LPG10-1000 Liquid Flow Sensor
Digital Planar Package Sensor
Ultra small size
Excellent repeatability
Bio-compatible & inert materials
Calibrated and temperature compensated digital output (I2C)
Product Summary
Unique CMOSens® planar packaging technology
enables non-invasive measurement of liquid flow
inside a cost-effective planar form factor. The flow
channel passes through the planar substrate and is
connected to fluidic channels via a manifold. The fluid
is only in contact with the glass channel. The digital
microsensor chip provides the full signal processing
functionality for a fully calibrated, temperaturecompensated digital output.
Integration of the LPG10-1000 Liquid Flow Sensor
Due to the dramatically reduced size and downmount fluidic connections, the LPG10-1000 allows an outstandingly
compact mechanical, fluidic, and electronic integration. To receive support and acceleration on initial testing, please
contact Sensirion about existing integration solutions.
1
Sensor Performance
Table 1: Performance of LPG10-1000 (all data for medium H2O, 23 °C, 1 barabs unless otherwise noted)
Parameter
LPG10-1000
Unit
Full scale flow rate
Sensor output limita
Accuracy below full scale
(whichever error is larger)
Repeatability error from zero to full scale
(whichever error is larger)
Temperature coefficient
(additional error / °C; whichever is larger)
Flow detection response time 63
Response time on power-up
Operating temperature
Operating humidity
Storage temperatureb
Storage humidity
Recommended maximum operating pressurec
Burst pressurec
1000
1500
5
0.25
0.5
0.025
0.1
0.005
40
120
+5 … +50 (+41 … +122)
0…95%, non-condensing
-40 … +60 (-40 … +140)
0…95%, non-condensing
3 (43)
7 (101)
l/min
l/min
% of measured value
% of full scale
% of measured value
% of full scale
% of measured value / °C
% of full scale / °C
ms
ms
°C (°F)
% RH
°C (°F)
% RH
bar (psi)
bar (psi)
aFlow rate at which the sensor output
saturates, see section 2 for performance specifications between full scale and saturation point
path empty
cPressures listed are mechanical limits of the glass substrate; Burst pressure of manifold assembly depends on actual manifold seal design.
bFlow
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LPG10-1000 Liquid Flow Sensor
2
Specifications Chart
LPG10-1000 Absolute Accuracy with H2O
100
10%
5%
At 23°C
At 6°C/40°C
Repeatability
0%
-1500 -1000
10
1
At 23°C
At 6°C/40°C
0.1
Repeatability
0.01
-500
0
500
Flow rate (µl/min H2O)
1000 1500
Figure 1: Sensor accuracy and repeatability (% of
measured value) across the sensor’s flow range
3
Accuracy (µl/min)
Accuracy (% of measured value)
LPG10-1000 Relative Accuracy with H2O
10
100
1000
Flow rate (µl/min H2O)
Figure 2: Sensor accuracy and repeatability (µl/min)
across the sensor’s flow range
Communication with the Sensor
The OEM flow sensor LPG10-1000 shows bidirectional, linear transfer characteristics. The
product comes fully calibrated for water.
Digital sampling time, 16 bit
Digital sampling time, 9 bit
3.1
74 ms
1 ms
Electrical Specifications
Table 2: DC Characteristics
Parameter
LPG10-1000
Operating
voltage
Operating
current
3.3– 3.6 VDC
(Recommended: 3.4-3.5 VDC)
< 6 mA typical in operation
The electrical connection to the LPG10-1000 flow
sensor is illustrated in the schematic drawing shown
in section 3.2.
3.2
Sample Circuitry
Table 3: Pad assignment from left to right:
Pad
Assignment
1
2
3
4
5
SDA, data
SCL (bi-directional), clock
VDDA, analog supply voltage
VDDD, digital supply voltage
GND, ground
The electrical connection to the pads can be realized in
different ways, e.g. using spring contacts.
3.3
Digital Communication via I²C-Bus
Digital communication between a master and the
LPG10-1000 sensor runs via the standard I²C-interface.
The physical interface consists of two bus lines, a data
line (SDA) and a clock line (SCL) which need to be
connected via pull-up resistors to the bus voltage of the
system. By default, the I2C address is set to 64
(hexadecimal: 40, binary: 1000000).
These lines can be used on a 3.3 V level with a clock
frequency of 100 kHz. For the detailed specifications of
this I²C communication, please refer to specific I²C
Application Notes from Sensirion.
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LPG10-1000 Liquid Flow Sensor
4
Fluidic Connection
Table 4: Fluidic Specifications and Pressure Rating
Parameter
LPG10-1000
Wetted materials:
Internal substrate flow channel material
Fluidic connection
5
Borosilicate glass
Downmount
Pressure drop (at full scale flow rate, H2O, 23°C)
0.1 mbar
Total internal volume
~11.7 l
Mechanical Specifications
Table 5: Mechanical Specifications (for tolerances please see the drawings below)
LPG10-1000
Parameter
Largest dimensions
Total mass
Cross section flow channel
~10 x 10 x 2.35 mm
~0.32 g
~0.9 x 0.9 mm
All dimensions in mm
Attention fragile!
Mechanical shocks and touching or probing of the glass surface may lead to stress on the chip and
may damage the glass package.
The thin-walled top layer can easily break. Thus, do not touch the planar glass package on
the top surface with your fingers or tools (e.g. tweezers).
Respect the burst pressure specification. Be aware that injecting fluid by hand with a
syringe can lead to large pressure peaks.
Do not exert pressure on the sensor chip. Mechanical structures must not be in contact
with the sensor chip (see bounding box above).
Do not operate the liquid flow sensor when the contact pads have been wetted. Dry first.
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LPG10-1000 Liquid Flow Sensor
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Ordering Information
Standard shipment includes only the sensor, neither cables nor fluidic connection material.
For easy testing, an Evaluation Kit is available. The kit contains:
One LPG10-1000 sensor, preassembled in a fluidic manifold (PMMA), featuring ¼ -28 flat bottom fluidic fittings. The
fluidic seal between sensor and manifold is ensured using two O-Rings (FKM). The included connector cap secures
the sensor to the manifold and features a 4-pin Molex connector. The included Molex adapter cable, USB-cable and
software allow for easy evaluation using a PC. When using the Evaluation Kit, the wetted materials include PMMA
(manifold) and FKM (O-Rings), as well as borosilicate glass (LPG10 sensor).
For integration support, please see the Application Note “Engineering Guidelines for LPG10 Integration”.
The connector cap included in the Evaluation Kit can be purchased in combination with the LPG10-1000 sensor.
Contact Sensirion for more information on the Evaluation or the Connectivity Kit.
Product
LPG10-1000
Evaluation Kit LPG10-1000
Connector Cap LPG10
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Article No
1-101126-01
1-101319-01
3.000.151
Version 4 – January 2019
MOQ
100
1
100
Packaging Unit
20
n/a
20
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LPG10-1000 Liquid Flow Sensor
Important Notices
Warning, Personal Injury
Do not use this product as safety or emergency stop devices or in
any other application where failure of the product could result in
personal injury. Do not use this product for applications other than
its intended and authorized use. Before installing, handling, using
or servicing this product, please consult the data sheet and
application notes. Failure to comply with these instructions could
result in death or serious injury.
If the Buyer shall purchase or use SENSIRION products for any
unintended or unauthorized application, Buyer shall defend, indemnify
and hold harmless SENSIRION and its officers, employees, subsidiaries,
affiliates and distributors against all claims, costs, damages and
expenses, and reasonable attorney fees arising out of, directly or
indirectly, any claim of personal injury or death associated with such
unintended or unauthorized use, even if SENSIRION shall be allegedly
negligent with respect to the design or the manufacture of the product.
ESD Precautions
The inherent design of this component causes it to be sensitive to
electrostatic discharge (ESD). To prevent ESD-induced damage and/or
degradation, take customary and statutory ESD precautions when
handling this product.
See application note “ESD, Latchup and EMC” for more information.
Warranty
SENSIRION warrants solely to the original purchaser of this product for
a period of 12 months (one year) from the date of delivery that this
product shall be of the quality, material and workmanship defined in
SENSIRION’s published specifications of the product. Within such
period, if proven to be defective, SENSIRION shall repair and/or replace
this product, in SENSIRION’s discretion, free of charge to the Buyer,
provided that:
▪ notice in writing describing the defects shall be given to SENSIRION
within fourteen (14) days after their appearance;
▪ such defects shall be found, to SENSIRION’s reasonable satisfaction,
to have arisen from SENSIRION’s faulty design, material, or
workmanship;
▪ the defective product shall be returned to SENSIRION’s factory at the
Buyer’s expense; and
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▪ the warranty period for any repaired or replaced product shall be
limited to the unexpired portion of the original period.
This warranty does not apply to any equipment which has not been
installed and used within the specifications recommended by
SENSIRION for the intended and proper use of the equipment. EXCEPT
FOR THE WARRANTIES EXPRESSLY SET FORTH HEREIN,
SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS OR
IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL
WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES
OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED.
SENSIRION is only liable for defects of this product arising under the
conditions of operation provided for in the data sheet and proper use of
the goods. SENSIRION explicitly disclaims all warranties, express or
implied, for any period during which the goods are operated or stored not
in accordance with the technical specifications.
SENSIRION does not assume any liability arising out of any application
or use of any product or circuit and specifically disclaims any and all
liability, including without limitation consequential or incidental damages.
All operating parameters, including without limitation recommended
parameters, must be validated for each customer’s applications by
customer’s technical experts. Recommended parameters can and do
vary in different applications.
SENSIRION reserves the right, without further notice, (i) to change the
product specifications and/or the information in this document and (ii) to
improve reliability, functions and design of this product.
Copyright© 2019, by SENSIRION.
CMOSens® is a trademark of Sensirion
All rights reserved
REACH, RoHS and WEEE Statement
The LPG10-1000 complies with requirements of the following directives:
EU Directive 1907/2006/EC concerning Registration, Evaluation,
Authorization and Restriction of Chemicals (REACH)
EU Directive 2002/96/EC on waste electrical and electronic equipment
(WEEE), OJ13.02.2003; esp. its Article 6 (1) with Annex II.
EU Directive 2002/65/EC on the restriction of certain hazardous
substances in electric and electronic equipment (RoHS),
OJ01.01.2011
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LPG10-1000 Liquid Flow Sensor
Headquarters and Subsidiaries
Sensirion AG
Laubisruetistr. 50
CH-8712 Staefa ZH
Switzerland
Sensirion Inc., USA
phone: +1 312 690 5858
info-us@sensirion.com
www.sensirion.com
Sensirion Korea Co. Ltd.
phone: +82 31 337 7700~3
info-kr@sensirion.com
www.sensirion.co.kr
phone: +41 44 306 40 00
fax:
+41 44 306 40 30
info@sensirion.com
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Sensirion Japan Co. Ltd.
phone: +81 3 3444 4940
info-jp@sensirion.com
www.sensirion.co.jp
Sensirion China Co. Ltd.
phone: +86 755 8252 1501
info-cn@sensirion.com
www.sensirion.com.cn
Sensirion Taiwan Co. Ltd
phone: +886 3 5506701
info@sensirion.com
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To find your local representative, please visit www.sensirion.com/distributors
Revision History of the LPG10-1000 Datasheet
▪
Revision Date
Changes
Chapter Description
4
January 2019 5, 6
Updated dimensions and contact information. Updated ordering information
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