AE19, AE25, AF6, AF12, AF18, AF24, AF30, AG7, AG13, AG19, AG25, AH6, AH12, AH18, AH24, AH30, AJ1, AJ7, AJ13, AJ19, AJ25, AK6, AK12, AK18, AL29 RESERVED SIGNALS (NOT FOR USE IN SYSTEM) RESERVED_FC J7 Input LVCMOS — pull-down — RESERVED_FD J9 Input LVCMOS — pull-down — RESERVED_PFE J11 Input LVCMOS — pull-down — RESERVED_STM AC7 Input LVCMOS — pull-down — — RESERVED_AE C3 Input LVCMOS — pull-down — — A19, B6, C5, H30, J13, J15, J17, J19, J21, J23, J25, R27, NO_CONNECT AA5, AC11, AC13, AC15, AC17, AC19, AC21, AC23, — — — — — — — Pins should be connected to VSS No connection (any connection to these terminals may result in undesirable effects) — — AC25, AC5, AC9, AK24, AK4, AL13 12 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 7 Specifications 7.1 Absolute Maximum Ratings over operating free-air temperature (unless otherwise noted). (1) MIN MAX UNIT ELECTRICAL VCC Voltage applied to VCC (2) (3) –0.5 4 V VCCI Voltage applied to VCCI (2) (3) –0.5 4 V VCC2 Voltage applied to VVCC2 –0.5 9 V VMBRST Clocking pulse waveform voltage applied to MBRST[29:0] input pins (supplied by DLPA200s) –28 28 V 0.3 V |VCC – VCCI| (2) (3) (4) Supply voltage delta (absolute value) (4) Voltage applied to all other input terminals |VID| (2) VCC + 0.3 V Maximum differential voltage, damage can occur to internal termination resistor if exceeded, see Figure 3 –0.5 700 mV Current required from a high-level output, VOH = 2.4 V –20 mA Current required from a low-level output, VOL = 0.4 V 15 mA 20 30 °C –40 80 °C ENVIRONMENTAL Case temperature – operational TC (5) Case temperature – non-operational (5) TGRADIENT Device temperature gradient – operational RH Relative humidity (non-condensing) (1) (2) (3) (4) (5) (6) (6) 10 °C 95 %RH Stresses beyond those listed under Recommended Operating Conditions may cause permanent damage to the device. These are stress ratings only, which do not imply functional operation of the device at these or any other conditions beyond those indicated under Recommended Operating Conditions. Exposure to absolute-maximum-rated conditions for extended periods may affect device reliability. All voltages referenced to VSS (ground). Voltages VCC, VCCI, and VCC2 are required for proper DMD operation. Exceeding the recommended allowable absolute voltage difference between VCC and VCCI may result in excess current draw. The difference between VCC and VCCI, |VCC – VCCI|, should be less than the specified limit. DMD Temperature is the worst-case of any test point shown in Case Temperature, or the active array as calculated by the Micromirror Array Temperature Calculation. As either measured, predicted, or both between any two points - measured on the exterior of the package, or as predicted at any point inside the micromirror array cavity. Refer to Case Temperature and Micromirror Array Temperature Calculation. 7.2 Storage Conditions applicable before the DMD is installed in the final product TDMD Storage temperature RH Storage humidity (non-condensing) MIN MAX –40 80 UNIT °C 95 %RH 7.3 ESD Ratings VALUE VESD (1) Electrostatic discharge Human body model (HBM), per ANSI/ESDA/JEDEC JS-001 (1) All pins except MBRST[29:0] ±2000 MBRST[29:0] pins ±250 UNIT V JEDEC document JEP155 states that 500-V HBM allows safe manufacturing with a standard ESD control process. Manufacturing with less than 500-V HBM is possible if necessary precautions are taken. Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 13 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 7.4 Recommended Operating Conditions over operating free-air temperature range (unless otherwise noted). (1) MIN NOM MAX UNIT 3 3.3 3.6 V 3 3.3 3.6 V 8.25 8.5 8.75 V 26.5 V 1334 N 156 N 712 N ELECTRICAL VCC LVCMOS interface supply voltage (2) (3) (2) (3) VCCI LVCMOS logic supply voltage VCC2 Mirror electrode and HVCMOS supply voltage VMBRST Clocking pulse waveform voltage applied to MBRST[29:0] input pins (supplied by DLPA200s) (2) (3) –27 MECHANICAL Static load applied to electrical interface area, see (4) Static load applied to the thermal interface area, see Figure 6 (5) Figure 6 Static load applied to Datum 'A' interface area Figure 6 ENVIRONMENTAL (6) < 363 nm (8) 2 2.5 363 to 400 nm (9) Illumination power density (7) 400 to 420 nm (9) 6 W W/cm2 11 (9) (10) 26.6 > 420 nm (11) (12) TC Case/Array Temperature TGRADIENT Device temperature gradient RH Relative humidity (non-condensing) Operating landed duty cycle (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) (14) (15) (16) 14 Thermally limited (14) (15) (16) (9) 30 (13) 20 W/cm2 11 26.6 363 to 420 nm total mW/cm2 W W/cm2 W W/cm2 °C 10 °C 95 %RH 25% The functional performance of the device specified in this data sheet is achieved when operating the device within the limits defined by the Recommended Operating Conditions. No level of performance is implied when operating the device above or below the Recommended Operating Conditions limits. All voltages referenced to VSS (ground). Voltages VCC, VCC2, and VCCI,are required for proper DMD operation. VSS must also be connected. Load should be uniformly distributed across the entire electrical interface area. Load should be uniformly distributed across thermal interface area. Refer to Figure 6. Optimal, long-term performance and optical efficiency of the Digital Micromirror Device (DMD) can be affected by various application parameters, including illumination spectrum, illumination power density, micromirror landed duty-cycle, ambient temperature (storage and operating), DMD temperature, ambient humidity (storage and operating), and power on or off duty cycle. TI recommends that application-specific effects be considered as early as possible in the design cycle. Total integrated illumination power density, above or below the indicated wavelength threshold or in the indicated wavelength range. The maximum operating conditions for operating temperature and illumination power density for wavelengths < 363nm should not be implemented simultaneously. Also limited by the resulting micromirror array temperature. Refer to Case Temperature and Micromirror Array Temperature Calculation for information related to calculating the micromirror array temperature. The total integrated illumination power density from 363 to 420 nm shall not exceed 11 W/cm2 (or 26.6 W evenly distributed on the active array area). Therefore if 2.5 W/cm2 of illumination is used in the 363 to 400 nm range, then illumination in the 400 to 420 nm range must be limited to 8.5 W/cm2. In some applications, the total DMD heat load can be dominated by the amount of incident light energy absorbed. See Micromirror Array Temperature Calculation for further details. Temperature is the highest measured value of any test point shown in Figure 18 or the active array as calculated by the Micromirror Array Temperature Calculation. See the Micromirror Array Temperature Calculation for thermal test point locations, package thermal resistance, and device temperature calculation. As either measured, predicted, or both between any two points - measured on the exterior of the package, or as predicted at any point inside the micromirror array cavity. Refer to Case Temperature and Micromirror Array Temperature Calculation. Various application parameters can affect optimal, long-term performance of the DMD, including illumination spectrum, illumination power density, micromirror landed duty cycle, ambient temperature (both storage and operating), case temperature, and power-on or power-off duty cycle. TI recommends that application-specific effects be considered as early as possible in the design cycle. Contact your local TI representative for additional information related to optimizing the DMD performance. Landed duty cycle refers to the percentage of time an individual micromirror spends landed in one state (12° or –12°) versus the other state (–12° or 12°). Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 7.5 Thermal Information DLP9500UV THERMAL METRIC (1) (2) FLN (LCCC) UNIT 355 PINS Active micromirror array resistance to TP1 (1) (2) 0.5 °C/W The DMD is designed to conduct absorbed and dissipated heat to the back of the package where it can be removed by an appropriate heat sink. The heat sink and cooling system must be capable of maintaining the package within the temperature range specified in the Recommended Operating Conditions. The total heat load on the DMD is largely driven by the incident light absorbed by the active area; although other contributions include light energy absorbed by the window aperture and electrical power dissipation of the array. Optical systems should be designed to minimize the light energy falling outside the window clear aperture since any additional thermal load in this area can significantly degrade the reliability of the device. For more information about traditional and new thermal metrics, see the Semiconductor and IC Package Thermal Metrics application report, SPRA953. 7.6 Electrical Characteristics over the range of recommended supply voltage and recommended case operating temperature (unless otherwise noted); under recommended operating conditions PARAMETER TEST CONDITIONS (1) VOH High-level output voltage See Figure 11 Low-level output voltage See Figure 11 (1) VOL VMBRST Clocking pulse waveform applied to MBRST[29:0] input pins (supplied by DLPA200s) IOZ High-impedance output current IOH IOL , VCC = 3 V, IOH = –20 mA , High-level output current (1) Low-level output current (1) MIN –27 VCC = 3.6 V V 10 µA –15 VOL = 0.4 V, VCC ≥ 3 V 15 VOL = 0.4 V, VCC ≥ 2.25 V 14 Low-level input voltage IIL Low-level input current (1) IIH High-level input current ICC Current into VCC pin ICCI Current into VOFFSET pin ICC2 Current into VCC2 pin PD Power dissipation ZIN Internal differential impedance 95 ZLINE Line differential impedance (PWB, trace) 90 VCC + 0.3 1.7 –0.3 VCC = 3.6 V, VI = 0 V VCC = 3.6 V, VI = VCC (1) Input capacitance CO Output capacitance CIM Input capacitance for MBRST[29:0] pins (1) mA mA V 0.7 V –60 µA 60 µA VCC = 3.6 V, 2990 mA VCCI = 3.6 V 910 mA 25 mA VCC2 = 8.75 V 4.4 CI (1) (2) 26.5 VOH = 1.7 V, VCC ≥ 2.25 V VIL (2) V –20 (1) (1) 0.4 VOH = 2.4 V, VCC ≥ 3 V (1) UNIT V VCC = 3.6 V, IOH = 15 mA (1) MAX 2.4 High-level input voltage VIH TYP W 105 Ω 110 Ω ƒ = 1 MHz 10 pF ƒ = 1 MHz 10 pF 355 pF ƒ = 1 MHz 270 100 Applies to LVCMOS pins only. Exceeding the maximum allowable absolute voltage difference between VCC and VCCI may result in excess current draw (See Absolute Maximum Ratings for details). Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 15 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 7.7 LVDS Timing Requirements over operating free-air temperature range (unless otherwise noted); see Figure 2 MIN ƒDCLK_x DCLK_x clock frequency (where x = [A, B, C, or D]) 200 tc Clock cycle - DLCK_x 2.5 tw Pulse duration - DLCK_x ts Setup time - D_x[15:0] and SCTRL_x before DCLK_x th Hold time, D_x[15:0] and SCTRL_x after DCLK_x tskew Skew between any two buses (A ,B, C, and D) NOM MAX UNIT 400 MHz ns 1.25 ns 0.35 ns 0.35 –1.25 ns 1.25 ns DCLK_AN DCLK_AP th tw tw tc ts ts th SCTRL_AN SCTRL_AP tskew D_AN(15:0) D_AP(15:0) DCLK_BN DCLK_BP tw tw ts th tc ts th SCTRL_BN SCTRL_BP D_BN(15:0) D_BP(15:0) tw DCLK_CN DCLK_CP ts th tw tc ts th SCTRL_CN SCTRL_CP tskew D_CN(15:0) D_CP(15:0) DCLK_DN DCLK_DP tw tw ts th tc th ts SCTRL_DN SCTRL_DP D_DN(15:0) D_DP(15:0) Figure 2. LVDS Timing Waveforms 16 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 7.8 LVDS Waveform Requirements over operating free-air temperature range (unless otherwise noted); see Figure 3 MIN |VID| Input differential voltage (absolute difference) VCM Common mode voltage VLVDS LVDS voltage tr tr 100 NOM MAX UNIT 400 600 mV 1200 mV 0 2000 mV Rise time (20% to 80%) 100 400 ps Fall time (80% to 20%) 100 400 ps V LVDS max = V CM max + | 1/2 × VID max | tf VID V CM tr VLVDS min = V CM min ± | 1/2 × VID max | Figure 3. LVDS Waveform Requirements Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 17 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 7.9 Serial Control Bus Timing Requirements over operating free-air temperature range (unless otherwise noted); see Figure 4 and Figure 5 MIN NOM MAX UNIT 50 500 kHz –300 300 ns 960 ns ƒSCP_CLK SCP clock frequency tSCP_SKEW Time between valid SCP_DI and rising edge of SCP_CLK tSCP_DELAY Time between valid SCP_DO and rising edge of SCP_CLK t SCP_EN Time between falling edge of SCP_EN and the first rising edge of SCP_CLK t_SCP Rise time for SCP signals 200 ns tƒ_SCP Fall time for SCP signals 200 ns tc SCPCLK 30 ns fclock = 1 / tc 50% 50% tSCP_SKEW SCPDI 50% tSCP_DELAY SCPD0 50% Figure 4. Serial Communications Bus Timing Parameters tr_SCP tf_SCP Input Controller VCC SCP_CLK, SCP_DI, SCP_EN VCC/2 0v Figure 5. Serial Communications Bus Waveform Requirements 18 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 7.10 Systems Mounting Interface Loads PARAMETER Maximum system mounting interface load to be applied to the: MAX UNIT Thermal interface area (see Figure 6) MIN NOM 156 N Electrical interface area (see Figure 6) 1334 N Datum A Interface area (see Figure 6) 712 N Thermal Interface Area Electrical Interface Area Other Area Datum ‘A’ Areas Figure 6. System Interface Loads Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 19 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 7.11 Micromirror Array Physical Characteristics See Mechanical, Packaging, and Orderable Information for additional details. M Number of active micromirror columns N Number of active micromirror rows P Micromirror (pixel) pitch 1920 micromirrors 1080 micromirrors (1) (1) Micromirror active array height (1) (1) (2) 10.8 µm M×P 20.736 mm N×P 11.664 mm 10 micromirrors/side Pond of micromirrors (POM) M±4 M±3 M±2 M±1 See Figure 7. The structure and qualities of the border around the active array includes a band of partially functional micromirrors called the POM. These micromirrors are structurally and/or electrically prevented from tilting toward the bright or ON state, but still require an electrical bias to tilt toward OFF. 0 1 2 3 (1) (2) UNIT (1) Micromirror active array width Micromirror array border VALUE (1) 0 1 2 3 DMD Active Array NxP M x N Micromirrors N±4 N±3 N±2 N±1 MxP P Border micromirrors omitted for clarity. Details omitted for clarity. P Not to scale. P P Refer to the Micromirror Array Physical Characteristics table for M, N, and P specifications. Figure 7. Micromirror Array Physical Characteristics 20 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 7.12 Micromirror Array Optical Characteristics TI assumes no responsibility for end-equipment optical performance. Achieving the desired end-equipment optical performance involves making trade-offs between numerous component and system design parameters. See the related application reports (listed in Related Documentation) for guidelines. PARAMETER a Micromirror tilt angle β Micromirror tilt angle variation Micromirror crossover time (9) Micromirror switching time (10) TEST CONDITIONS (1) (4) (6) (7) (8) (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) 0 DMD landed state See Figure 13 (1) (4) (5) 12 , –1 MAX 1 13 (11) 22 0 44 µs µs 10 Adjacent micromirrors See Figure 13 degrees µs 56 Non-adjacent micromirrors (13) UNIT degrees 3 (12) Orientation of the micromirror axis-of-rotation TYP (1) (2) (3) See Figure 13 Array switching time at 400 MHz with global reset Non-operating micromirrors MIN DMD parked state See Figure 13 45 46 micromirrors degrees Measured relative to the plane formed by the overall micromirror array. Parking the micromirror array returns all of the micromirrors to an essentially flat (0˚) state (as measured relative to the plane formed by the overall micromirror array). When the micromirror array is parked, the tilt angle of each individual micromirror is uncontrolled. Additional variation exists between the micromirror array and the package datums, as shown in Mechanical, Packaging, and Orderable Information. When the micromirror array is landed, the tilt angle of each individual micromirror is dictated by the binary contents of the CMOS memory cell associated with each individual micromirror. A binary value of 1 results in a micromirror landing in an nominal angular position of +12°. A binary value of 0 results in a micromirror landing in an nominal angular position of –12°. Represents the landed tilt angle variation relative to the nominal landed tilt angle. Represents the variation that can occur between any two individual micromirrors, located on the same device or located on different devices. For some applications, it is critical to account for the micromirror tilt angle variation in the overall system optical design. With some system optical designs, the micromirror tilt angle variation within a device may result in perceivable non-uniformities in the light field reflected from the micromirror array. With some system optical designs, the micromirror tilt angle variation between devices may result in colorimetry variations and/or system contrast variation. Micromirror crossover time is the transition time from landed to landed during a crossover transition and primarily a function of the natural response time of the micromirrors. Micromirror switching time is the time after a micromirror clocking pulse until the micromirrors can be addressed again. It included the micromirror settling time. Array switching is controlled and coordinated by the DLPC410 (DLPS024) and DLPA200 (DLPS015). Nominal switching time depends on the system implementation and represents the time for the entire micromirror array to be refreshed (array loaded plus reset and mirror settling time). Non-operating micromirror is defined as a micromirror that is unable to transition nominally from the –12° position to +12° or vice versa. Measured relative to the package datums 'B' and 'C', shown in the Mechanical, Packaging, and Orderable Information. Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 21 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Micromirror Array Optical Characteristics (continued) TI assumes no responsibility for end-equipment optical performance. Achieving the desired end-equipment optical performance involves making trade-offs between numerous component and system design parameters. See the related application reports (listed in Related Documentation) for guidelines. PARAMETER Micromirror array optical efficiency TEST CONDITIONS (14) (15) 363 to 420 nm, with all micromirrors in the ON state Window material Window artifact size MIN TYP MAX UNIT 68% Corning 7056 Within the window aperture 400 (16) Window aperture See µm (17) (14) The minimum or maximum DMD optical efficiency observed in a specific application depends on numerous application-specific design variables, such as: (a) Illumination wavelength, bandwidth/line-width, degree of coherence (b) Illumination angle, plus angle tolerance (c) Illumination and projection aperture size, and location in the system optical path (d) Illumination overfill of the DMD micromirror array (e) Aberrations present in the illumination source and/or path (f) Aberrations present in the projection path The specified nominal DMD optical efficiency is based on the following use conditions: (a) UV illumination (363 to 420 nm) (b) Input illumination optical axis oriented at 24° relative to the window normal (c) Projection optical axis oriented at 0° relative to the window normal (d) ƒ / 3.0 illumination aperture (e) ƒ / 2.4 projection aperture Based on these use conditions, the nominal DMD optical efficiency results from the following four components: (a) Micromirror array fill factor: nominally 92% (b) Micromirror array diffraction efficiency: nominally 85% (c) Micromirror surface reflectivity: nominally 88% (d) Window transmission: nominally 98% (single pass, through two surface transitions) (15) Does not account for the effect of micromirror switching duty cycle, which is application dependent. Micromirror switching duty cycle represents the percentage of time that the micromirror is actually reflecting light from the optical illumination path to the optical projection path. This duty cycle depends on the illumination aperture size, the projection aperture size, and the micromirror array update rate. (16) Refers only to non-cleanable artifacts. See the DMD S4xx Glass Cleaning Procedure (DLPA025) and DMD S4xx Handling Specifications (DLPA014) for recommended handling and cleaning processes. (17) See Mechanical, Packaging, and Orderable Information for details regarding the size and location of the window aperture. 7.13 Chipset Component Usage Specification The DLP9500UV is a component of one or more DLP chipsets. Reliable function and operation of the DLP9500UV requires that it be used in conjunction with the other components of the applicable DLP chipset, including those components that contain or implement TI DMD control technology. TI DMD control technology is the TI technology and devices for operating or controlling a DLP DMD. 22 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 8 Detailed Description 8.1 Overview Optically, the DLP9500UV consists of 2,073,600 highly reflective, digitally switchable, micrometer-sized mirrors (micromirrors), organized in a two-dimensional array of 1920 micromirror columns by 1080 micromirror rows. Each aluminum micromirror is approximately 10.8 microns in size (see the Micromirror Pitch in Figure 12) and is switchable between two discrete angular positions: –12° and 12°. The angular positions are measured relative to a 0° flat state, which is parallel to the array plane (see Figure 13). The tilt direction is perpendicular to the hingeaxis, which is positioned diagonally relative to the overall array. The On State landed position is directed toward row 0, column 0 (upper left) corner of the device package (see the Micromirror Hinge-Axis Orientation in Figure 12). In the field of visual displays, the 1920 × 1080 pixel resolution is referred to as 1080p. Each individual micromirror is positioned over a corresponding CMOS memory cell. The angular position of a specific micromirror is determined by the binary state (logic 0 or 1) of the corresponding CMOS memory cell contents, after the mirror clocking pulse is applied. The angular position (–12° or +12°) of the individual micromirrors changes synchronously with a micromirror clocking pulse, rather than being synchronous with the CMOS memory cell data update. Therefore, writing a logic 1 into a memory cell followed by a mirror clocking pulse will result in the corresponding micromirror switching to a 12° position. Writing a logic 0 into a memory cell followed by a mirror clocking pulse will result in the corresponding micromirror switching to a –12° position. Updating the angular position of the micromirror array consists of two steps. First, updating the contents of the CMOS memory. Second, application of a micromirror clocking pulse to all or a portion of the micromirror array (depending upon the configuration of the system). Micromirror clocking pulses are generated externally by two DLPA200s, with application of the pulses being coordinated by the DLPC410 controller. Around the perimeter of the 1920 by 1080 array of micromirrors is a uniform band of border micromirrors. The border micromirrors are not user-addressable. The border micromirrors land in the –12° position once power has been applied to the device. There are 10 border micromirrors on each side of the 1920 by 1080 active array. Figure 8 shows a DLPC410 and DLP9500UV chipset block diagram. The DLPC410 and DLPA200s control and coordinate the data loading and micromirror switching for reliable DLP9500UV operation. The DLPR410 is the programmed PROM required to properly configure the DLPC410 controller. For more information on the chipset components, see Application and Implementation. For a typical system application using the DLP Discovery 4100 chipset including a DLP9500UV, see Figure 20. 8.2 Functional Block Diagram Figure 8 shows a simplified system block diagram with the use of the DLPC410 with the following chipset components: DLPC410 Xilinx [XC5VLX30] FPGA configured to provide high-speed DMD data and control, and DLPA200 timing and control DLPR410 [XCF16PFSG48C] serial flash PROM contains startup configuration information (EEPROM) DLPA200 Two DMD micromirror drivers for the DLP9500UV DMD DLP9500UV Spatial light modulator (DMD) Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 23 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com DLPC410 PWR_FLOAT ROWMD(1:0) ROWAD(10:0) RST2BLKZ BLKMD(1:0) BLKAD(10:0) ECP2_FINISHED DMD_TYPE(3:0) Bank A Input Bank B Input Bank C Input DDC_DCLKOUT_C DDC_SCTRL_C Bank B Input DDC_DOUT_C(15:0) DDC_DCLKOUT_D DDC_SCTRL_D DDC_DOUT_D(15:0) DMD SCP SCPCLK SCPDO SCPDI DMD_A_SCPENZ DMD_B_SCPENZ DAD_A_SCPENZ DAD_B_SCPENZ DLPA200 DAD_A_STROBE DAD_A_MODE(1:0) DAD_A_SEL(1:0) DAD_A_ADDR(3:0) A MBRST1_(15:0) DAD_OEZ DAD_INIT PROM_CCK_DDC PROGB_DDC INTB_DDC RDWR_B_0 TDO_XCF16DDC TCK_JTAG TCK_JTAG TDO_DDC DDC_M(2:0) ECP2_M_TP(31:0) DAD_B_STROBE DAD_B_MODE(1:0) DAD_B_SEL(1:0) DAD_B_ADDR(3:0) B MBRST2_(15:0) JTAG Interface HSWAPEN_0 DLPA200 Resets Side 2 DONE_DDC Resets PROM_DO_DDC CS_B_0 JTAG Header DDC_DOUT_B(15:0) DAD B SCP JTAG Interface DLPR410 TDI_JTAG Program Interface DDC_VERSION(2:0) Program Interface Info Input INIT_ACTIVE Info Output RST_ACTIVE Serial Data Bus WDT_ENBLZ DAD A Output STEPVCC DAD B Output Control Signals Output NS_FLIP Control Signals Input COMP_DATA DDC_SCTRL_B Resets Side 1 DDC_DIN_D(15:0) DDC_DCLKOUT_B Resets DVALID_D DDC_DOUT_A(15:0) DAD A SCP DDC_DCLK_D DDC_SCTRL_A DAD B Input Bank D Output DDC_DIN_C(15:0) DDC_DCLKOUT_A DAD A Input DVALID_C Bank A Output DDC_DCLK_C Bank B Output Bank C Output DDC_DIN_B(15:0) Bank C Output DVALID_B Bank B Output DDC_DCLK_B Bank A Input Bank B Output DDC_DIN_A(15:0) Bank B Input DVALID_A Bank C Input DDC_DCLK_A DLP9500UV = LVDS Bus Bank D Input Bank A Output USER INTERFACE VLED0 VLED1 ARSTZ OSC 50 Mhz PWRDN DDCSPARE(1:0) DMD_A_RESET CLKIN_R Figure 8. DLPC410, DLPA200, DLPR410, and DLP9500UV Functional Block Diagram 24 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 8.3 Feature Description Table 1. DMD Overview (1) DMD ARRAY DLP9500UV - 0.95" 1080p 1920 × 1080 SINGLE BLOCK MODE (Patterns/s) 23148 GLOBAL RESET MODE (Patterns/s) DATA RATE (Giga Pixels/s) MIRROR PITCH 17857 48 10.8 μm (1) This is for single block mode resets. 8.3.1 DLPC410 - Digital Controller for DLP Discovery 4100 Chipset The DLPC410 chipset includes the DLPC410 controller which provides a high-speed LVDS data and control interface for DMD control. This interface is also connected to a second FPGA used to drive applications (not included in the chipset). The DLPC410 generates DMD and DLPA200 initialization and control signals in response to the inputs on the control interface. For more information, see the DLPC410 data sheet (DLPS024). 8.3.2 DLPA200 - DMD Micromirror Drivers DLPA200 micromirror drivers provide the micromirror clocking pulse driver functions for the DMD. Two drivers are required for DLP9500UV. The DLPA200 is designed to work with multiple DLP chipsets. Although the DLPA200 contains 16 MBSRT output pins, only 15 lines are used with the DLP9500 chipset. For more information see and the DLPA200 data sheet (DLPS015). 8.3.3 DLPR410 - PROM for DLP Discovery 4100 Chipset The DLPC410 controller is configured at startup from the DLPR410 PROM. The contents of this PROM can not be altered. For more information, see the DLPR410 data sheet (DLPS027) the DLPC410 data sheet (DLPS024). 8.3.4 DLP9500 - DLP 0.95 1080p 2xLVDS UV Type-A DMD 1080p DMD 8.3.4.1 DLP9500UV 1080p Chipset Interfaces This section will describe the interface between the different components included in the chipset. For more information on component interfacing, see Application and Implementation. 8.3.4.1.1 DLPC410 Interface Description 8.3.4.1.1.1 DLPC410 IO Table 2 describes the inputs and outputs of the DLPC410 to the user. For more details on these signals, see the DLPC410 data sheet (DLPS024). Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 25 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Table 2. Input/Output Description PIN NAME DESCRIPTION I/O ARST Asynchronous active low reset I CLKIN_R Reference clock, 50 MHz I DIN_[A,B,C,D](15:0) LVDS DDR input for data bus A,B,C,D (15:0) I DCLKIN[A,B,C,D] LVDS inputs for data clock (200 - 400 MHz) on bus A, B, C, and D I DVALID[A,B,C,D] LVDS input used to start write sequence for bus A, B, C, and D I ROWMD(1:0) DMD row address and row counter control I ROWAD(10:0) DMD row address pointer I BLK_AD(3:0) DMD mirror block address pointer I BLK_MD(1:0) DMD mirror block reset and clear command modes I PWR_FLOAT Used to float DMD mirrors before complete loss of power I DMD_TYPE(3:0) DMD type in use O RST_ACTIVE Indicates DMD mirror reset in progress O INIT_ACTIVE Initialization in progress. O VLED0 System “heartbeat” signal O VLED1 Denotes initialization complete O 8.3.4.1.1.2 Initialization The INIT_ACTIVE (Table 2) signal indicates that the DLP9500UV, DLPA200s, and DLPC410 are in an initialization state after power is applied. During this initialization period, the DLPC410 is initializing the DLP9500UV and DLPA200s by setting all internal registers to their correct states. When this signal goes low, the system has completed initialization. System initialization takes approximately 220 ms to complete. Data and command write cycles should not be asserted during the initialization. During initialization the user must send a training pattern to the DLPC410 on all data and DVALID lines to correctly align the data inputs to the data clock. For more information, see the interface training pattern information in the DLPC410 data sheet. 8.3.4.1.1.3 DMD Device Detection The DLPC410 automatically detects the DMD type and device ID. DMD_TYPE (Table 2) is an output from the DLPC410 that contains the DMD information. 8.3.4.1.1.4 Power Down To ensure long term reliability of the DLP9500UV, a shutdown procedure must be executed. Prior to power removal, assert the PWR_FLOAT (Table 2) signal and allow approximately 300 µs for the procedure to complete. This procedure assures the mirrors are in a flat state. 8.3.4.1.2 DLPC410 to DMD Interface 8.3.4.1.2.1 DLPC410 to DMD IO Description Table 3 lists the available controls and status pin names and their corresponding signal type, along with a brief functional description. Table 3. DLPC410 to DMD I/O Pin Descriptions PIN NAME DESCRIPTION I/O DDC_DOUT_[A,B,C,D](15:0) LVDS DDR output to DMD data bus A,B,C,D (15:0) O DDC_DCLKOUT_[A,B,C,D] LVDS output to DMD data clock A,B,C,D O DDC_SCTRL_[A,B,C,D] LVDS DDR output to DMD data control A,B,C,D O 26 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 8.3.4.1.2.2 Data Flow Figure 9 shows the data traffic through the DLPC410. Special considerations are necessary when laying out the DLPC410 to allow best signal flow. LVDS BUS A sDIN_A(15:0) sDCLK_A sDVALID_A LVDS BUS B sDIN_B(15:0) sDCLK_B sDVALID_B LVDS BUS D LVDS BUS C sDIN_D(15:0) sDCLK_D sDVALID_D sDIN_C(15:0) sDCLK_C sDVALID_C DLPC410 LVDS BUS D LVDS BUS A sDOUT_D(15:0) sDCLKOUT_D sSCTRL_D sDOUT_A(15:0) sDCLKOUT_A sSCTRL_A LVDS BUS C sDOUT_C(15:0) sDCLKOUT_C sSCTRL_C LVDS BUS B sDIN_B(15:0) sDCLK_B sDVALID_B Figure 9. DLPC410 Data Flow Four LVDS buses transfer the data from the user to the DLPC410. Each bus has its data clock that is input edge aligned with the data (DCLK). Each bus also has its own validation signal that qualifies the data input to the DLPC410 (DVALID). Output LVDS buses transfer data from the DLPC410 to the DMD. Output buses LVDS C and LVDS D are used in addition to LVDS A and LVDS B with the DLP9500UV. 8.3.4.1.3 DLPC410 to DLPA200 Interface 8.3.4.1.3.1 DLPA200 Operation The DLPA200 DMD micromirror driver is a mixed-signal application-specific integrated circuit (ASIC) that combines the necessary high-voltage power supply generation and micromirror clocking pulse functions for a family of DMDs. The DLPA200 is programmable and controllable to meet all current and anticipated DMD requirements. The DLPA200 operates from a 12-V power supply input. For more detailed information on the DLPA200, see the DLPA200 data sheet. Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 27 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 8.3.4.1.3.2 DLPC410 to DLPA200 IO Description The serial communications port (SCP) is a full duplex, synchronous, character-oriented (byte) port that allows exchange of commands from the DLPC410 to the DLPA200s. DLPA200 SCP bus DLPC410 SCP bus DLPA200 Figure 10. Serial Port System Configuration Five signal lines are associated with the SCP bus: SCPEN, SCPCK, SCPDI, SCPDO, and IRQ. Table 4 lists the available controls and status pin names and their corresponding signal type, along with a brief functional description. Table 4. DLPC410 to DLPA200 I/O Pin Descriptions PIN NAME DESCRIPTION I/O A_SCPEN Active-low chip select for DLPA200 serial bus O A_STROBE DLPA200 control signal strobe O A_MODE(1:0) DLPA200 mode control O A_SEL(1:0) DLPA200 select control O A_ADDR(3:0) DLPA200 address control O B_SCPEN Active-low chip select for DLPA200 serial bus (2) O B_STROBE DLPA200 control signal strobe (2) O B_MODE(1:0) DLPA200 mode control O B_SEL(1:0) DLPA200 select control O B_ADDR(3:0) DLPA200 address control O The DLPA200 provides a variety of output options to the DMD by selecting logic control inputs: MODE[1:0], SEL[1:0] and reset group address A[3:0] (Table 4). The MODE[1:0] input determines whether a single output, two outputs, four outputs, or all outputs, will be selected. Output levels (VBIAS, VOFFSET, or VRESET) are selected by SEL[1:0] pins. Selected outputs are tri-stated on the rising edge of the STROBE signal and latched to the selected voltage level after a break-before-make delay. Outputs will remain latched at the last micromirror clocking pulse waveform level until the next micromirror clocking pulse waveform cycle. 8.3.4.1.4 DLPA200 to DLP9500UV Interface 8.3.4.1.4.1 DLPA200 to DLP9500UV Interface Overview The DLPA200 generates three voltages: VBIAS, VRESET, and VOFFSET that are supplied to the DMD MBRST lines in various sequences through the micromirror clocking pulse driver function. VOFFSET is also supplied directly to the DMD as DMDVCC2. A fourth DMD power supply, DMDVCC, is supplied directly to the DMD by regulators. The function of the micromirror clocking pulse driver is to switch selected outputs in patterns between the three voltage levels (VBIAS, VRESET and VOFFSET) to generate one of several micromirror clocking pulse waveforms. The order of these micromirror clocking pulse waveform events is controlled externally by the logic control inputs and timed by the STROBE signal. DLPC410 automatically detects the DMD type and then uses the DMD type to determine the appropriate micromirror clocking pulse waveform. 28 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 A direct micromirror clocking pulse operation causes a mirror to transition directly from one latched state to the next. The address must already be set up on the mirror electrodes when the micromirror clocking pulse is initiated. Where the desired mirror display period does not allow for time to set up the address, a micromirror clocking pulse with release can be performed. This operation allows the mirror to go to a relaxed state regardless of the address while a new address is set up, after which the mirror can be driven to a new latched state. A mirror in the relaxed state typically reflects light into a system collection aperture and can be thought of as off although the light is likely to be more than a mirror latched in the off state. System designers should carefully evaluate the impact of relaxed mirror conditions on optical performance. 8.3.5 Measurement Conditions The data sheet provides timing at the device pin. For output timing analysis, the tester pin electronics and its transmission line effects must be taken into account. Figure 11 shows an equivalent test load circuit for the output under test. The load capacitance value stated is only for characterization and measurement of AC timing signals. This load capacitance value does not indicate the maximum load the device is capable of driving. All rise and fall transition timing parameters are referenced to VIL MAX and VIH MIN for input clocks, VOL MAX and VOH MIN for output clocks. LOAD CIRCUIT RL From Output Under Test Tester Channel CL = 50 pF CL = 5 pF for Disable Time Figure 11. Test Load Circuit for AC Timing Measurements Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 29 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Incident Illumination Package Pin A1 Corner Details Omitted for Clarity Not to Scale DMD Micromirror Array 0 (Border micromirrors eliminated for clarity) M±1 Active Micromirror Array 0 N±1 Micromirror Hinge-Axis Orientation Micromirror Pitch P (um) 45° P (um) P (um) On State Tilt Direction Off State Tilt Direction P (um) Figure 12. DMD Micromirror Array, Pitch, and Hinge-Axis Orientation 30 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 Ill Inc um id in en at t io n www.ti.com Package Pin A1 Corner Ill Inc um id in en at t io n DLP9500UV Two “On-State” Micromirrors For Reference th nt t Pa ide gh Inc on-Li ati min Illu ath nt ide ht P Inc n-Lig atio min Illu Projected-Light Path Two “Off-State” Micromirrors gh Li eat th t S a ff- P t Flat-State ( “parked” ) Micromirror Position O a±b -a ± b Silicon Substrate “On-State” Micromirror Silicon Substrate “Off-State” Micromirror Figure 13. Micromirror Landed Positions and Light Paths Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 31 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 8.4 Device Functional Modes The DLP9500UV has only one functional mode; it is set to be highly optimized for low latency and high speed in generating mirror clocking pulses and timings. When operated with the DLPC410 controller in conjunction with the DLPA200 drivers, the DLP9500UV can be operated in several display modes. The DLP9500UV is loaded as 15 blocks of 72 rows each. The first 64 bits of pixel data and last 64 bits of pixel data for all rows are not visible. Below is a representation of how the image is loaded by the different micromirror clocking pulse modes. Figure 14, Figure 15, Figure 16, and Figure 17 show how the image is loaded by the different micromirror clocking pulse modes. There are four micromirror clocking pulse modes that determine which blocks are reset when a micromirror clocking pulse command is issued: • Single block mode • Dual block mode • Quad block mode • Global mode 8.4.1 Single Block Mode In single block mode, a single block can be loaded and reset in any order. After a block is loaded, it can be reset to transfer the information to the mechanical state of the mirrors. Figure 14. Single Block Mode 8.4.2 Dual Block Mode In dual block mode, reset blocks are paired together as follows (0-1), (2-3), (4-5), (6-7), (8-9), (10-11), (12-13), and (14). These pairs can be reset in any order. After data is loaded a pair can be reset to transfer the information to the mechanical state of the mirrors. Figure 15. Dual Block Mode 32 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 Device Functional Modes (continued) 8.4.3 Quad Block Mode In quad block mode, reset blocks are grouped together in fours as follows (0-3), (4-7), (8-11) and (12-14). Each quad group can be randomly addressed and reset. After a quad group is loaded, it can be reset to transfer the information to the mechanical state of the mirrors. Figure 16. Quad Block Mode 8.4.4 Global Block Mode In global mode, all reset blocks are grouped into a single group and reset together. The entire DMD must be loaded with the desired data before issuing a Global Reset to transfer the information to the mechanical state of the mirrors. Figure 17. Global Mode Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 33 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 8.5 Window Characteristics and Optics NOTE TI assumes no responsibility for image quality artifacts or DMD failures caused by optical system operating conditions exceeding limits described previously. 8.5.1 Optical Interface and System Image Quality TI assumes no responsibility for end-equipment optical performance. Achieving the desired end-equipment optical performance involves making trade-offs between numerous component and system design parameters. Optimizing system optical performance and image quality strongly relate to optical system design parameter trades. Although it is not possible to anticipate every conceivable application, projector image quality and optical performance is contingent on compliance to the optical system operating conditions described in the following sections. 8.5.2 Numerical Aperture and Stray Light Control The angle defined by the numerical aperture of the illumination and projection optics at the DMD optical area should be the same. This angle should not exceed the nominal device mirror tilt angle unless appropriate apertures are added in the illumination, projection pupils, or both to block out flat-state and stray light from the projection lens. The mirror tilt angle defines DMD capability to separate the ON optical path from any other light path, including undesirable flat-state specular reflections from the DMD window, DMD border structures, or other system surfaces near the DMD such as prism or lens surfaces. If the numerical aperture exceeds the mirror tilt angle, or if the projection numerical aperture angle is more than two degrees larger than the illumination numerical aperture angle, objectionable artifacts in the display’s border and/or active area could occur. 8.5.3 Pupil Match TI recommends the exit pupil of the illumination is nominally centered within 2° (two degrees) of the entrance pupil of the projection optics. Misalignment of pupils can create objectionable artifacts in the display’s border and/or active area, which may require additional system apertures to control, especially if the numerical aperture of the system exceeds the pixel tilt angle. 8.5.4 Illumination Overfill The active area of the device is surrounded by an aperture on the inside DMD window surface that masks structures of the DMD device assembly from normal view. The aperture is sized to anticipate several optical operating conditions. Overfill light illuminating the window aperture can create artifacts from the edge of the window aperture opening and other surface anomalies that may be visible on the screen. The illumination optical system should be designed to limit light flux incident anywhere on the window aperture from exceeding approximately 10% of the average flux level in the active area. Depending on the optical architecture of a particular system, overfill light may have to be further reduced below the suggested 10% level to be acceptable. 34 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 8.6 Micromirror Array Temperature Calculation Achieving optimal DMD performance requires proper management of the maximum DMD case temperature, the maximum temperature of any individual micromirror in the active array, the maximum temperature of the window aperture, and the temperature gradient between case temperature and the predicted micromirror array temperature (see Figure 18). See the Recommended Operating Conditions for applicable temperature limits. 8.6.1 Package Thermal Resistance The DMD is designed to conduct absorbed and dissipated heat to the back of the type A package where it can be removed by an appropriate heat sink. The heat sink and cooling system must be capable of maintaining the package within the specified operational temperatures, refer to Figure 18. The total heat load on the DMD is typically driven by the incident light absorbed by the active area; although other contributions include light energy absorbed by the window aperture and electrical power dissipation of the array. 8.6.2 Case Temperature The temperature of the DMD case can be measured directly. For consistency, thermal test point locations 1, 2, and 3 are defined, as shown in Figure 18. TP2 TP2 27.80 TP3 TP3 (TP2) TP3 TP1 21.08 Figure 18. Thermal Test Point Location Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 35 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Micromirror Array Temperature Calculation (continued) 8.6.3 Micromirror Array Temperature Calculation Active array temperature cannot be measured directly; therefore, it must be computed analytically from measurement points on the outside of the package, package thermal resistance, electrical power, and illumination heat load. The relationship between array temperature and the reference ceramic temperature (test point number 1 in Figure 18) is provided by the following equations: TArray = Computed DMD active array temperature TArray = Measured Ceramic temperature at location (test point number 1) + (Temperature increase due to power incident to the array × array-to-ceramic resistance) TArray = TCeramic+ (QArray × RArray-To-Ceramic) where • • • TCeramic = Measured ceramic temperature (°C) at location (test point number 1) RArray-To-Ceramic = DMD package thermal resistance from array to outside ceramic (°C/W) QArray = Total DMD array power, which is both electrical plus absorbed on the DMD active array (W) QArray = QElectrical + (QIllumination × DMD absorption constant (0.42)) where • • • QElectrical = Approximate nominal electrical internal power dissipation (W) QIllumination = [Illumination power density × illumination area on DMD] (W) DMD absorption constant = 0.42 The electrical power dissipation of the DMD is variable and depends on the voltages, data rates and operating frequencies. The nominal electrical power dissipation of the DMD is variable and depends on the operating state of mirrors and the intensity of the light source. The DMD absorption constant of 0.42 assumes nominal operation with an illumination distribution of 83.7% on the active array, 11.9% on the array border, and 4.4% on the window aperture. A system aperture may be required to limit power incident on the package aperture since this area absorbs much more efficiently than the array. Sample Calculation: • Illumination power density = 2 W/cm2 • Illumination area = (2.0736 cm × 1.1664 cm) / 83.7% = 2.89 cm2 (assumes 83.7% on the active array and 16.3% overfill) • QIllumination= 2 W/cm2 × 2.89 cm2 = 5.78 W • QElectrical = 4.4 W • RArray-To-Ceramic = 0.5°C/W • TCeramic = 20°C (measured on ceramic) • QArray = 4.4 W + (5.78 W × 0.42) = 6.83 W • TArray = 20°C + (6.83 W × 0.5°C/W) = 23.4°C 36 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 8.7 Micromirror Landed-On and Landed-Off Duty Cycle 8.7.1 Definition of Micromirror Landed-On/Landed-Off Duty Cycle The micromirror landed-on/landed-off duty cycle (landed duty cycle) denotes the amount of time (as a percentage) that an individual micromirror is landed in the On–state versus the amount of time the same micromirror is landed in the Off–state. As an example, a landed duty cycle of 100/0 indicates that the referenced pixel is in the On-state 100% of the time (and in the Off-state 0% of the time); whereas 0/100 would indicate that the pixel is in the Off-state 100% of the time. Likewise, 50/50 indicates that the pixel is On 50% of the time and Off 50% of the time. Note that when assessing landed duty cycle, the time spent switching from one state (ON or OFF) to the other state (OFF or ON) is considered negligible and is thus ignored. Because a micromirror can only be landed in one state or the other (on or off), the two numbers (percentages) always add to 100. 8.7.2 Landed Duty Cycle and Useful Life of the DMD Knowing the long-term average landed duty cycle (of the end product or application) is important because subjecting all (or a portion) of the DMD’s micromirror array (also called the active array) to an asymmetric landed duty cycle for a prolonged period of time can reduce the usable life of the DMD. Note that it is the symmetry/asymmetry of the landed duty cycle that is of relevance. The symmetry of the landed duty cycle is determined by how close the two numbers (percentages) are to being equal. For example, a landed duty cycle of 50/50 is perfectly symmetrical whereas a landed duty cycle of 100/0 or 0/100 is perfectly asymmetrical. 8.7.3 Landed Duty Cycle and Operational DMD Temperature Operational DMD temperature and landed duty cycle interact to affect the usable life of the DMD, and this interaction can be exploited to reduce the impact that an asymmetrical landed duty cycle has on the DMD’s usable life. In practice, this curve specifies the maximum operating DMD temperature that the DMD should be operated at for a give long-term average landed duty. 8.7.4 Estimating the Long-Term Average Landed Duty Cycle of a Product or Application During a given period of time, the landed duty cycle of a given pixel follows from the image content being displayed by that pixel. For example, in the simplest case, when displaying pure-white on a given pixel for a given time period, that pixel will experience a 100/0 landed duty cycle during that time period. Likewise, when displaying pure-black, the pixel will experience a 0/100 landed duty cycle. Between the two extremes (ignoring for the moment color and any image processing that may be applied to an incoming image), the landed duty cycle tracks one-to-one with the gray scale value, as shown in Table 5. Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 37 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Table 5. Grayscale Value and Landed Duty Cycle 38 GRAYSCALE VALUE LANDED DUTY CYCLE 0% 0/100 10% 10/90 20% 20/80 30% 30/70 40% 40/60 50% 50/50 60% 60/40 70% 70/30 80% 80/20 90% 90/10 100% 100/0 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 9 Application and Implementation NOTE Information in the following applications sections is not part of the TI component specification, and TI does not warrant its accuracy or completeness. TI’s customers are responsible for determining suitability of components for their purposes. Customers should validate and test their design implementation to confirm system functionality. 9.1 Application Information The DLP9500UV devices must be coupled with the DLPC410 controller to provide a reliable solution for many different applications. The DMDs are spatial light modulators which reflect incoming light from an illumination source to one of two directions, with the primary direction being into a projection collection optic. Each application is derived primarily from the optical architecture of the system and the format of the data coming into the DLPC410. Applications of interest include 3D printing, lithography, medical systems, and compressive sensing. 9.1.1 DMD Reflectivity Characteristics TI assumes no responsibility for end-equipment reflectivity performance. Achieving the desired end-equipment reflectivity performance involves making trade-offs between numerous component and system design parameters. Typical DMD reflectivity characteristics over UV exposure times are represented in Figure 19. 100 90 Relative Reflectivity (%) 80 70 60 50 40 30 20 30°C 25°C 20°C 10 0 0 10000 20000 30000 Exposure Hours 40000 50000 D001 2.3 W/cm2, 363 to 400 nm, 25°C Figure 19. Nominal DMD Relative Reflectivity Percentage vs Total Exposure Hours DMD reflectivity includes micromirror surface reflectivity and window transmission. The DMD was characterized for DMD reflectivity using a broadband light source (200-W metal-halide lamp). Data is based off of a 2.3 W/cm2 UV exposure at the DMD surface (365 nm peak output) using a 363 nm high pass filter between the light source and the DMD. (Contact your local Texas Instruments representative for additional information about power density measurements and UV filter details.) 9.1.1.1 Design Considerations Influencing DMD Reflectivity Optimal, long-term performance of the digital micromirror device (DMD) can be affected by various application parameters. The following is a list of some of these application parameters and includes high level design recommendations that may help extend relative reflectivity from time zero: • Illumination spectrum – using longer wavelengths for operation while preventing shorter wavelengths from striking the DMD • Illumination power density – using lower power density • DMD case temperature – operating the DMD with the case temperature at the low end of its specification • Cumulative incident illumination – Limiting the total hours of UV illumination exposure when the DMD is not actively steering UV light in the application. For example, a design might include a shutter to block the Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 39 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com Application Information (continued) • 40 illumination or LED illumination where the LEDs can be strobed off during periods not requiring UV exposure. Micromirror landed duty cycle – applying a 50/50 duty cycle pattern during periods where operational patterns are not required. Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 9.2 Typical Application The DLP9500UV DMD is designed with a window which allows transmission of ultraviolet (UV) light. This makes it well suited for UV applications requiring fast, spatially programmable light patterns using the micromirror array. UV wavelengths can affect the DMD differently than visible wavelengths. There are system level considerations which should be leveraged when designing systems using this DMD. OPTICAL SENSOR LED DRIVERS (CAMERA) LEDS OPTICS LED SENSORS USER INTERFACE LVDS BUS (A,B,[C,D]) LVDS BUS (A,B,[C,D]) DDC_DCLK, DVALID, DDC_DIN(15:0) DDC_DCLKOUT, DDCSCTRL, DDC_DOUT(15:0) SCP BUS ROW and BLOCK SIGNALS SCPCLK, SCPDO, SCPDI, DMD_SCPENZ, DAD_A_SCPENZ, DAD_B_SCPENZ ROWMD(1:0), ROWAD(10:0), BLKMD(1:0), BLKAD(3:0), RST2BLKZ CONNECTIVITY (USB, ETHERNET, ETC.) CONTROL SIGNALS COMP_DATA, NS_FLIP, WDT_ENBLZ, PWR_FLOAT USER - MAIN PROCESSOR / FPGA DAD CONTROL DAD_A_MODE(1:0), DAD_A_SEL(1:0), DAD_A_ADDR(3:0), DAD_OEZ, DAD_INIT DLPC410 INFO SIGNALS RST_ACTIVE, INIT_ACTIVE, ECP2_FINISHED, DMD_TYPE(3:0), DDC_VERSION(2:0) MBRST1_(15:0) DLP9500UV DLPA200 A DLPC410 PGM SIGNALS VOLATILE and NON-VOLATILE STORAGE DLPR410 PROM_CCK_DDC, PROGB_DDC, PROM_DO_DDC, DONE_DDC, INTB_DDC JTAG ARSTZ CLKIN_R OSC 50 Mhz ~ DAD CONTROL DAD_B_MODE(1:0), DAD_B_SEL(1:0), DAD_B_ADDR(3:0), DAD_OEZ, DAD_INIT MBRST2_(15:0) DLPA200 VLED0 B VLED1 DMD_RESET POWER MANAGMENT Figure 20. DLPC410 and DLP9500UV Embedded Example Block Diagram Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 41 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 9.2.1 Design Requirements All applications using the DLP9500UV chipset require both the controller and the DMD components for operation. The system also requires an external parallel flash memory device loaded with the DLPC410 configuration and support firmware. The chipset has several system interfaces and requires some support circuitry. The following interfaces and support circuitry are required: • DLPC410 system interfaces: – Control interface – Trigger interface – Input data interface – Illumination interface – Reference clock – Program interface • DLP9500UV interfaces: – DLPC410 to DLP9500UV digital data – DLPC410 to DLP9500UV control interface – DLPC410 to DLP9500UV micromirror reset control interface – DLPC410 to DLPA200 micromirror driver – DLPA200 to DLP9500UV micromirror reset 9.2.1.1 Device Description The DLP9500UV 1080p chipset offers developers a convenient way to design a wide variety of industrial, medical, telecom and advanced display applications by delivering maximum flexibility in formatting data, sequencing data, and light patterns. The DLP9500UV 1080p chipset includes the following four components: DMD digital controller (DLPC410), EEPROM (DLPR410), DMD micromirror driver (DLPA200), and a DMD (DLP9500UV). DLPC410 Digital Controller for DLP Discovery 4100 chipset • Provides high speed 2XLVDS data and control interface to the user • Drives mirror clocking pulse and timing information to the DLPA200 • Supports random row addressing • Controls illumination DLPR410 PROM for DLP Discovery 4100 chipset • Contains startup configuration information for the DLPC410 DLPA200 DMD Micromirror Driver • Generates micromirror clocking pulse control (sometimes referred to as a reset) of 15 banks of DMD mirrors. (Two are required for the DLP9500UV). DLP9500UV DLP 0.95 1080p 2xLVDS UV Type-A DMD • Steers light in two digital positions (+12° and –12°) using 1920 × 1080 micromirror array of aluminum mirrors. Table 6. DLP DLP9500UV Chipset Configurations QUANTITY TI PART 1 DLP9500UV DESCRIPTION 1 DLPC410 Digital Controller for DLP Discovery 4100 chipset 1 DLPR410 PROM for DLP Discovery 4100 chipset 2 DLPA200 DMD Micromirror Driver DLP 0.95 1080p 2xLVDS UV Type-A DMD Reliable function and operation of DLP9500UV 1080p chipsets require the components be used in conjunction with each other. This document describes the proper integration and use of the DLP9500UV 1080p chipset components. The DLP9500UV 1080p chipset can be combined with a user programmable application FPGA (not included) to create high performance systems. 42 Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV DLP9500UV www.ti.com DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 9.2.2 Detailed Design Procedure The DLP9500UV DMD is designed with a window which allows transmission of UV light. This makes it well suited for UV applications requiring fast, spatially programmable light patterns using the micromirror array. UV wavelengths can affect the DMD differently than visible wavelengths. There are system level considerations which should be leveraged when designing systems using this DMD. 9.2.3 Application Curve 100 90 80 o UV AOI = 0 Transmittance (%) 70 60 50 40 30 20 10 0 300 320 340 360 380 400 420 440 460 480 500 Wavelength (nm) Type A UVA on 7056 glass (3 mm thick) Figure 21. Corning 7056 UV Window Transmittance (Maximum Transmission Region) 10 Power Supply Recommendations 10.1 Power-Up Sequence (Handled by the DLPC410) The sequence of events for DMD system power-up is: 1. Apply logic supply voltages to the DLPA200 and to the DMD according to DMD specifications. 2. Place DLPA200 drivers into high impedance states. 3. Turn on DLPA200 bias, offset, or reset supplies according to driver specifications. 4. After all supply voltages are assured to be within the limits specified and with all micromirror clocking pulse operations logically suspended, enable all drivers to either VOFFSET or VBIAS level. 5. Begin micromirror clocking pulse operations. 10.2 DMD Power-Up and Power-Down Procedures Failure to adhere to the prescribed power-up and power-down procedures may affect device reliability. The DLP9500UV power-up and power-down procedures are defined by the DLPC410 data sheet (DLPS024). These procedures must be followed to ensure reliable operation of the device. Submit Documentation Feedback Copyright © 2014–2017, Texas Instruments Incorporated Product Folder Links: DLP9500UV 43 DLP9500UV DLPS033C – NOVEMBER 2014 – REVISED MARCH 2017 www.ti.com 11 Layout 11.1 Layout Guidelines The DLP9500UV is part of a chipset that is controlled by the DLPC410 in conjunction with the DLPA200. These guidelines are targeted at designing a PCB board with these components. 11.1.1 Impedance Requirements Signals should be routed to have a matched impedance of 50 Ω ±10% except for LVDS differential pairs (DMD_DAT_Xnn, DMD_DCKL_Xn, and DMD_SCTRL_Xn) which should be matched to 100 Ω ±10% across each pair. 11.1.2 PCB Signal Routing When designing a PCB board for the DLP9500UV controlled by the DLPC410 in conjunction with the DLPA200s, the following are recommended: Signal trace corners should be no sharper than 45°. Adjacent signal layers should have the predominate traces routed orthogonal to each other. TI recommends that critical signals be hand routed in the following order: DDR2 Memory, DMD (LVDS signals), then DLPA200 signals. TI does not recommend signal routing on power or ground planes. TI does not recommend ground plane slots. High speed signal traces should not cross over slots in adjacent power and/or ground planes. Table 7. Important Signal Trace Constraints SIGNAL CONSTRAINTS LVDS (DMD_DAT_xnn, DMD_DCKL_xn, and DMD_SCTRL_xn) P-to-N data, clock, and SCTRL: