AWM3200CR

Airflow Sensors Microbridge Mass Airflow/Amplified AWM3000 Series Figure 1 Heater control circuit FEATURES 1 Laser trimmed for improved sensor interchangeability 1 Flow sensing up to 1.0 SLPM 1 Low differential pressure sensing Like the AWM2000 Series, the dual Wheatstone bridges control airflow measurement. The AWM3000 Series is amplified; therefore, it can be used to increase the gain and to introduce voltage offsets to the sensor output. The schematic in Figure 3 depicts the amplification circuitry on board the sensor. Also, the heater control circuit (see Figure 1) and the sensing bridge supply circuit (see Figure 2) are on board the package. Figure 2 Sensing bridge supply circuit Airflow Figure 3 Differential instrumentation amplifier circuit Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada 71 Airflow Sensors Microbridge Mass Airflow/Amplified AWM3000 Series AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 ±0.01 VDC, 25°C) Catalog Listings AWM3100V AWM3150V Flow Range (Full Scale) +200 sccm +30 sccm Pressure Range (See Application Note 1) AWM3200V AWM3300V +1000 sccm +2.0N H2O (5 mBar) Output Voltage @ Trim Point 5 VDC @ 200 sccm 3.4 VDC @ 25 sccm 5 VDC @ 2N H2O 5 VDC @ 1000 sccm Null Voltage 1.00 ±0.05 VDC 1.00 ±0.10 VDC 1.00 ±0.08 VDC 1.00 ±0.10 VDC Null Voltage Shift, Typ. +25° to −25°C, 25° to +85°C ±25 mV ±100 mV ±25 mV ±25 mV Output Voltage Shift, Max. +25° to −25°C +25° to +85°C −4% Reading +4% Reading ±5% Reading ±5% Reading +24% Reading (Note 3) −24% Reading −5% Reading +5% Reading Repeatability & Hysteresis, Max. ±0.50% Reading ±1% Reading ±0.50% Reading ±1% Reading Min. Typ. Max. Excitation VDC (Note 2) 8.0 10±0.01 15 Power Consumption (mW) — 50 60 Response Time (msec) (Note 1) — 1.0 3.0 Common Mode Pressure (psi) — — 25 Temperature Range Operating: −25° to +85°C (−13° to +185°F); Storage: −40° to +90°C (−40° to +194°F) Termination 2,54 mm (.100N) centers, 0,635 mm (0.025N) square Weight (grams) 10.8 Shock Rating 100 g peak (5 drops, 6 axes) Notes: 1. Initial warm-up time for signal conditioned circuitry is 1 minute max. 2. Output Voltage is ratiometric to supply voltage. 3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. (See Application Note 1.) 4. Maximum allowable rate of flow change to prevent damage: 5 SLPM/1 sec. MOUNTING DIMENSIONS (for reference only) Note: Positive flow direction is defined as proceeding from Port 1 (P1) to Port 2 (P2) and results in positive output. Do not exert a force greater than 4.54kg (10 lbs.) in any direction. 72 Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada Airflow Sensors Microbridge Mass Airflow/Amplified AWM3000 Series OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ±0.01 VDC, 25 C AWM3100V AWM3150V AWM3200V (Note 2) AWM3300V Press. Flow Nom. Tol. mBar sccm VDC ± VDC Press Flow Nom. Tol. mBar sccm VDC ± VDC Flow Press Nom. Tol. sccm N H2O VDC ± VDC Press. Flow Nom. Tol. mBar sccm VDC ± VDC 0.49 200 5.00 0.15 2.50 30 3.75 0.70 60.0 2.00 5.00 0.15 3.40 1000 5.00 0.15 0.42 175 4.80 0.16 1.70 20 2.90 0.45 53.0 1.75 4.59 0.15 2.90 900 4.90 0.16 0.35 150 4.50 0.17 0.84 10 1.95 0.20 46.0 1.50 4.16 0.16 2.40 800 4.80 0.17 0.28 125 4.17 0.18 0.42 5 1.50 0.10 38.0 1.25 3.70 0.20 2.00 700 4.66 0.18 0.21 100 3.75 0.19 0.34 4 1.40 0.08 30.0 1.00 3.25 0.22 1.60 600 4.42 0.19 0.14 75 3.27 0.19 0.26 3 1.30 0.08 23.0 0.75 2.65 0.22 1.20 500 4.18 0.20 0.09 50 2.67 0.17 0.17 2 1.20 0.07 16.0 0.50 2.15 0.19 0.80 400 3.82 0.21 0.04 20 1.90 0.13 0.08 1 1.10 0.06 8.0 0.25 1.55 0.11 0.54 300 3.41 0.19 0.00 0 1.00 0.05 0.00 0 1.00 0.05 0.0 0.00 1.00 0.08 0.31 200 2.96 0.17 0.12 100 2.30 0.14 0.00 0 1.00 0.10 Notes: 1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure. Tolerance values apply to calibration type only. 2. Differential pressure calibrated devices are not recommended for flow measurement. Use flow calibrated devices for flow measurement. OUTPUT CURVES Airflow Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada 73 Airflow Sensors Microbridge Mass Airflow/Amplified AWM3000 Series AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 ±0.01 VDC, 25°C) Catalog Listings AWM3200CR* AWM3201CR* Differential Pressure Range 0 - 2N H2O (5 mBar) 0 - 0.5N H2O (1.25 mBar) Output Type 4 - 20 mA DC (linear) 4 - 20 mA DC (linear) 1 - 5 VDC (Note 2) Output @ Trim Point 20.0 ±1 mA DC @ 2N H2O 20.0 ±1 mA DC @ .05N H2O 5.00 ±0.150 VDC Null Output 4.00 ±0.3 mA DC 4.00 ±0.4 mA DC 3.00 ±0.050 VDC Null Shift +25° to −25°C, +25° to +85°C ±2 mA DC (max.) ±2 mA DC (max.) ±.050 VDC (max.) Output Shift +25° to −25°C +25° to +85°C +24% Reading −31% Reading (Note 3) +32% Reading −32% Reading (Note 3) −5% Reading +5% Reading Linearity Error ±5% Reading ±5% Reading N/A External Output Load 100 - 300 Ω (Note 4) 100 - 300 Ω (Note 4) N/A Response Time (Note 1) 60 msec (max.) 60 msec (max.) 3 msec (max.) Repeatability & Hysteresis, Max. ±0.50% Reading ±0.50% Reading ±1% Reading Excitation VDC 10 ±0.01 10±0.01 8-15 Power Consumption (mW) — 50 100 Common Mode Pressure (psi) — — 25 Calibration Gas Nitrogen Temperature Range Operating: −25° to +85°C (−13° to +185°F); Storage: −40° to +90°C (−40° to +194°F) Termination 2,54 mm (.100N) centers, 0,635 mm (0.025N) square Flow Range (Full Scale) AWM3303V ±1000 sccm (1 SLPM) Weight (grams) 10.8 Shock Rating 100 g peak (5 drops, 6 axes) Notes: 1. Initial warm-up time for signal conditioned circuitry is 1 minute max. 2. Output Voltage is ratiometric to supply voltage. 3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. 4. Output load connected from VOUT to GND (current sinking). 5. Maximum allowable rate of flow change to prevent damage: 5.0 SLPM/1.0 sec. * A 5 micron filter must be used on differential pressure sensors. MOUNTING DIMENSIONS (for reference only) Note: Positive flow direction is defined as proceeding from Port 1 (P1) to Port 2 (P2) and results in positive output. Do not exert a force greater than 4.54kg (10 lbs.) in any direction. 74 Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada Airflow Sensors Microbridge Mass Airflow/Amplified AWM3000 Series OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ± 0.01 VDC, 25 C AWM3200CR (Note 2) AWM3201CR (Note 2) AWM3303V Flow sccm Press. Nom. Tol. N H2O mA DC ± mA DC Flow sccm Press. Nom. Tol. N H2O mA DC ± mA DC Press Flow Nom. Tol. mBar sccm VDC ± VDC 0 0.00 4.00 0.3 0 0.00 4.0 0.4 3.49 1000 5.00 0.15 7 0.25 5.75 0.3 35 0.10 7.2 0.4 2.42 800 4.82 0.18 15 0.50 7.70 0.4 42 0.13 8.0 0.4 1.59 650 4.67 0.20 22 0.75 9.75 0.4 53 0.17 9.4 0.5 0.83 400 4.42 0.20 25 0.81 10.21 0.5 61 0.20 10.4 0.5 0.31 200 3.96 0.15 30 1.00 12.00 0.6 71 0.25 12.0 0.6 0.00 0 3.00 0.05 37 1.25 13.90 0.7 81 0.30 13.6 0.7 -0.31 -200 2.03 0.18 45 1.50 16.00 0.8 87 0.35 15.2 0.8 -0.83 -400 1.62 0.20 52 1.75 18.00 0.8 97 0.40 16.8 0.9 -1.59 -600 1.35 0.25 55 1.83 18.50 0.9 105 0.45 18.4 1.0 -2.42 -800 1.15 0.30 60 2.00 20.00 1.0 113 0.50 20.0 1.0 -3.44 -1000 1.00 0.35 Notes: 1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure. Tolerance values apply to calibration type only. 2. Differential pressure calibrated devices are not recommended for flow measurement. Use flow calibrated devices for flow measurement. OUTPUT CURVES Airflow Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada 75