MS-SQ4-21

867 FIBER SENSORS Safety Liquid Leak Sensor SQ4 SERIES Related Information ■■General terms and conditions.............. F-3 ■■General precautions...................... P.1595 ■■Selection guide.............................. P.865~ ■■Korea’s S-mark.............................. P.1602 LASER SENSORS PHOTOELECTRIC SENSORS Certified MICRO PHOTOELECTRIC SENSORS AREA SENSORS Certified by NRTL SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS INDUCTIVE PROXIMITY SENSORS Certified Conforming to SEMI-S2 PARTICULAR USE SENSORS SENSOR OPTIONS SIMPLE WIRE-SAVING UNITS WIRE-SAVING SYSTEMS MEASUREMENT SENSORS STATIC CONTROL DEVICES LASER MARKERS PLC HUMAN MACHINE INTERFACES ENERGY MANAGEMENT SOLUTIONS Category 4 PLe SIL3 panasonic.net/id/pidsx/global The control category differs depending on the configuration and wiring of the external circuit. Two-stage detection × Safety certification Improved productivity! Two-stage detection Lights up when conditions are normal (and at incipient liquid leak detection) ●Monitoring FA COMPONENTS MACHINE VISION SYSTEMS UV CURING SYSTEMS Lights up at incipient liquid leak detection (and at abnormal leak detection) ●First stage: Initial detection (non-safety output) Report the occurrence of an incipient liquid leak to the production supervisor and perform equipment maintenance after removing any work in progress. Use as a warning (Detection auxiliary output) Incipient liquid leak Warning Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection PLC, etc. Ensure productivity By quickly detecting even small liquid leaks (incipient leaks), personnel can perform preventive maintenance or plan maintenance, thereby reducing both downtime and damage to work in progress. Ultrasonic Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60 Display Sensor Lights up at abnormal liquid leak detection ●Second stage: Liquid leak detection (safety-critical output) Emergency stop Sensor Stop instruction (Detection output) Ensure safety Relay, etc. Motor, etc. In the event of a high-volume liquid leak (an abnormal liquid leak), the target equipment is stopped immediately to ensure safety. Safety Liquid Leak Sensor SQ4 SERIES APPLICATIONS 868 FIBER SENSORS Leak detection such as semi-conductive wafer wet etching process line LASER SENSORS PHOTOELECTRIC SENSORS MICRO PHOTOELECTRIC SENSORS AREA SENSORS SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS INDUCTIVE PROXIMITY SENSORS PARTICULAR USE SENSORS SENSOR OPTIONS SIMPLE WIRE-SAVING UNITS Two-stage detection addresses both incipient liquid leaks (by generating a warning) and abnormal liquid leaks (by initiating an emergency stop). On the bottom of the sensor are two detection units, one located at the front and one at the center. If a liquid leak occurs in front of the sensor, the front detection unit will detect even a small incipient leak. When the leak increases in volume and reaches the center of the sensor, it will be detected as an abnormal leak. While previous implementations of two-stage liquid leak detection have relied on two separate sensors installed at different heights, the SQ4 delivers the same full-featured detection capability in a single sensor unit. Incipient liquid leak detection unit First stage Incipient liquid leak detection Liquid leak detection unit Second stage The principle of capillary action is applied to allow detection of even small leaks. Liquid leak detection unit HUMAN MACHINE INTERFACES ENERGY MANAGEMENT SOLUTIONS How it works Emitter Receiver Emitter FA COMPONENTS MACHINE VISION SYSTEMS Incipient liquid leak detection unit Liquid leak First stage In the absence of a leak, the receiver is able to detect the light from the emitter. When a leak occurs, the light is diffused by the liquid. The SQ4 can also detect human error (improper installation). Knurling on the sides of the sensor head makes it easy to grip. STATIC CONTROL DEVICES PLC Abnormal liquid leak detection In addition to detecting liquid leaks, the SQ4 can detect both human error (such as a failure to install the sensor) and sensor malfunctions. If the sensor itself or the sensor and its mounting bracket have become dislodged, have been improperly installed, or are suffering from a broken cable connection, light from the emitter will not reach the receiver, causing the device to generate the same output as if a liquid leak had occurred. MEASUREMENT SENSORS LASER MARKERS Liquid leak Second stage Receiver WIRE-SAVING SYSTEMS When conditions are normal Sensor light from the emitter is able to reach the receiver. Receiver Emitter UV CURING SYSTEMS Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection Ultrasonic Small / Slim Object Detection Obstacle Detection When the sensor has been installed improperly When the sensor has become dislodged Receiver Emitter SQ4 EX-F70/ EX-F60 The attachment is dislodged. When the sensor and its mounting bracket have become dislodged (Inadequately tightened screws or defective installation bolts or adhesive) The attachment becomes separated from the mounting bracket, preventing light from reaching the receiver The SQ4 can also be used alone. The SQ4 can also be used without a controller, allowing the benefits of two-stage detection to be added to existing equipment by augmenting or replacing existing detection systems. 869 FIBER SENSORS LASER SENSORS PHOTOELECTRIC SENSORS MICRO PHOTOELECTRIC SENSORS AREA SENSORS SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS INDUCTIVE PROXIMITY SENSORS Safety Liquid Leak Sensor SQ4 SERIES Acquire safety certification. The SQ4 delivers safety performance of the highest caliber. The SQ4 system is designed to fulfill safety requirements imposed by international standards. When used in combination, the SQ4-A sensor and SQ4-C11 controller meet category 4, PLe, SIL3 requirements under ISO 13849-1, which has been updated to add probability criteria to the existing risk evaluation system (in the control category), allowing the functional safety of programmable electronic control systems and related devices to be evaluated. The sensor fulfills control category 1, PLc, SIL1 requirements when used in a standalone configuration. Control output polarity selection switch Digital error indicator Non-safety output polarity selection switch e-CON connectors (for sensors) If SQ4-A and SQ4-C11 used in combination PARTICULAR USE SENSORS SENSOR OPTIONS Control category 4 / PLe / SIL3 Sensors (up to 4) (Sensor monitor output) SIMPLE WIRE-SAVING UNITS Incipient liquid leak detection Warning WIRE-SAVING SYSTEMS Standard PLC (non-safety) Detection output MEASUREMENT SENSORS Stop instruction If sensors used alone Control category 1 / PLc / SIL1 STATIC CONTROL DEVICES (Control output) Safety relay, etc Motor LASER MARKERS PLC HUMAN MACHINE INTERFACES ENERGY MANAGEMENT SOLUTIONS FA COMPONENTS Dual CPUs deliver an advanced level of safety control. The controller’s two independent CPUs mutually check the unit’s operating state, and redundant signal processing and output circuits ensure safety. Failure mode and effects analysis (FMEA)* further increases operational safety. ISO 13849-1 PLr (Required performance level) Performance level (PL) applied in order to achieve the required risk reduction MACHINE VISION SYSTEMS UV CURING SYSTEMS F1 Sensor S1 Controller Control circuit Control circuit Check Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection Output circuit OSSD 1 Monitor unit (CPU 1) Sensor drive circuit Check Control circuit Check Output circuit SQ4 EX-F70/ EX-F60 a Low b c Contribution to risk reduction d e High S: Severity of injury S1: Slight (normally reversible injury) S2: Serious (normally irreversible injury or death) Mutual checks Monitor unit (CPU 2) Check F1 S2 F2 Check Check OSSD 2 Ultrasonic Small / Slim Object Detection Obstacle Detection F2 Start P1 P2 P1 P2 P1 P2 P1 P2 *FMEA comprises a systematic method for analyzing latent failures and defects so that they can be prevented from manifesting themselves. F: Frequency and/or exposure to hazard F1: Seldom-to-less-often and/or the exposure time is short F2: Frequent-to-continuous and/or the exposure time is long P: Possibility of avoiding hazard or limiting harm P1: Possible under specific conditions P2: Scarcely possible Safety Liquid Leak Sensor SQ4 SERIES Reduce wiring and lower costs by daisy-chaining controllers and other safety equipment. Daisy-chaining The controller’s safety input function can be used to connect wiring used to daisy-chain controllers together as well as input from safety contacts (2NC) on emergency stop switches, safety door switches, and other devices. In this way, safety output can be aggregated onto a single line to reduce safety circuit wiring and lower costs. FIBER SENSORS LASER SENSORS PHOTOELECTRIC SENSORS MICRO PHOTOELECTRIC SENSORS Stop instruction Daisy-chaining Motor 870 AREA SENSORS Input from safety contacts can also be accommodated. 2NC *Systems that connect two or more safety contacts on door switches or other devices fall under control category 3. *The response times for all connected devices are added together to obtain the system response time. Safety door switches, emergency stop switches, etc. SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS INDUCTIVE PROXIMITY SENSORS PARTICULAR USE SENSORS SENSOR OPTIONS SIMPLE WIRE-SAVING UNITS WIRE-SAVING SYSTEMS MEASUREMENT SENSORS STATIC CONTROL DEVICES LASER MARKERS PLC HUMAN MACHINE INTERFACES ENERGY MANAGEMENT SOLUTIONS FA COMPONENTS MACHINE VISION SYSTEMS UV CURING SYSTEMS Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection Ultrasonic Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60 871 FIBER SENSORS LASER SENSORS PHOTOELECTRIC SENSORS MICRO PHOTOELECTRIC SENSORS Safety Liquid Leak Sensor SQ4 SERIES PRODUCT CONFIGURATION Whole set: Control category 4, PLe, SIL3 Sensor: Control category 1, PLc, SIL1 AREA SENSORS Connector Sensor SQ4-A2□-□ SAFETY LIGHT CURTAINS / SAFETY COMPONENTS Mounting bracket set MS-SQ4-2□ PRESSURE / FLOW SENSORS INDUCTIVE PROXIMITY SENSORS MEASUREMENT SENSORS STATIC CONTROL DEVICES LASER MARKERS PLC HUMAN MACHINE INTERFACES ENERGY MANAGEMENT SOLUTIONS FA COMPONENTS MACHINE VISION SYSTEMS UV CURING SYSTEMS Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection Ultrasonic Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60 Type Appearance For standard liquid WIRE-SAVING SYSTEMS Sensors Sensing object (Note 1) Model No. Output SQ4-A21-P PNP open-collector transistor SQ4-A21-N NPN open-collector transistor SQ4-A22-P PNP open-collector transistor SQ4-A22-N NPN open-collector transistor Water etc. Material: Polypropylene For chemical liquid SIMPLE WIRE-SAVING UNITS ORDER GUIDE Material: PFA Sulfuric acid, Hydrochloric acid, Phosphoric acid, Ammonia, FluorinertTM (Note 2), Galden® (Note 2) or Fluorine etc. Notes: 1) The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition. 2) Fluorinert is the world wide trademark of 3M. Galden is the registered trademark of Solvay. Mounting bracket set Type For standard liquid SENSOR OPTIONS Mounting bracket Controller SQ4-C11 For chemical liquid PARTICULAR USE SENSORS Attachment Make sure to purchase the sensor and controller as a set. Appearance Attachment Mounting bracket Material: Polypropylene Sensing object Model No. Water etc. MS-SQ4-21 Material: PVC Material: PFA Material: PFA Material: PVC Liquids with comparatively high surface tension such as Sulfuric acid, Hydrochloric acid, Phosphoric acid, and Ammonia MS-SQ4-22 Liquids with comparatively low surface tension such as FluorinertTM (Note), Galden® (Note), and Hydrogen fluoride MS-SQ4-23 Liquids such as low-concentration hydrogen fluoride MS-SQ4-24 Note: Fluorinert is the world wide trademark of 3M. Galden is the registered trademark of Solvay. Connectors Designation Hook-up connector (e-CON) Make sure to purchase the connector when using the controller. Model No. Hook-up connector Description CN-EP2 For SQ4-A21-□ (PVC cable) It is used to connect to the controller. Yellow CN-EP3 For SQ4-A22-□ (PFA cable) It is used to connect to the controller. Orange • CN-EP2 5 pcs. per set 5 pcs. per set Controller Type Safety controller Appearance Model No. SQ4-C11 Description Up to 4 safety liquid leak sensors can be connected. Control Category 4, PLe, SIL3 • CN-EP3 Safety Liquid Leak Sensor SQ4 SERIES SPECIFICATION FIBER SENSORS LASER SENSORS Sensors Model. No. Type Item For standard liquid For chemical liquid PNP output SQ4-A21-P SQ4-A22-P NPN output SQ4-A21-N SQ4-A22-N CE marking directive compliance Sensing object Supply voltage Machinery Directive, EMC Directive, RoHS Directive Sulfuric acid, Hydrochloric acid, Phosphoric acid, Ammonia, FluorinertTM (Note 3), Galden® (Note 3), Hydrofluoric acid etc. (Note 2) Water (Standard liquid) (Note 2) 12 to 24 V DC ±10 % Ripple P-P 10 % or less Current consumption 30 mA or less Utilization category DC-12, DC-13 Detection output (Leakage detection) PNP open-collector transistor • Maximum source current: 50 mA • Applied voltage: Same as the supply voltage (between detection output and +V) • Residual voltage: 2.5 V or less (at 50 mA source current) Response time Output operation Detection auxiliary output (Initial detection) Output operation NPN open-collector transistor • Maximum sink current: 50 mA • Applied voltage: Same as the supply voltage (between detection auxiliary output and 0 V) • Residual voltage: 2 V or less (at 50 mA sink current) 50 ms or less ON when normal condition, OFF when initial detection or accidental leakage Protection Ambient temperature NPN open-collector transistor • Maximum sink current: 50 mA • Applied voltage: Same as the supply voltage (between detection output and 0 V) • Residual voltage: 2 V or less (at 50 mA sink current) 10 ms or less PNP open-collector transistor • Maximum source current: 50 mA • Applied voltage: Same as the supply voltage (between detection auxiliary output and +V) • Residual voltage: 2.5 V or less (at 50 mA source current) IP65 / IP67 (IEC) –10 to +55 °C +14 to +131 °F (No dew condensation or icing allowed) (Note 4), Storage: –10 to +55 °C +14 to +131 °F Ambient humidity 35 to 85 % RH, Storage: 35 to 85 % RH Emitting element Infrared LED (modulated) Cable Weight PHOTOELECTRIC SENSORS MICRO PHOTOELECTRIC SENSORS AREA SENSORS SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS ON when normal condition or initial detection, OFF when detection leakage or wrong installation Response time Material 872 INDUCTIVE PROXIMITY SENSORS PARTICULAR USE SENSORS SENSOR OPTIONS SIMPLE WIRE-SAVING UNITS WIRE-SAVING SYSTEMS MEASUREMENT SENSORS STATIC CONTROL DEVICES LASER MARKERS PLC HUMAN MACHINE INTERFACES Enclosure: Polypropylene Enclosure: PFA 0.18 mm2 4-core PVC cabtyre cable, 2 m 6.562 ft long 0.1 mm2 4-core PFA cabtyre cable, 2 m 6.562 ft long Net weight: 45 g approx., Gross weight: 110 g approx. Notes: 1) Where measurement conditions have not been specified precisely, the conditions used were an ambient temperature of +20 °C +68 °F. 2) ‌The agents mentioned above are examples. It may not be detected depending on viscosity the agent. Before using this device, check the detecting liquid and installation condition. 3) Fluorinert is the world wide trademark of 3M. Galden is the registered trademark of Solvay. 4) Liquid being detected should be also kept within the rated ambient temperature range. ENERGY MANAGEMENT SOLUTIONS FA COMPONENTS MACHINE VISION SYSTEMS UV CURING SYSTEMS Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection Ultrasonic Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60 873 Safety Liquid Leak Sensor SPECIFICATION FIBER SENSORS PHOTOELECTRIC SENSORS MICRO PHOTOELECTRIC SENSORS AREA SENSORS SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS INDUCTIVE PROXIMITY SENSORS PARTICULAR USE SENSORS SENSOR OPTIONS SIMPLE WIRE-SAVING UNITS Controller Model No. Item CE marking directive compliance Applicable standards LASER SENSORS International standard Japan Europe (EU) (Note 2) North America (Note 3) South Korea SEMI Power voltage Consumption current Control output [OSSD 1 (Y1), OSSD 2 (Y2)] WIRE-SAVING SYSTEMS Response time MEASUREMENT SENSORS Operation mode (Output operation) STATIC CONTROL DEVICES LASER MARKERS PLC HUMAN MACHINE INTERFACES ENERGY MANAGEMENT SOLUTIONS SQ4 SERIES Utilization category Sensor monitor output (AUX1, 2, 3, 4, Non-safety output) Response time Operation mode (Output operation) Utilization category SQ4-C11 Machinery Directive, EMC Directive, RoHS Directive ISO 13849-1 (Category 4, PLe), IEC 61508-1 to 7 (SIL3) JIS B 9705-1 (Category 4), JIS C 0508-1 to 7 (SIL3) EN 55011 Class A, EN 61000-6-2, EN 50178, EN ISO 13849-1 (Category 4, PLe), EN 61508-1 to 7 (SIL3) ANSI/UL 508, CAN/CSA C22.2 No.14 S1-G-1-2009, S2-W-5-2009 Conforming to SEMI-S2-0310a 24 V DC+10 −15 % Ripple P-P 10 % or less 200 mA or less PNP open-collector transistor / NPN open-collector transistor (switch method) • Maximum source current: 200 mA • Maximum sink current: 200 mA • Applied voltage: Same as power voltage • Applied voltage: Same as power voltage (between control output to +V) (between control output to 0 V) • Residual voltage: 2.5 V or less (at 200 mA source current) • Residual voltage: 2.0 V or less (at 200 mA sink current) 20 ms or less (excluding the response time of the sensor) ON when normal condition or initial detection, OFF when detection leakage or wrong installation DC-12, DC-13 PNP open-collector transistor / NPN open-collector transistor (switch method) • Maximum source current: 60 mA • Maximum sink current: 60 m A • Applied voltage: Same as power voltage • Applied voltage: Same as power voltage (between sensor monitor output to +V) (between sensor monitor output to 0 V) • Residual voltage: 2.5 V or less (at 60 mA source current) • Residual voltage: 2.0 V or less (at 60 mA sink current) 100 ms or less (excluding the response time of the sensor) ON when normal condition, OFF when initial detection or accidental leakage DC-12, DC-13 Lockout output OFF for lockout (Rating: Same as sensor monitor output) FA COMPONENTS Auxiliary output Negative logic output of control output 1/2 (OSSD 1/2) (Rating: Same as sensor monitor output) [Auxiliary output ON when control output 1/2 (OSSD 1/2) is OFF] MACHINE VISION SYSTEMS Functions Interlock / lockout cancel / Test input / External device monitor / Safety input / Control output polarity selection / Non-safety output polarity selection / Sensor connection number setting Protection IP20 (IEC) (However, it should be in IP54 protection structure of control panel) UV CURING SYSTEMS Ambient temperature Ambient humidity PFHD Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection Ultrasonic Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60 –10 to +55 °C +14 to +131 °F (No dew condensation or icing allowed), Storage: –20 to +70 °C –4 to +158 °F 35 to 85 % RH, Storage: 35 to 85 % RH 2.55 × 10-9 (when connecting 4 safety liquid connecting sensors) MTTFD 100 years or more Material Main unit case: PC+ABS (alloy) Weight Net weight: 170 g approx., Gross weight: 440 g approx. Notes: 1) Where measurement conditions have not been specified precisely, the conditions used were an ambient temperature of +20 °C +68 °F. PFHD: Probability of dangerous failure per hour, MTTFD: Mean time to dangerous failure (in years) 2) Regarding EU Machinery Directive, a Notified Body, TÜV SÜD, has certified with the type examination certificate. 3) ‌With regards to the standards in the US, under the US regulation 29 CFR 1910.7, TÜV SÜD America, a Nationally Recognized Testing Laboratory (NRTL) certified by OSHA, has certified with the safety certificate based on UL / ANSI standards. With regards to the standards in Canada, under the safety regulations based on CEC (Canadian Electric Code), TÜV SÜD America, a Certification Body accredited by SCC, has certified with the safety certificate based on CSA standards. Safety Liquid Leak Sensor SQ4 SERIES I/O CIRCUIT AND WIRING DIAGRAMS 874 FIBER SENSORS LASER SENSORS Sensors SQ4-A□-P SQ4-A□-N PNP output type NPN output type Color code Color code (Brown) +V + - (Black) Detection output 50 mA max. Load (Black) Detection output Sensor circuit Sensor circuit MICRO PHOTOELECTRIC SENSORS (Brown) +V 50 mA max. 12 to 24 V DC ±10 % (White) Detection auxiliary Load output 50 mA max. (Blue) 0 V AREA SENSORS Load Load (White) Detection auxiliary output (Blue) 0 V + - 12 to 24 V DC ±10 % 50 mA max. SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS INDUCTIVE PROXIMITY SENSORS Controller SQ4-C11 Controller PARTICULAR USE SENSORS SENSOR OPTIONS For operation with PNP output SIMPLE WIRE-SAVING UNITS Control output polarity selection switch KB PLC etc. TEST 24 V DC WIRE-SAVING SYSTEMS KA MEASUREMENT SENSORS Sensor 1 STATIC CONTROL DEVICES Sensor 2 PNP output type SQ4-A□-P PHOTOELECTRIC SENSORS Control circuit Sensor 3 LASER MARKERS Sensor 4 KA, KB: External devices KA KB RESET* 0V Non-safety output polarity selection switch Forced guide relay, magnet contactor or monitored valve FA COMPONENTS Manual/Auto reset can be selected by the wiring of the reset input terminals (X1, X2, and X3). Reset KA KB X1 X2 X3 Back check circuit is not required. Reset Auto reset Back check circuit is required. KA KB MACHINE VISION SYSTEMS Back check circuit is not required. X1 X2 X3 X1 X2 X3 HUMAN MACHINE INTERFACES ENERGY MANAGEMENT SOLUTIONS *RESET Manual reset Back check circuit is required. PLC X1 X2 X3 UV CURING SYSTEMS KB Selection Guide For operation with NPN output Control output polarity selection switch PLC etc. TEST 24 V DC Liquid Leak Detection KA Liquid Level Detection Sensor 1 NPN output type SQ4-A□-N Water Detection Sensor 2 Color Mark Detection Control circuit Sensor 3 Wafer Detection Sensor 4 Ultrasonic KA, KB: External devices KA KB RESET* 0V Non-safety output polarity selection switch Forced guide relay, magnet contactor or monitored valve Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60 *RESET Manual/Auto reset can be selected by the wiring of the reset input terminals (X1, X2, and X3). Manual reset Back check circuit is required. Reset KA KB X1 X2 X3 Back check circuit is not required. Reset X1 X2 X3 Auto reset Back check circuit is required. KA KB X1 X2 X3 Back check circuit is not required. X1 X2 X3 875 FIBER SENSORS Safety Liquid Leak Sensor PRECAUTIONS FOR PROPER USE LASER SENSORS •• This product is a sensor for detecting leak of fluids. •• When this product is used with safety devices, construct the system such that the device itself. PHOTOELECTRIC SENSORS MICRO PHOTOELECTRIC SENSORS AREA SENSORS SAFETY LIGHT CURTAINS / SAFETY COMPONENTS PRESSURE / FLOW SENSORS ••Before using this device, check whether the device performs properly with the functions and capabilities as per the design specifications. ••Avoid using this device in an explosive atmosphere because this product does not have an explosive-proof protective construction. Installation INDUCTIVE PROXIMITY SENSORS •• There is the detection mount difference by directivity of a liquid leakage. When there are a direction from which a liquid leakage happens, and an inclination, please install the nose-of-cam side (opposite side of a cable) of a sensor towards a top. ••Use the mounting bracket MS-SQ4-□ (optional) which suits the liquid to detect. ••Periodical checking of operation is recommended with the liquids which are not dangerous (water, alcohol, etc.). ••The amount of detection may change with the conditions of the installation surface. ••Be sure to use the mounting bracket MS-SQ4-□ (optional) when installing this device to avoid human error, etc. Reliable detection cannot be guaranteed when this sensor is used alone. PARTICULAR USE SENSORS SENSOR OPTIONS SIMPLE WIRE-SAVING UNITS WIRE-SAVING SYSTEMS MEASUREMENT SENSORS STATIC CONTROL DEVICES LASER MARKERS PLC SQ4 SERIES Maintenance HUMAN MACHINE INTERFACES ••Before conduct maintenance, be sure that the system is in safety state. ••When using chemical liquid, use proper protections such as groves, masks, goggles, helmets etc. When using protections, be sure to read manuals of them and use properly. ••Dispose or reinstall in different environment, flush with DI water. ENERGY MANAGEMENT SOLUTIONS FA COMPONENTS MACHINE VISION SYSTEMS UV CURING SYSTEMS Mounting Selection Guide Liquid Leak Detection Liquid Level Detection Water Detection Color Mark Detection Wafer Detection Ultrasonic Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60 ••Keep enough space for maintenance when mounting this product. Space Refer to p.1595 for general precautions. Leakage detection condition and variation factor ••Leak detection part of this product properly detects the leakage in the following condition. 1. Detection range: Area except backward of this product (liquid must enter to the detection range) 2. Material of installation surface: Hard vinyl chloride or Stainless steel 3. Surface condition for installation: Glossy surface (surface roughness: corresponding 0.4 μmRa) and clean surface. 4. Installation surface angle: Horizontal Detection range ••This product may not detect properly liquid in following element. 1. Liquid kind, consistency (surface tension) and air bubble incorporation. 2. Material, roughness, angle, dirtiness and liquid absorption of surface of installed surface of sensor. 3. Wrong selection of dedicated mounting bracket. ••Check the detecting liquid and the installation condition before use. Safety Liquid Leak Sensor DIMENSIONS (Unit: mm in) Sensor (7.5) 0.295 18 0.709 35.8 1.409 SQ4-A22-□ ø35 ø1.378 1 0.039 ø8 ø0.315 Sensor 18 0.709 (7.5) 0.295 35.8 1.409 25 0.984 13.5 7.5 0.295 0.531 Assembly dimensions with mounting bracket for MS-SQ4-21 ø35 ø1.378 PRESSURE / FLOW SENSORS 13.5 0.531 INDUCTIVE PROXIMITY SENSORS ø35 ø1.378 25 0.984 SENSOR OPTIONS SIMPLE WIRE-SAVING UNITS 4.5 0.177 D 2 × ø4.3 ø0.169 WIRE-SAVING SYSTEMS MEASUREMENT SENSORS 13 22 31 0.512 0.866 1.220 35.8 1.409 13 22 31 0.512 0.866 1.220 PARTICULAR USE SENSORS Assembly dimensions with mounting bracket 4.5 0.177 35.8 1.409 SAFETY LIGHT CURTAINS / SAFETY COMPONENTS 0.5 2.2 0.020 0.087 0.5 2.2 0.020 0.087 25 0.984 AREA SENSORS 25 0.984 7.5 0.295 LASER SENSORS MICRO PHOTOELECTRIC SENSORS 1 0.039 ø2.8 ø0.110 cable, 2m 6.562 ft long FIBER SENSORS PHOTOELECTRIC SENSORS 1 0.039 ø5.6 ø0.220 1 0.039 ø3.7 ø0.146 cable, 2m 6.562 ft long 876 The CAD data can be downloaded from our website. SQ4-A21-□ ø35 ø1.378 SQ4 SERIES STATIC CONTROL DEVICES ø2.8 ø0.110 cable, 2m 6.562 ft long ø3.7 ø0.146 cable, 2m 6.562 ft long LASER MARKERS 18.7 12.7 0.736 0.500 B C PLC HUMAN MACHINE INTERFACES A 5.6 0.220 Mounting bracket set model No. MS-SQ4-22 MS-SQ4-23 MS-SQ4-24 A B C ENERGY MANAGEMENT SOLUTIONS D 5.4 0.213 12.7 0.500 18.7 0.736 2 × ø4.2 ø0.165 3.4 0.134 10.5 0.413 16.5 0.650 2 × ø4.3 ø0.169 5.6 0.220 12.7 0.500 18.7 0.736 2 × ø4.3 ø0.169 FA COMPONENTS MACHINE VISION SYSTEMS UV CURING SYSTEMS MS-SQ4-□ Mounting bracket set Attachment SQ4-C11 Controller PVC / PFA mounting bracket Selection Guide Stainless steel bush (Note 1) 2 × ø4.2 ø0.165 (Note 2) 35 1.378 4.5 0.177 13 0.512 22 0.866 31 1.220 E Liquid Leak Detection MS-SQ4-21 MS-SQ4-22 MS-SQ4-23 MS-SQ4-24 A E 5.6 0.220 2.5 0.098 5.4 0.213 2.5 0.098 3.4 0.134 0.3 0.012 5.6 0.220 2.5 0.098 40 1.557 5 0.197 37.5 1.476 A 35.5 1.398 100 3.937 8 0.315 Mounting bracket set model No. Liquid Level Detection 2-ø4.4 ø0.173 mounting holes Notes: 1) ‌Drawing above is for PFA mounting bracket. PVC mounting brackets do not incorporate stainless steel bushes. 2) The size of mounting holes of PVC mounting bracket is ø4.3 mm ø0.169 in 5 0.197 10 (6.5) 66 0.394 0.256 2.598 48 (72.2) 1.890 2.843 (82.5) 3.248 Suitable for 35 mm 1.378 in width DIN rail 8 0.315 Water Detection Color Mark Detection 92 3.622 Wafer Detection Ultrasonic Small / Slim Object Detection Obstacle Detection SQ4 EX-F70/ EX-F60